FR1306718A - Perfectionnements aux pompes à vide à évaporation thermique de titane - Google Patents

Perfectionnements aux pompes à vide à évaporation thermique de titane

Info

Publication number
FR1306718A
FR1306718A FR872546A FR872546A FR1306718A FR 1306718 A FR1306718 A FR 1306718A FR 872546 A FR872546 A FR 872546A FR 872546 A FR872546 A FR 872546A FR 1306718 A FR1306718 A FR 1306718A
Authority
FR
France
Prior art keywords
vacuum pumps
titanium thermal
thermal evaporative
evaporative vacuum
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR872546A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
CSF Compagnie Generale de Telegraphie sans Fil SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL282934D priority Critical patent/NL282934A/xx
Application filed by CSF Compagnie Generale de Telegraphie sans Fil SA filed Critical CSF Compagnie Generale de Telegraphie sans Fil SA
Priority to FR872546A priority patent/FR1306718A/fr
Priority to US211991A priority patent/US3207423A/en
Priority to GB28908/62A priority patent/GB951866A/en
Application granted granted Critical
Publication of FR1306718A publication Critical patent/FR1306718A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
FR872546A 1961-09-07 1961-09-07 Perfectionnements aux pompes à vide à évaporation thermique de titane Expired FR1306718A (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
NL282934D NL282934A (enrdf_load_stackoverflow) 1961-09-07
FR872546A FR1306718A (fr) 1961-09-07 1961-09-07 Perfectionnements aux pompes à vide à évaporation thermique de titane
US211991A US3207423A (en) 1961-09-07 1962-07-24 Vacuum pump
GB28908/62A GB951866A (en) 1961-09-07 1962-07-27 Vacuum pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR872546A FR1306718A (fr) 1961-09-07 1961-09-07 Perfectionnements aux pompes à vide à évaporation thermique de titane

Publications (1)

Publication Number Publication Date
FR1306718A true FR1306718A (fr) 1962-10-19

Family

ID=8762400

Family Applications (1)

Application Number Title Priority Date Filing Date
FR872546A Expired FR1306718A (fr) 1961-09-07 1961-09-07 Perfectionnements aux pompes à vide à évaporation thermique de titane

Country Status (4)

Country Link
US (1) US3207423A (enrdf_load_stackoverflow)
FR (1) FR1306718A (enrdf_load_stackoverflow)
GB (1) GB951866A (enrdf_load_stackoverflow)
NL (1) NL282934A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3249291A (en) * 1964-04-01 1966-05-03 Varian Associates Vacuum pump method and apparatus
US3495769A (en) * 1968-03-12 1970-02-17 Robert L Hirsch Space charge controlled vacuum pump
US3924967A (en) * 1974-03-22 1975-12-09 Varian Associates Sublimation vacuum pump having a removable gas permeable condenser
DE19959210C2 (de) * 1999-12-08 2003-07-10 Max Planck Gesellschaft Ionengetterpumpe und Verfahren zu deren Aktivierung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2920002A (en) * 1952-06-25 1960-01-05 Auwarter Max Process for the manufacture of thin films
GB879256A (en) * 1956-10-12 1961-10-11 Edwards High Vacuum Ltd Improvements in or relating to vaporisation of metals
NL97082C (enrdf_load_stackoverflow) * 1958-06-03

Also Published As

Publication number Publication date
US3207423A (en) 1965-09-21
NL282934A (enrdf_load_stackoverflow)
GB951866A (en) 1964-03-11

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