HK1161580A1 - 空氣浮抬運送裝置和空氣運送方法 - Google Patents

空氣浮抬運送裝置和空氣運送方法

Info

Publication number
HK1161580A1
HK1161580A1 HK12102151.7A HK12102151A HK1161580A1 HK 1161580 A1 HK1161580 A1 HK 1161580A1 HK 12102151 A HK12102151 A HK 12102151A HK 1161580 A1 HK1161580 A1 HK 1161580A1
Authority
HK
Hong Kong
Prior art keywords
air
conveyance
floatation
conveyance device
air floatation
Prior art date
Application number
HK12102151.7A
Other languages
English (en)
Inventor
北澤保良須田佳雅
Original Assignee
翔風技術有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006315498A external-priority patent/JP2008130892A/ja
Priority claimed from JP2007210201A external-priority patent/JP5119561B2/ja
Application filed by 翔風技術有限公司 filed Critical 翔風技術有限公司
Publication of HK1161580A1 publication Critical patent/HK1161580A1/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
HK12102151.7A 2006-11-22 2012-03-02 空氣浮抬運送裝置和空氣運送方法 HK1161580A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006315498A JP2008130892A (ja) 2006-11-22 2006-11-22 エア浮上搬送装置、およびエア搬送方法
JP2007210201A JP5119561B2 (ja) 2007-08-10 2007-08-10 エア浮上搬送装置、エア浮上ユニット、エア浮上搬送方法

Publications (1)

Publication Number Publication Date
HK1161580A1 true HK1161580A1 (zh) 2012-07-27

Family

ID=39429760

Family Applications (1)

Application Number Title Priority Date Filing Date
HK12102151.7A HK1161580A1 (zh) 2006-11-22 2012-03-02 空氣浮抬運送裝置和空氣運送方法

Country Status (5)

Country Link
KR (1) KR101470660B1 (zh)
CN (1) CN102267630B (zh)
HK (1) HK1161580A1 (zh)
TW (1) TWI458036B (zh)
WO (1) WO2008062831A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4638931B2 (ja) * 2008-09-12 2011-02-23 東京エレクトロン株式会社 基板処理装置
JP5540496B2 (ja) * 2008-11-20 2014-07-02 株式会社Ihi 浮上搬送装置及び浮上ユニット
IT1400493B1 (it) * 2010-06-09 2013-06-11 Mec Di Prec E G3 Di Gamba Walter & C S N C Off Dispositivo e metodo per il posizionamento preciso di un pezzo miniaturizzato in una sede di posizionamento.
KR102689454B1 (ko) * 2018-11-28 2024-07-29 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870548A (ja) * 1981-10-22 1983-04-27 Fujitsu Ltd 基板搬送装置
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP4171293B2 (ja) * 2002-12-16 2008-10-22 株式会社日本設計工業 薄板状材の搬送方法及び装置
TWI327128B (en) * 2003-07-08 2010-07-11 Daifuku Kk Plate-shaped work piece transporting apparatus
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4501713B2 (ja) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 エア浮上搬送装置

Also Published As

Publication number Publication date
TWI458036B (zh) 2014-10-21
KR20090094083A (ko) 2009-09-03
TW200832593A (en) 2008-08-01
WO2008062831A1 (fr) 2008-05-29
CN102267630A (zh) 2011-12-07
KR101470660B1 (ko) 2014-12-09
CN102267630B (zh) 2013-12-25

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20171121