HK80091A - Photosensitive positive composition and photoresist material prepared therewith - Google Patents

Photosensitive positive composition and photoresist material prepared therewith Download PDF

Info

Publication number
HK80091A
HK80091A HK800/91A HK80091A HK80091A HK 80091 A HK80091 A HK 80091A HK 800/91 A HK800/91 A HK 800/91A HK 80091 A HK80091 A HK 80091A HK 80091 A HK80091 A HK 80091A
Authority
HK
Hong Kong
Prior art keywords
propylene glycol
alkyl ether
mixture
ether acetate
radiation
Prior art date
Application number
HK800/91A
Other languages
German (de)
English (en)
French (fr)
Inventor
Dana Durham
Original Assignee
Az电子材料日本株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Az电子材料日本株式会社 filed Critical Az电子材料日本株式会社
Publication of HK80091A publication Critical patent/HK80091A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
HK800/91A 1985-10-28 1991-10-10 Photosensitive positive composition and photoresist material prepared therewith HK80091A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79188085A 1985-10-28 1985-10-28

Publications (1)

Publication Number Publication Date
HK80091A true HK80091A (en) 1991-10-18

Family

ID=25155071

Family Applications (1)

Application Number Title Priority Date Filing Date
HK800/91A HK80091A (en) 1985-10-28 1991-10-10 Photosensitive positive composition and photoresist material prepared therewith

Country Status (6)

Country Link
EP (1) EP0220645B1 (enrdf_load_stackoverflow)
JP (1) JPS62105137A (enrdf_load_stackoverflow)
KR (1) KR950001004B1 (enrdf_load_stackoverflow)
AT (1) ATE56545T1 (enrdf_load_stackoverflow)
DE (1) DE3674141D1 (enrdf_load_stackoverflow)
HK (1) HK80091A (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63303343A (ja) * 1987-06-03 1988-12-09 Konica Corp 感光性組成物及び感光性平版印刷版
JP2719912B2 (ja) * 1987-05-07 1998-02-25 コニカ株式会社 感光性平版印刷版
JPS63276047A (ja) * 1987-05-07 1988-11-14 Konica Corp 感光性組成物及び感光性平版印刷版
JPS6477051A (en) * 1987-06-03 1989-03-23 Konishiroku Photo Ind Photosensitive composition and photosensitive planographic printing plate
JP2806474B2 (ja) * 1987-07-28 1998-09-30 三菱化学株式会社 感光性組成物
JPH01116537A (ja) * 1987-10-29 1989-05-09 Konica Corp 感光性組成物
JPH01250945A (ja) * 1988-03-30 1989-10-05 Sumitomo Chem Co Ltd ポジ型レジスト組成物
JPH0229750A (ja) * 1988-07-20 1990-01-31 Mitsubishi Kasei Corp 感光性組成物および感光性平版印刷版
JP2947519B2 (ja) * 1988-10-03 1999-09-13 コニカ株式会社 感光性平版印刷版
JP2584311B2 (ja) * 1989-03-20 1997-02-26 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
US5558227A (en) * 1991-07-18 1996-09-24 Hakamada; Ikuhiro Sealed container having a calendar function
JP4209297B2 (ja) * 2003-10-06 2009-01-14 東京応化工業株式会社 吐出ノズル式塗布法用ポジ型ホトレジスト組成物及びレジストパターンの形成方法
EP2332892B1 (en) 2008-07-11 2025-04-09 NKT Photonics A/S Lifetime extending and performance improvements of optical fibers via loading with hydrogen or deuterium
JP5329999B2 (ja) * 2009-01-29 2013-10-30 ＡｚエレクトロニックマテリアルズＩｐ株式会社 パターン形成方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3040156A1 (de) * 1980-10-24 1982-06-03 Hoechst Ag, 6000 Frankfurt Lichtempfindliches gemisch und damit hergestelltes lichtempfindliches kopiermaterial
DE3584316D1 (de) * 1984-06-01 1991-11-14 Rohm & Haas Lichtempfindliche beschichtungszusammensetzung, aus diesem hergestellte thermisch stabile beschichtungen und verfahren zur herstellung von thermisch stabilen polymerbildern.
DE3421160A1 (de) * 1984-06-07 1985-12-12 Hoechst Ag, 6230 Frankfurt Positiv arbeitende strahlungsempfindliche beschichtungsloesung
EP0164083B1 (de) * 1984-06-07 1991-05-02 Hoechst Aktiengesellschaft Positiv arbeitende strahlungsempfindliche Beschichtungslösung
US4550069A (en) * 1984-06-11 1985-10-29 American Hoechst Corporation Positive photoresist compositions with o-quinone diazide, novolak, and propylene glycol alkyl ether acetate
DE3437687A1 (de) * 1984-10-15 1986-04-17 Hoechst Ag, 6230 Frankfurt Verfahren zum herstellen negativer kopien mittels eines materials auf basis von 1,2-chinondiaziden
DE3666638D1 (en) * 1985-03-11 1989-11-30 Hoechst Celanese Corp Process for the production of photoresist patterns

Also Published As

Publication number Publication date
EP0220645A3 (en) 1987-08-26
JPS62105137A (ja) 1987-05-15
DE3674141D1 (de) 1990-10-18
EP0220645A2 (de) 1987-05-06
JPH0459630B2 (enrdf_load_stackoverflow) 1992-09-22
KR950001004B1 (ko) 1995-02-06
ATE56545T1 (de) 1990-09-15
EP0220645B1 (de) 1990-09-12
KR870004334A (ko) 1987-05-08

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Legal Events

Date Code Title Description
PF Patent in force
AS Change of ownership

Owner name: AZ ELECTRONIC MATERIALS (JAPAN) K.K

Free format text: FORMER OWNER(S): HOECHST CELANESE CORPORATION ?

CHPA Change of a particular in the register (except of change of ownership)
PE Patent expired

Effective date: 20061019