GB897599A - Improvements in or relating to ion pumps - Google Patents

Improvements in or relating to ion pumps

Info

Publication number
GB897599A
GB897599A GB18431/60A GB1843160A GB897599A GB 897599 A GB897599 A GB 897599A GB 18431/60 A GB18431/60 A GB 18431/60A GB 1843160 A GB1843160 A GB 1843160A GB 897599 A GB897599 A GB 897599A
Authority
GB
United Kingdom
Prior art keywords
cathode
cathodes
anode
replacement material
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB18431/60A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consolidated Vacuum Corp
Original Assignee
Consolidated Vacuum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consolidated Vacuum Corp filed Critical Consolidated Vacuum Corp
Publication of GB897599A publication Critical patent/GB897599A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB18431/60A 1959-05-25 1960-05-25 Improvements in or relating to ion pumps Expired GB897599A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US815351A US3107044A (en) 1959-05-25 1959-05-25 Cold-cathode discharge ion pump

Publications (1)

Publication Number Publication Date
GB897599A true GB897599A (en) 1962-05-30

Family

ID=25217539

Family Applications (1)

Application Number Title Priority Date Filing Date
GB18431/60A Expired GB897599A (en) 1959-05-25 1960-05-25 Improvements in or relating to ion pumps

Country Status (4)

Country Link
US (1) US3107044A (xx)
DE (1) DE1845497U (xx)
GB (1) GB897599A (xx)
NL (1) NL251846A (xx)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3391303A (en) * 1965-01-25 1968-07-02 Lewis D. Hall Electronic vacuum pump including a sputter electrode
US3443742A (en) * 1967-06-09 1969-05-13 Itt Pumping device
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US20070286738A1 (en) * 2006-06-12 2007-12-13 Varian, Inc. Vacuum ion-getter pump with cryogenically cooled cathode

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1046249B (de) * 1956-04-05 1958-12-11 Dr Gerhard Fricke Verfahren und Vorrichtung zur Erzeugung eines hohen Vakuums

Also Published As

Publication number Publication date
DE1845497U (de) 1962-01-25
US3107044A (en) 1963-10-15
NL251846A (xx)

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