HK1201645A1 - Ceramic thermally-compensated resonator - Google Patents

Ceramic thermally-compensated resonator

Info

Publication number
HK1201645A1
HK1201645A1 HK15102082.8A HK15102082A HK1201645A1 HK 1201645 A1 HK1201645 A1 HK 1201645A1 HK 15102082 A HK15102082 A HK 15102082A HK 1201645 A1 HK1201645 A1 HK 1201645A1
Authority
HK
Hong Kong
Prior art keywords
compensated resonator
ceramic thermally
thermally
ceramic
resonator
Prior art date
Application number
HK15102082.8A
Other languages
English (en)
Chinese (zh)
Inventor
Thierry Hessler
Philippe Dubois
Thierry Conus
Original Assignee
Swatch Group Res & Dev Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swatch Group Res & Dev Ltd filed Critical Swatch Group Res & Dev Ltd
Publication of HK1201645A1 publication Critical patent/HK1201645A1/xx

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/20—Compensation of mechanisms for stabilising frequency
    • G04B17/22—Compensation of mechanisms for stabilising frequency for the effect of variations of temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/20—Compensation of mechanisms for stabilising frequency
    • G04B17/22—Compensation of mechanisms for stabilising frequency for the effect of variations of temperature
    • G04B17/227—Compensation of mechanisms for stabilising frequency for the effect of variations of temperature composition and manufacture of the material used
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00—Mechanisms for stabilising frequency
    • G04B17/20—Compensation of mechanisms for stabilising frequency
    • G04B17/24—Compensation of mechanisms for stabilising frequency for the effect of variations of atmospheric pressure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0075—Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/027—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the microelectro-mechanical [MEMS] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0407—Temperature coefficient

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
HK15102082.8A 2011-11-04 2015-03-02 Ceramic thermally-compensated resonator HK1201645A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP11187854.2A EP2590325A1 (de) 2011-11-04 2011-11-04 Thermokompensierter Resonator aus Keramik
PCT/EP2012/070129 WO2013064351A1 (fr) 2011-11-04 2012-10-11 Résonateur thermocompensé en céramique

Publications (1)

Publication Number Publication Date
HK1201645A1 true HK1201645A1 (en) 2015-09-04

Family

ID=47008611

Family Applications (2)

Application Number Title Priority Date Filing Date
HK15102082.8A HK1201645A1 (en) 2011-11-04 2015-03-02 Ceramic thermally-compensated resonator
HK18103810.2A HK1244359A1 (zh) 2011-11-04 2018-03-19 陶瓷溫度補償諧振器

Family Applications After (1)

Application Number Title Priority Date Filing Date
HK18103810.2A HK1244359A1 (zh) 2011-11-04 2018-03-19 陶瓷溫度補償諧振器

Country Status (7)

