GB951866A - Vacuum pumps - Google Patents
Vacuum pumpsInfo
- Publication number
- GB951866A GB951866A GB28908/62A GB2890862A GB951866A GB 951866 A GB951866 A GB 951866A GB 28908/62 A GB28908/62 A GB 28908/62A GB 2890862 A GB2890862 A GB 2890862A GB 951866 A GB951866 A GB 951866A
- Authority
- GB
- United Kingdom
- Prior art keywords
- metal
- sphere
- wall
- vessel
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 abstract 7
- 239000002184 metal Substances 0.000 abstract 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 2
- 239000010936 titanium Substances 0.000 abstract 2
- 229910052719 titanium Inorganic materials 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 238000005247 gettering Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR872546A FR1306718A (fr) | 1961-09-07 | 1961-09-07 | Perfectionnements aux pompes à vide à évaporation thermique de titane |
Publications (1)
Publication Number | Publication Date |
---|---|
GB951866A true GB951866A (en) | 1964-03-11 |
Family
ID=8762400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB28908/62A Expired GB951866A (en) | 1961-09-07 | 1962-07-27 | Vacuum pumps |
Country Status (4)
Country | Link |
---|---|
US (1) | US3207423A (enrdf_load_stackoverflow) |
FR (1) | FR1306718A (enrdf_load_stackoverflow) |
GB (1) | GB951866A (enrdf_load_stackoverflow) |
NL (1) | NL282934A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1286259B (de) * | 1964-04-01 | 1969-01-02 | Varian Associates | Verfahren zur Temperaturstabilisierung des Gettermaterials in einer Getterpumpe und zur Durchfuehrung des Verfahrens ausgebildete Pumpe |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3495769A (en) * | 1968-03-12 | 1970-02-17 | Robert L Hirsch | Space charge controlled vacuum pump |
US3924967A (en) * | 1974-03-22 | 1975-12-09 | Varian Associates | Sublimation vacuum pump having a removable gas permeable condenser |
DE19959210C2 (de) * | 1999-12-08 | 2003-07-10 | Max Planck Gesellschaft | Ionengetterpumpe und Verfahren zu deren Aktivierung |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2920002A (en) * | 1952-06-25 | 1960-01-05 | Auwarter Max | Process for the manufacture of thin films |
GB879256A (en) * | 1956-10-12 | 1961-10-11 | Edwards High Vacuum Ltd | Improvements in or relating to vaporisation of metals |
NL97082C (enrdf_load_stackoverflow) * | 1958-06-03 |
-
0
- NL NL282934D patent/NL282934A/xx unknown
-
1961
- 1961-09-07 FR FR872546A patent/FR1306718A/fr not_active Expired
-
1962
- 1962-07-24 US US211991A patent/US3207423A/en not_active Expired - Lifetime
- 1962-07-27 GB GB28908/62A patent/GB951866A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1286259B (de) * | 1964-04-01 | 1969-01-02 | Varian Associates | Verfahren zur Temperaturstabilisierung des Gettermaterials in einer Getterpumpe und zur Durchfuehrung des Verfahrens ausgebildete Pumpe |
Also Published As
Publication number | Publication date |
---|---|
NL282934A (enrdf_load_stackoverflow) | |
FR1306718A (fr) | 1962-10-19 |
US3207423A (en) | 1965-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4094764A (en) | Device for cathodic sputtering at a high deposition rate | |
GB1245153A (en) | Improvements in or relating to mass spectrometer leak detectors | |
GB982671A (en) | Improvements in or relating to ion guns | |
GB1457165A (en) | Electron beam vaporizer | |
GB1086489A (en) | Improvements in or relating to methods of controlling the spacial distribution of an evaporated film of getter material within the evacuated vessel or tube of an electron discharge device | |
GB951866A (en) | Vacuum pumps | |
GB797232A (en) | Improvements in or relating to high vacuum ion pumps | |
GB1198564A (en) | Vaporization Cooling System. | |
GB1209026A (en) | Improvements in or relating to cold cathode, glow discharge device | |
GB1134231A (en) | Improvements in or relating to ion vacuum pumps | |
GB1021776A (enrdf_load_stackoverflow) | ||
GB1247501A (en) | Ion-getter vacuum pump | |
GB949219A (en) | Improvements in or relating to ion pumps | |
US3204860A (en) | High-vacuum pump | |
GB1013622A (en) | Improvements in electron-beam tubes and electron guns for use therein | |
GB1500095A (en) | Ion source using a hollow cathode discharge arrangement and a particle accelerator comprising such a source | |
GB958423A (en) | Getter ion pump method and apparatus | |
US2469006A (en) | Apparatus for high evacuation | |
GB1420545A (en) | Evaporation by electron beans | |
GB1008361A (en) | Improvements in or relating to spectroscopic devices | |
US3376414A (en) | Calutron with means to direct calcium gettering vapor into the ion beam to reduce tank pressure | |
GB995180A (en) | Improvements in and relating to the evaporation of material for the coating of surfaces by electronic bombardment | |
GB1182725A (en) | Vacuum Pumps Employing Ion Beams | |
JPS5583143A (en) | Exhaust system for electron beam equipment | |
GB1379140A (en) | Offswitching of metal arc switching device by internal current diversion to an auxiliary electrode |