HK1210801A1 - An adhesive for use in a pellicle and a pellicle using the same - Google Patents

An adhesive for use in a pellicle and a pellicle using the same

Info

Publication number
HK1210801A1
HK1210801A1 HK15111597.7A HK15111597A HK1210801A1 HK 1210801 A1 HK1210801 A1 HK 1210801A1 HK 15111597 A HK15111597 A HK 15111597A HK 1210801 A1 HK1210801 A1 HK 1210801A1
Authority
HK
Hong Kong
Prior art keywords
pellicle
adhesive
same
Prior art date
Application number
HK15111597.7A
Other languages
English (en)
Chinese (zh)
Inventor
堀越淳
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1210801A1 publication Critical patent/HK1210801A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02—Non-macromolecular additives
    • C09J11/04—Non-macromolecular additives inorganic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/06—Luminescent, e.g. electroluminescent, chemiluminescent materials containing organic luminescent materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2211/00—Chemical nature of organic luminescent or tenebrescent compounds
    • C09K2211/10—Non-macromolecular compounds
    • C09K2211/1003—Carbocyclic compounds
    • C09K2211/1011—Condensed systems
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2211/00—Chemical nature of organic luminescent or tenebrescent compounds
    • C09K2211/10—Non-macromolecular compounds
    • C09K2211/1018—Heterocyclic compounds
    • C09K2211/1025—Heterocyclic compounds characterised by ligands
    • C09K2211/1029—Heterocyclic compounds characterised by ligands containing one nitrogen atom as the heteroatom
    • C09K2211/1033—Heterocyclic compounds characterised by ligands containing one nitrogen atom as the heteroatom with oxygen

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Laminated Bodies (AREA)
HK15111597.7A 2014-04-04 2015-11-25 An adhesive for use in a pellicle and a pellicle using the same HK1210801A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014077531A JP6150300B2 (ja) 2014-04-04 2014-04-04 ペリクルの貼り付け部確認方法

Publications (1)

Publication Number Publication Date
HK1210801A1 true HK1210801A1 (en) 2016-05-06

Family

ID=52633119

Family Applications (1)

Application Number Title Priority Date Filing Date
HK15111597.7A HK1210801A1 (en) 2014-04-04 2015-11-25 An adhesive for use in a pellicle and a pellicle using the same

Country Status (7)

Country Link
US (1) US9581896B2 (ja)
EP (1) EP2927745B1 (ja)
JP (1) JP6150300B2 (ja)
KR (1) KR102261472B1 (ja)
CN (1) CN104974682B (ja)
HK (1) HK1210801A1 (ja)
TW (1) TWI596424B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6308623B2 (ja) 2014-12-25 2018-04-11 信越化学工業株式会社 ペリクル用粘着剤、それを用いたペリクル、及びペリクルの評価方法
JP6861596B2 (ja) * 2017-08-07 2021-04-21 信越化学工業株式会社 ペリクルフレーム及びペリクル
JP7114167B2 (ja) * 2018-01-24 2022-08-08 株式会社ディスコ 研削ホイール及び研削ホイールの製造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2387512A (en) * 1942-02-10 1945-10-23 Du Pont Luminescent adhesive tape
JPS58219023A (ja) 1982-06-15 1983-12-20 Daicel Chem Ind Ltd 樹脂薄膜の製造方法
JPS6083032A (ja) 1983-10-13 1985-05-11 Asahi Chem Ind Co Ltd 光透過性に優れたフオトマスク用防塵カバ−
JPS6327707A (ja) 1986-07-21 1988-02-05 Matsushita Electric Ind Co Ltd 双曲面鏡検査装置
JPH05331438A (ja) * 1992-05-30 1993-12-14 Sony Corp 蛍光性接着剤及び接着剤の塗布状態検査方法、検査装置
WO1998035270A1 (fr) * 1997-02-10 1998-08-13 Mitsui Chemicals, Inc. Procede permettant de coller une pellicule de protection sur un article, articles ainsi obtenus, pellicule destinee a des rayons ultraviolets et emballage destine a ces pellicules
US8158517B2 (en) * 2004-06-28 2012-04-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing wiring substrate, thin film transistor, display device and television device
JP2007010786A (ja) * 2005-06-28 2007-01-18 Shin Etsu Chem Co Ltd 大型ペリクルの製造方法
JP5484785B2 (ja) * 2008-05-19 2014-05-07 旭化成イーマテリアルズ株式会社 ペリクル用粘着材組成物
WO2011043071A1 (ja) * 2009-10-07 2011-04-14 三井化学株式会社 ペリクルおよびそのマスク接着剤
KR101186893B1 (ko) * 2010-05-28 2012-10-05 엘지이노텍 주식회사 대면적 포토마스크 및 그의 제조방법
JP5478463B2 (ja) 2010-11-17 2014-04-23 信越化学工業株式会社 リソグラフィー用ペリクル
US8681310B2 (en) * 2010-12-02 2014-03-25 Globalfoundries Inc. Mechanical fixture of pellicle to lithographic photomask
WO2012157759A1 (ja) * 2011-05-18 2012-11-22 旭化成イーマテリアルズ株式会社 ペリクル、ペリクル用粘着剤、ペリクル付フォトマスク及び半導体素子の製造方法
JP5749680B2 (ja) * 2012-04-26 2015-07-15 信越化学工業株式会社 ペリクル
KR101699635B1 (ko) * 2012-08-02 2017-01-24 미쓰이 가가쿠 가부시키가이샤 펠리클