Country Link
US (1) US10310451B2 (de)
EP (2) EP2590325A1 (de)
JP (3) JP2015501591A (de)
CN (3) CN107276557A (de)
HK (2) HK1201645A1 (de)
RU (1) RU2573275C2 (de)
WO (1) WO2013064351A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2781968A1 (de) * 2013-03-19 2014-09-24 Nivarox-FAR S.A. Resonator, der weniger empfindlich gegenüber klimatischen Schwankungen ist
EP3100120A1 (de) 2014-01-29 2016-12-07 Cartier International AG Wärmekompensierte spiralfeder aus keramik mit silicium in der zusammensetzung davon und verfahren zu anpassung davon
EP2985659B1 (de) * 2014-03-05 2020-04-29 Nivarox-FAR S.A. Spirale, die mit einer federscheibe gesichert werden muss
EP2952972B1 (de) * 2014-06-03 2017-01-25 The Swatch Group Research and Development Ltd. Herstellungsverfahren einer Ausgleichsspiralfeder aus Verbundmaterial
EP2952979B1 (de) * 2014-06-03 2017-03-01 Nivarox-FAR S.A. Uhrkomponente aus fotostrukturierbarem glas
EP3002638B1 (de) 2014-09-08 2021-08-18 Richemont International S.A. Herstellungsverfahren einer thermokompensierten spiralfeder
CN107005223B (zh) * 2014-10-03 2021-06-04 芬兰国家技术研究中心股份公司 温度补偿梁谐振器
WO2016051023A1 (en) * 2014-10-03 2016-04-07 Teknologian Tutkimuskeskus Vtt Oy Temperature compensated compound resonator
WO2016199039A1 (fr) 2015-06-08 2016-12-15 Richemont International Sa Résonateur horloger thermocompensé et méthode pour réaliser un tel résonateur
EP3106931A1 (de) * 2015-06-16 2016-12-21 Nivarox-FAR S.A. Werkstück mit entkoppelter schweissoberfläche
EP3181938B1 (de) 2015-12-18 2019-02-20 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Herstellungsverfahren einer spiralfeder mit einer vorbestimmten steifigkeit durch wegnahme von material
EP3181940B2 (de) 2015-12-18 2023-07-05 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Herstellungsverfahren einer spiralfeder mit einer vorbestimmten steifigkeit durch lokalisierte wegnahme von material
EP3181939B1 (de) 2015-12-18 2019-02-20 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Herstellungsverfahren einer spiralfeder mit einer vorbestimmten steifigkeit durch zugabe von material
EP3190095B1 (de) 2016-01-08 2023-08-02 Richemont International SA Wärmekompensierter resonator, der ein glas umfasst
JP7182616B2 (ja) * 2018-04-19 2022-12-02 シチズン時計株式会社 ひげぜんまいおよび調速機
EP3667433B1 (de) * 2018-12-12 2023-02-01 Nivarox-FAR S.A. Spiralfeder und ihr herstellungsverfahren
EP3839644A1 (de) * 2019-12-20 2021-06-23 Nivarox-FAR S.A. Flexible uhrwerkskomponente, insbesondere für oszillationsmechanismus, und eine solche komponente umfassendes uhrwerk

