HK1022050A1 - Die bonding apparatus - Google Patents
Die bonding apparatusInfo
- Publication number
- HK1022050A1 HK1022050A1 HK00100977A HK00100977A HK1022050A1 HK 1022050 A1 HK1022050 A1 HK 1022050A1 HK 00100977 A HK00100977 A HK 00100977A HK 00100977 A HK00100977 A HK 00100977A HK 1022050 A1 HK1022050 A1 HK 1022050A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- substrate
- chip
- temperature sensor
- filler metal
- brazing filler
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/002—Soldering by means of induction heating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Die Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12917998 | 1998-05-12 | ||
JP11069137A JP2000036501A (ja) | 1998-05-12 | 1999-03-15 | ダイボンド装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1022050A1 true HK1022050A1 (en) | 2000-07-21 |
Family
ID=26410319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK00100977A HK1022050A1 (en) | 1998-05-12 | 2000-02-18 | Die bonding apparatus |
Country Status (5)
Country | Link |
---|---|
US (1) | US6142356A (ja) |
JP (1) | JP2000036501A (ja) |
CN (1) | CN1131554C (ja) |
HK (1) | HK1022050A1 (ja) |
TW (1) | TW413872B (ja) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6202293B1 (en) * | 2000-01-28 | 2001-03-20 | Visteon Global Technologies, Inc. | Work holder assembly |
US7223617B2 (en) * | 2003-07-30 | 2007-05-29 | Matsushita Electric Industrial Co., Ltd. | Semiconductor laser device and a method of mounting a semiconductor laser component on a submount |
JP4206320B2 (ja) | 2003-09-19 | 2009-01-07 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
JP4130167B2 (ja) * | 2003-10-06 | 2008-08-06 | 日東電工株式会社 | 半導体ウエハの剥離方法 |
US20050127144A1 (en) * | 2003-12-10 | 2005-06-16 | Atuhito Mochida | Method of mounting a semiconductor laser component on a submount |
DE102004009901B4 (de) * | 2004-02-26 | 2005-12-01 | Infineon Technologies Ag | Vorrichtung zum Singulieren und Bonden von Halbleiterchips und Verfahren zum Singulieren und Bonden |
JP2006013073A (ja) * | 2004-06-24 | 2006-01-12 | Sharp Corp | ボンディング装置、ボンディング方法及び半導体装置の製造方法 |
KR100546419B1 (ko) * | 2004-09-03 | 2006-01-26 | 삼성전자주식회사 | 다이 어태치 장치, 이를 세정하는 세정 시스템 및 그세정방법 |
JP2006352008A (ja) * | 2005-06-20 | 2006-12-28 | Nec Electronics Corp | 半導体装置および回路基板 |
JP4687290B2 (ja) * | 2005-07-11 | 2011-05-25 | ソニー株式会社 | 半導体チップのボンディング装置及びボンディング方法 |
JP5259116B2 (ja) * | 2007-04-17 | 2013-08-07 | キヤノンマシナリー株式会社 | ダイボンダ |
JP4798170B2 (ja) * | 2008-05-13 | 2011-10-19 | 株式会社豊田自動織機 | 半導体装置 |
US20090289097A1 (en) * | 2008-05-21 | 2009-11-26 | Weng-Jin Wu | Wafer Leveling-Bonding System Using Disposable Foils |
CN101794554A (zh) * | 2010-03-31 | 2010-08-04 | 华为终端有限公司 | 类纸显示装置中亮度调节方法及装置、类纸显示系统 |
US8381965B2 (en) | 2010-07-22 | 2013-02-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermal compress bonding |
US8104666B1 (en) * | 2010-09-01 | 2012-01-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermal compressive bonding with separate die-attach and reflow processes |
JP5865639B2 (ja) * | 2011-09-15 | 2016-02-17 | ファスフォードテクノロジ株式会社 | ダイボンダ及びボンディング方法 |
US8426227B1 (en) | 2011-11-18 | 2013-04-23 | LuxVue Technology Corporation | Method of forming a micro light emitting diode array |
US8349116B1 (en) | 2011-11-18 | 2013-01-08 | LuxVue Technology Corporation | Micro device transfer head heater assembly and method of transferring a micro device |