Also Published As

Publication number Publication date
EP2927745A3 (en) 2016-07-13
KR20150115625A (ko) 2015-10-14
CN104974682A (zh) 2015-10-14
EP2927745A2 (en) 2015-10-07
US20150286134A1 (en) 2015-10-08
EP2927745B1 (en) 2020-04-22
TW201539114A (zh) 2015-10-16
TWI596424B (zh) 2017-08-21
JP6150300B2 (ja) 2017-06-21
KR102261472B1 (ko) 2021-06-07
JP2015199776A (ja) 2015-11-12
US9581896B2 (en) 2017-02-28
CN104974682B (zh) 2019-03-12

Similar Documents

Publication Publication Date Title
HK1231471A1 (zh) -雜芳氧基-和 芳氧基-喹啉- -甲酰胺及其用途
PL3231605T3 (pl) Laminat elastyczny i zawierający go artykuł
IL247315A0 (en) Anti-acth antibodies and their uses
IL249230A0 (en) A combination that includes glucocorticoid and edo-s101
SG11201700740QA (en) Adhesive film
EP3192815A4 (en) High-recoverability resin particles and use thereof
PL3078489T3 (pl) Elastyczny laminat i zawierający go wyrób
HK1211089A1 (en) Adhesive for anti-dust pellicle assembly and anti-dust pellicle assembly employing the same
GB201512044D0 (en) Application in German
GB201405637D0 (en) Powdered adhesive materials and their use
SG11201804481WA (en) Adhesive sheet and usage method therefor
EP3131514A4 (en) Fixing member and absorbent article
HK1243077A1 (zh) 呱啶基吡唑並嘧啶酮及其用途
EP3170674A4 (en) Resin sheet and booklet
GB201410226D0 (en) Methods and arrays for use in the same
HK1210801A1 (en) An adhesive for use in a pellicle and a pellicle using the same
PT2930219T (pt) Sistemas de adesivos reativos e a sua utilização
GB2533082C (en) A nematicidal composition and the use thereof
PL3023468T3 (pl) System klejenia do zastosowania z kompozytową folią budowlaną i kompozytowa folia budowlana z systemem klejenia
PT3161091T (pt) Adesivo de fusão a quente e seu uso
EP3120272A4 (en) Local behavior in a variational system
SG11201804551VA (en) Adhesive sheet and usage method therefor
PL3231604T3 (pl) Elastyczny laminat, zawierający go wyrób, rozciągnięty elastyczny laminat i zawierający go wyrób
IL249751B (en) Adhesive packaging systems and lamination methods that use them
PL3229772T3 (pl) 6-arylo-9-glikozylopuryny i ich zastosowanie

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20230227