HK1214225A1 - A storage container for dustproof thin-film components - Google Patents

A storage container for dustproof thin-film components

Info

Publication number
HK1214225A1
HK1214225A1 HK16102087.2A HK16102087A HK1214225A1 HK 1214225 A1 HK1214225 A1 HK 1214225A1 HK 16102087 A HK16102087 A HK 16102087A HK 1214225 A1 HK1214225 A1 HK 1214225A1
Authority
HK
Hong Kong
Prior art keywords
storage container
film components
dustproof thin
dustproof
thin
Prior art date
Application number
HK16102087.2A
Other languages
Chinese (zh)
Inventor
關原敏
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1214225A1 publication Critical patent/HK1214225A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
HK16102087.2A 2014-04-17 2016-02-24 A storage container for dustproof thin-film components HK1214225A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014085228 2014-04-17

Publications (1)

Publication Number Publication Date
HK1214225A1 true HK1214225A1 (en) 2016-07-22

Family

ID=54428555

Family Applications (1)

Application Number Title Priority Date Filing Date
HK16102087.2A HK1214225A1 (en) 2014-04-17 2016-02-24 A storage container for dustproof thin-film components

Country Status (5)

Country Link
JP (1) JP6403211B2 (en)
KR (2) KR102460875B1 (en)
CN (1) CN105035466B (en)
HK (1) HK1214225A1 (en)
TW (1) TWI590999B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206813396U (en) * 2017-06-07 2017-12-29 郑荣华 A kind of pad pasting fixed seat
KR102172217B1 (en) * 2018-07-31 2020-10-30 주식회사 시엠테크놀로지 Pellicle container and particle removing method using the same
JP7061288B2 (en) * 2018-08-28 2022-04-28 日本軽金属株式会社 Pellicle frame for flat panel display and its manufacturing method
CN114229229B (en) * 2021-10-29 2023-04-07 东莞市金恒晟新材料科技有限公司 Anti-cutting protective film

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004361705A (en) * 2003-06-05 2004-12-24 Asahi Kasei Electronics Co Ltd Method for housing large pellicle
JP4236535B2 (en) 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 Large pellicle storage container
JP4675601B2 (en) * 2003-11-18 2011-04-27 株式会社 ネットプラスチック Sealed container for large precision sheet products and semi-finished products
JP4476727B2 (en) 2003-11-18 2010-06-09 株式会社 ネットプラスチック Large precision sheet-shaped (semi) sealed container for products
CN2685253Y (en) * 2004-02-13 2005-03-16 四川长虹电器股份有限公司 Goods pallet
JP4176138B2 (en) 2005-01-27 2008-11-05 旭化成エレクトロニクス株式会社 Large pellicle storage container
JP4391435B2 (en) 2005-03-22 2009-12-24 信越化学工業株式会社 Pellicle storage container
JP2007025183A (en) * 2005-07-15 2007-02-01 Shin Etsu Polymer Co Ltd Storage container for pellicle
JP4668724B2 (en) 2005-08-08 2011-04-13 信越ポリマー株式会社 Pellicle storage container
JP2007153402A (en) 2005-12-06 2007-06-21 Takiron Co Ltd Storage case
US8056758B2 (en) * 2006-02-21 2011-11-15 Bway Corporation Non-cylindrical container and lid
JP4796946B2 (en) * 2006-11-30 2011-10-19 信越化学工業株式会社 Pellicle storage container
JP2008216846A (en) * 2007-03-07 2008-09-18 Asahi Kasei Electronics Co Ltd Pellicle storage container
JP4955449B2 (en) * 2007-05-10 2012-06-20 信越化学工業株式会社 Pellicle storage container
JP2012046239A (en) * 2010-08-30 2012-03-08 Shin-Etsu Chemical Co Ltd Corner clip for pellicle container case
CN102530353B (en) * 2010-09-30 2015-04-01 京洛株式会社 Module for stacking thin panels
JP5684752B2 (en) * 2012-03-29 2015-03-18 信越化学工業株式会社 Pellicle storage container

Also Published As

Publication number Publication date
CN105035466B (en) 2017-12-08
TWI590999B (en) 2017-07-11
JP6403211B2 (en) 2018-10-10
CN105035466A (en) 2015-11-11
KR102460875B1 (en) 2022-10-31
JP2015212814A (en) 2015-11-26
KR20150120274A (en) 2015-10-27
TW201600425A (en) 2016-01-01
KR20220000390A (en) 2022-01-03
KR102379852B1 (en) 2022-03-29

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20220420