US9773750B2 (en) * | 2012-02-09 | 2017-09-26 | Apple Inc. | Method of transferring and bonding an array of micro devices |
US8967452B2 (en) * | 2012-04-17 | 2015-03-03 | Asm Technology Singapore Pte Ltd | Thermal compression bonding of semiconductor chips |
US9725367B2 (en) * | 2013-03-29 | 2017-08-08 | Mitsubishi Materials Corporation | Apparatus and method for producing (metal plate)-(ceramic board) laminated assembly, and apparatus and method for producing power-module substrate |
CN103295919B (zh) * | 2013-05-31 | 2015-10-14 | 三星半导体(中国)研究开发有限公司 | 单元节距可控的植球装置及植球方法 |
US9180539B1 (en) * | 2014-03-18 | 2015-11-10 | Flextronics Ap, Llc | Method of and system for dressing RF shield pads |
CN104362121A (zh) * | 2014-11-13 | 2015-02-18 | 广东威创视讯科技股份有限公司 | 一种晶体固定装置及晶体固定方法 |
US10475764B2 (en) | 2014-12-26 | 2019-11-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Die bonder and methods of using the same |
JP6581389B2 (ja) * | 2015-05-12 | 2019-09-25 | 東芝メモリ株式会社 | 半導体装置の製造装置及び製造方法 |
DE102015120156B4 (de) * | 2015-11-20 | 2019-07-04 | Semikron Elektronik Gmbh & Co. Kg | Vorrichtung zur materialschlüssigen Verbindung von Verbindungspartnern eines Leistungselekronik-Bauteils und Verwendung einer solchen Vorrichtung |
CN111033705B (zh) * | 2017-08-22 | 2023-09-08 | 株式会社新川 | 安装装置及温度测定方法 |
JP6742386B2 (ja) * | 2018-11-13 | 2020-08-19 | キヤノンマシナリー株式会社 | ボンディング装置、ダイボンダ、及びボンディング方法 |
JP7207152B2 (ja) * | 2019-05-16 | 2023-01-18 | 株式会社デンソー | スリーブはんだ付け装置および電子装置の製造方法 |
CN114171432B (zh) * | 2021-11-09 | 2023-10-31 | 恩纳基智能科技无锡有限公司 | 一种半导体芯片焊接用加热输送机构 |
CN114309911B (zh) * | 2022-01-07 | 2023-08-22 | 武汉中设机器人科技有限公司 | 一种汽车锁扣热铆自动化生产线专机及工作方法 |
TWI825937B (zh) * | 2022-08-23 | 2023-12-11 | 庫力索法高科股份有限公司 | 複合裝置 |
CN116190273B (zh) * | 2023-03-01 | 2023-11-21 | 苏州联讯仪器股份有限公司 | 一种吸附式芯片搬运装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2087327A5 (ja) * | 1970-05-14 | 1971-12-31 | Stel | |
US4257061A (en) * | 1977-10-17 | 1981-03-17 | John Fluke Mfg. Co., Inc. | Thermally isolated monolithic semiconductor die |
US4749329A (en) * | 1982-12-06 | 1988-06-07 | Motorola, Inc. | Die pick mechanism for automatic assembly of semiconductor devices |
US4804810A (en) * | 1986-06-19 | 1989-02-14 | Fairchild Semiconductor Corporation | Apparatus and method for tape bonding |
JPS6320430A (ja) * | 1986-07-11 | 1988-01-28 | Kawasaki Steel Corp | エロンゲ−タプラグ用耐熱合金 |
US5634267A (en) * | 1991-06-04 | 1997-06-03 | Micron Technology, Inc. | Method and apparatus for manufacturing known good semiconductor die |
JPH0425137A (ja) * | 1990-05-19 | 1992-01-28 | Kawasaki Steel Corp | ダイボンディング方法 |
JPH0645377A (ja) * | 1992-07-22 | 1994-02-18 | Mitsubishi Electric Corp | 半導体製造装置及び半導体パッケージ並びにチップ実装方法 |
-
1999
- 1999-03-15 JP JP11069137A patent/JP2000036501A/ja active Pending
- 1999-05-11 TW TW088107628A patent/TW413872B/zh not_active IP Right Cessation
- 1999-05-12 CN CN99106604A patent/CN1131554C/zh not_active Expired - Fee Related
- 1999-05-12 US US09/310,341 patent/US6142356A/en not_active Expired - Fee Related
-
2000
- 2000-02-18 HK HK00100977A patent/HK1022050A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW413872B (en) | 2000-12-01 |
JP2000036501A (ja) | 2000-02-02 |
CN1235371A (zh) | 1999-11-17 |
US6142356A (en) | 2000-11-07 |
CN1131554C (zh) | 2003-12-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PF | Patent in force | ||
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20090512 |