HK1214225A1 - 防塵薄膜組件收納容器 - Google Patents

防塵薄膜組件收納容器

Info

Publication number
HK1214225A1
HK1214225A1 HK16102087.2A HK16102087A HK1214225A1 HK 1214225 A1 HK1214225 A1 HK 1214225A1 HK 16102087 A HK16102087 A HK 16102087A HK 1214225 A1 HK1214225 A1 HK 1214225A1
Authority
HK
Hong Kong
Prior art keywords
storage container
film components
dustproof thin
dustproof
thin
Prior art date
Application number
HK16102087.2A
Other languages
English (en)
Chinese (zh)
Inventor
關原敏
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1214225A1 publication Critical patent/HK1214225A1/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
HK16102087.2A 2014-04-17 2016-02-24 防塵薄膜組件收納容器 HK1214225A1 (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014085228 2014-04-17

Publications (1)

Publication Number Publication Date
HK1214225A1 true HK1214225A1 (zh) 2016-07-22

Family

ID=54428555

Family Applications (1)

Application Number Title Priority Date Filing Date
HK16102087.2A HK1214225A1 (zh) 2014-04-17 2016-02-24 防塵薄膜組件收納容器

Country Status (5)

Country Link
JP (1) JP6403211B2 (ko)
KR (2) KR102460875B1 (ko)
CN (1) CN105035466B (ko)
HK (1) HK1214225A1 (ko)
TW (1) TWI590999B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206813396U (zh) * 2017-06-07 2017-12-29 郑荣华 一种贴膜固定座
KR102172217B1 (ko) * 2018-07-31 2020-10-30 주식회사 시엠테크놀로지 펠리클 수납용기 및 이를 이용한 파티클 제거 방법
JP7061288B2 (ja) * 2018-08-28 2022-04-28 日本軽金属株式会社 フラットパネルディスプレイ用ペリクル枠体及びその製造方法
CN114229229B (zh) * 2021-10-29 2023-04-07 东莞市金恒晟新材料科技有限公司 一种防割裂保护膜

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004361705A (ja) * 2003-06-05 2004-12-24 Asahi Kasei Electronics Co Ltd 大型ペリクルの収納方法
JP4236535B2 (ja) * 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 大型ペリクル収納容器
JP4476727B2 (ja) 2003-11-18 2010-06-09 株式会社 ネットプラスチック 大型精密シート状（半）製品用密封容器
JP4675601B2 (ja) * 2003-11-18 2011-04-27 株式会社 ネットプラスチック 大型精密シート状製品および半製品用密封容器
CN2685253Y (zh) * 2004-02-13 2005-03-16 四川长虹电器股份有限公司 货物托盘
JP4176138B2 (ja) * 2005-01-27 2008-11-05 旭化成エレクトロニクス株式会社 大型ペリクル収納容器
JP4391435B2 (ja) 2005-03-22 2009-12-24 信越化学工業株式会社 ペリクル収納容器
JP2007025183A (ja) * 2005-07-15 2007-02-01 Shin Etsu Polymer Co Ltd ペリクル用収納容器
JP4668724B2 (ja) * 2005-08-08 2011-04-13 信越ポリマー株式会社 ペリクル用収納容器
JP2007153402A (ja) * 2005-12-06 2007-06-21 Takiron Co Ltd 収容ケース
US8056758B2 (en) * 2006-02-21 2011-11-15 Bway Corporation Non-cylindrical container and lid
JP4796946B2 (ja) * 2006-11-30 2011-10-19 信越化学工業株式会社 ペリクル収納容器
JP2008216846A (ja) * 2007-03-07 2008-09-18 Asahi Kasei Electronics Co Ltd ペリクル収納容器
JP4955449B2 (ja) * 2007-05-10 2012-06-20 信越化学工業株式会社 ペリクル収納容器
JP2012046239A (ja) * 2010-08-30 2012-03-08 Shin-Etsu Chemical Co Ltd ペリクル収納ケース用コーナークリップ
CN102530353B (zh) * 2010-09-30 2015-04-01 京洛株式会社 用于薄板面板的层叠的组件
JP5684752B2 (ja) * 2012-03-29 2015-03-18 信越化学工業株式会社 ペリクル収納容器

Also Published As

Publication number Publication date
KR102379852B1 (ko) 2022-03-29
KR20150120274A (ko) 2015-10-27
CN105035466B (zh) 2017-12-08
TWI590999B (zh) 2017-07-11
KR102460875B1 (ko) 2022-10-31
CN105035466A (zh) 2015-11-11
TW201600425A (zh) 2016-01-01
JP6403211B2 (ja) 2018-10-10
JP2015212814A (ja) 2015-11-26
KR20220000390A (ko) 2022-01-03

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20220420