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4456898A (en) * 1982-02-11 1984-06-26 General Electric Company Thermal compensators for magnetic circuits
JPS61195013A (ja) * 1985-02-25 1986-08-29 Yasuhiko Nakagawa 零温度係数をもつ弾性表面波材料
AT401837B (de) * 1993-03-04 1996-12-27 Avl Verbrennungskraft Messtech Piezoelektrisches kristallelement
CH693049A5 (fr) * 1998-02-27 2003-01-31 Rado Montres Sa Procédé de réalisation d'étanchéité dans une montre.
US6351056B1 (en) * 1999-10-01 2002-02-26 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having mutually opposing thin plate portions
EP1239588A2 (de) * 2001-03-04 2002-09-11 Kazuhiko Yamanouchi Akustisches Oberflächenwellensubstrat und akustischer Oberflächenwellenfunktionsbaustein
JP3961267B2 (ja) * 2001-11-13 2007-08-22 京セラ株式会社 水晶デバイス
FR2842313B1 (fr) * 2002-07-12 2004-10-22 Gideon Levingston Oscilliateur mecanique (systeme balancier et ressort spiral) en materiaux permettant d'atteindre un niveau superieur de precision, applique a un mouvement d'horlogerie ou autre instrument de precision
DE60206939T2 (de) 2002-11-25 2006-07-27 Csem Centre Suisse D'electronique Et De Microtechnique S.A. Spiraluhrwerkfeder und Verfahren zu deren Herstellung
US8358053B2 (en) * 2003-06-30 2013-01-22 Piedek Technical Laboratory Unit, oscillator having unit and electronic apparatus having oscillator
US7768179B2 (en) * 2003-06-30 2010-08-03 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator having quartz crystal unit and electronic apparatus having quartz crystal oscillator
GB0324439D0 (en) * 2003-10-20 2003-11-19 Levingston Gideon R Minimal thermal variation and temperature compensating non-magnetic balance wheels and methods of production of these and their associated balance springs
US7068125B2 (en) * 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
JP5057644B2 (ja) * 2004-03-22 2012-10-24 京セラ株式会社 ガラスセラミック組成物およびガラスセラミック焼結体の製造方法
JP2005318366A (ja) * 2004-04-30 2005-11-10 Seiko Epson Corp 圧電薄膜共振子、フィルタ及び圧電薄膜共振子の製造方法
EP1605182B8 (de) * 2004-06-08 2010-07-14 CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement Unruh-Spiralfeder-Oszillator mit Temperaturkompensation
EP2426785A2 (de) * 2004-10-01 2012-03-07 L. Pierre De Rochemont Keramisches Antennenmodul und Herstellungsverfahren dafür
FR2889374A1 (fr) * 2005-07-29 2007-02-02 Michelin Soc Tech Structure resonnante hybride pour verifier des parametres d'un pneumatique
JP2007123371A (ja) * 2005-10-26 2007-05-17 Kyocera Corp 多数個取り電子装置およびその製造方法
EP1791039A1 (de) * 2005-11-25 2007-05-30 The Swatch Group Research and Development Ltd. Spiralfeder aus athermisches Glas für ein Uhrwerk und Herstellungsverfahren dafür
US7847649B2 (en) * 2005-12-23 2010-12-07 Nxp B.V. MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
EP1857891A1 (de) * 2006-05-17 2007-11-21 Patek Philippe Sa Spiralfeder-Spiralrollegesamtheit für ein Uhrwerk
CH700716B1 (fr) 2006-10-09 2010-10-15 Suisse Electronique Microtech Résonateur en silicium de type diapason.
JP2008155333A (ja) * 2006-12-25 2008-07-10 Japan Science & Technology Agency 金属ガラスを用いたマイクロマシン及びそれを用いたセンサ並びにその製造方法
CH714952B1 (fr) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Composant horloger, son procédé de fabrication et application de ce procédé.
JP5122888B2 (ja) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 発振子、発振子の製造方法、及び発振器
JP4539708B2 (ja) * 2007-11-02 2010-09-08 エプソントヨコム株式会社 圧電振動片、圧電振動子および加速度センサ
CH699494B1 (fr) * 2007-11-28 2010-09-30 Manuf Et Fabrique De Montres E Oscillateur mécanique présentant un coefficient thermoélastique optimisé et procédé de fabrication d'un tel oscillateur.
CH698962B1 (fr) * 2008-06-10 2014-10-31 Rolex Sa Ressort de barillet et procédé pour sa mise en forme.
CH699780B1 (fr) * 2008-10-22 2014-02-14 Richemont Int Sa Ressort spiral de montre autocompensé.
JP2010219992A (ja) * 2009-03-18 2010-09-30 Seiko Epson Corp 振動片および振動子
CN101551283B (zh) * 2009-05-14 2010-10-20 上海交通大学 表面横波压力和温度传感器
EP2264553B1 (de) * 2009-06-19 2016-10-26 Nivarox-FAR S.A. Thermokompensierte Feder und ihr Herstellungsverfahren
EP2284629A1 (de) * 2009-08-13 2011-02-16 ETA SA Manufacture Horlogère Suisse Thermokompensierter mechanischer Resonator
CH702151A1 (fr) * 2009-11-10 2011-05-13 Cartier Creation Studio Sa Procede de realisation de pieces micromecaniques, notamment en verre ceramique.
TWI398097B (zh) * 2009-11-18 2013-06-01 Wafer Mems Co Ltd 音叉型石英晶體諧振器
EP2337221A1 (de) * 2009-12-15 2011-06-22 The Swatch Group Research and Development Ltd. Thermokompensierter Resonator mindestens ersten und zweiten Grades
US8283835B2 (en) * 2010-04-30 2012-10-09 Epcos Ag Guided bulk acoustic wave device having reduced height and method for manufacturing
EP2395661A1 (de) * 2010-06-10 2011-12-14 The Swatch Group Research and Development Ltd. Temperaturkompensierter Resonator mit reduzierten Temperaturkoeffizienten erster und zweiter Ordnung

Also Published As

Publication number Publication date
RU2573275C2 (ru) 2016-01-20
CN104025453A (zh) 2014-09-03
JP2019124699A (ja) 2019-07-25
CN107276557A (zh) 2017-10-20
CN110474615A (zh) 2019-11-19
HK1244359A1 (zh) 2018-08-03
RU2014122532A (ru) 2015-12-10
JP6893525B2 (ja) 2021-06-23
US10310451B2 (en) 2019-06-04
JP2016191711A (ja) 2016-11-10
EP2774268A1 (de) 2014-09-10
EP2774268B1 (de) 2019-01-23
EP2590325A1 (de) 2013-05-08
US20140313866A1 (en) 2014-10-23
WO2013064351A1 (fr) 2013-05-10
JP2015501591A (ja) 2015-01-15

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