HK1175154A1 - Substrate cartridge, substrate storage device, and substrate processing system - Google Patents

Substrate cartridge, substrate storage device, and substrate processing system

Info

Publication number
HK1175154A1
HK1175154A1 HK13102159.8A HK13102159A HK1175154A1 HK 1175154 A1 HK1175154 A1 HK 1175154A1 HK 13102159 A HK13102159 A HK 13102159A HK 1175154 A1 HK1175154 A1 HK 1175154A1
Authority
HK
Hong Kong
Prior art keywords
substrate
storage device
processing system
cartridge
substrate processing
Prior art date
Application number
HK13102159.8A
Other languages
English (en)
Chinese (zh)
Inventor
濱田智秀
木內徹
Original Assignee
株式會社尼康
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式會社尼康 filed Critical 株式會社尼康
Publication of HK1175154A1 publication Critical patent/HK1175154A1/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • B65H20/30—Arrangements for accumulating surplus web
    • B65H20/32—Arrangements for accumulating surplus web by making loops
    • B65H20/34—Arrangements for accumulating surplus web by making loops with rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2402/00—Constructional details of the handling apparatus
    • B65H2402/50—Machine elements
    • B65H2402/52—Bearings, e.g. magnetic or hydrostatic bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1313—Details of longitudinal profile shape concave
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1314—Details of longitudinal profile shape convex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/132—Details of longitudinal profile arrangement of segments along axis
    • B65H2404/1321—Segments juxtaposed along axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2408/00—Specific machines
    • B65H2408/20—Specific machines for handling web(s)
    • B65H2408/21—Accumulators
    • B65H2408/217—Accumulators of rollers type, e.g. with at least one fixed and one movable roller
    • B65H2408/2172—Accumulators of rollers type, e.g. with at least one fixed and one movable roller several cascaded loops of rollers
HK13102159.8A 2010-04-09 2013-02-20 Substrate cartridge, substrate storage device, and substrate processing system HK1175154A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US32236010P 2010-04-09 2010-04-09
US42320710P 2010-12-15 2010-12-15
PCT/JP2011/059006 WO2011126133A1 (fr) 2010-04-09 2011-04-11 Cartouche de support, dispositif de stockage de support et système de traitement de support

Publications (1)

Publication Number Publication Date
HK1175154A1 true HK1175154A1 (en) 2013-06-28

Family

ID=44763068

Family Applications (1)

Application Number Title Priority Date Filing Date
HK13102159.8A HK1175154A1 (en) 2010-04-09 2013-02-20 Substrate cartridge, substrate storage device, and substrate processing system

Country Status (6)

Country Link
JP (1) JP5838964B2 (fr)
KR (3) KR101845682B1 (fr)
CN (1) CN102834340B (fr)
HK (1) HK1175154A1 (fr)
TW (1) TWI574904B (fr)
WO (1) WO2011126133A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MX367726B (es) * 2013-03-15 2019-09-02 Comfortex Corp Método para transformar apilamientos de preformas en un sistema para producir coberturas para ventanas.
RU2015155191A (ru) * 2013-06-27 2017-07-28 Пикосан Ой Формирование траектории полотна подложки в реакторе атомно-слоевого осаждения
CN114721231B (zh) * 2022-04-17 2023-04-11 江苏晟驰微电子有限公司 一种用于光刻版清洗的工装夹具

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1333110A (en) * 1970-12-30 1973-10-10 Wean United Inc Accumulator for strip-like material
DE2262953A1 (de) * 1972-12-22 1974-06-27 Dornier Gmbh Lindauer Warenspeicher in bearbeitungsanlagen fuer textil- und folienbahnen
JPS545846B2 (fr) * 1974-02-22 1979-03-22
US3993233A (en) * 1976-01-16 1976-11-23 Eastman Kodak Company Web slack box having a plurality of sections
JPS545846A (en) * 1977-06-17 1979-01-17 Toyo Kohan Co Ltd Mechanicalltype double loop apparatus
JPS6194957A (ja) * 1984-10-16 1986-05-13 Toppan Printing Co Ltd 帯状体のアキユムレ−タ−
JPH074622B2 (ja) * 1988-07-12 1995-01-25 三菱重工業株式会社 極薄帯板巻取り機の張力調整装置
JPH02107769A (ja) * 1988-10-18 1990-04-19 Mitsubishi Heavy Ind Ltd 連続蒸着設備
JP2858365B2 (ja) * 1989-08-09 1999-02-17 株式会社デンソー 帯状材料のアキュームレータ
JPH089374B2 (ja) * 1990-03-13 1996-01-31 株式会社村田製作所 テーピング自動選別装置
EP0761582A2 (fr) * 1995-09-12 1997-03-12 MANNESMANN Aktiengesellschaft Accumulateur de bande vertical
JPH1087131A (ja) * 1996-09-11 1998-04-07 Denso Corp 帯状材の貯蔵方法及び装置
US6050517A (en) * 1998-09-22 2000-04-18 Curt G. Joa Counterbalanced web accumulator
US6258408B1 (en) * 1999-07-06 2001-07-10 Arun Madan Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassette
AR032923A1 (es) * 2001-03-02 2003-12-03 James Hardie Int Finance Bv Aparato para salpicar.
EP1270471A1 (fr) * 2001-06-25 2003-01-02 Solipat Ag Méthode pour prendre une bande de matériau, dispositif à vapeur et méthode pour enfiler une bande de matériau dans un tel dispositif
GB2439001B (en) 2005-03-18 2011-03-09 Konica Minolta Holdings Inc Method of forming organic compound layer, method of manufacturing organic el element and organic el element
WO2008075493A1 (fr) 2006-12-18 2008-06-26 Sharp Kabushiki Kaisha Appareil de traitement de matériau de base et procédé de fabrication d'un dispositif d'affichage utilisant l'appareil de traitement de matériau de base
JP5104301B2 (ja) * 2007-12-28 2012-12-19 コニカミノルタホールディングス株式会社 有機エレクトロルミネッセンスパネルの製造方法
JP5056682B2 (ja) 2008-09-04 2012-10-24 コニカミノルタホールディングス株式会社 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子およびその製造装置

Also Published As

Publication number Publication date
KR101845682B1 (ko) 2018-04-04
JPWO2011126133A1 (ja) 2013-07-11
KR101788348B1 (ko) 2017-10-19
JP5838964B2 (ja) 2016-01-06
KR20130037674A (ko) 2013-04-16
TWI574904B (zh) 2017-03-21
CN102834340A (zh) 2012-12-19
CN102834340B (zh) 2015-09-16
KR20180034708A (ko) 2018-04-04
KR20170118243A (ko) 2017-10-24
KR101892424B1 (ko) 2018-08-27
TW201210926A (en) 2012-03-16
WO2011126133A1 (fr) 2011-10-13

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20200414