GB794175A - Apparatus for carrying out technical processes by glow discharges - Google Patents

Apparatus for carrying out technical processes by glow discharges

Info

Publication number
GB794175A
GB794175A GB37656/57A GB3765657A GB794175A GB 794175 A GB794175 A GB 794175A GB 37656/57 A GB37656/57 A GB 37656/57A GB 3765657 A GB3765657 A GB 3765657A GB 794175 A GB794175 A GB 794175A
Authority
GB
United Kingdom
Prior art keywords
work
pieces
insulators
leading
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB37656/57A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB794175A publication Critical patent/GB794175A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Furnace Details (AREA)
  • Discharge Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

794,175. Electric glow discharge furnaces. BERGHAUS, B. May 27, 1954 [May 28, 1953], No. 37656/57. Divided out of 794,174. Class 39(3) [Also in Group XL(a)] A glow discharge vessel for the treatment of a plurality of metal work pieces has a wall part 1 removably attached by a packing 4 to a wall part 5 of the vessel, and the removable part 1 carries lead-in insulators 6...11 and 16...19 and inside holding parts e.g. rings 12, 15, 20, 21 for the work pieces 14 or auxiliary electrodes 13 or both, the work pieces 14 e.g. metal tubes being arranged with respect to each other to the holding parts and to the inside surfaces of the vessel so that the heat radiation to be received on each work piece from other work-pieces or from the holding parts is approximately the same for all solid angles of each workpiece and the heat to be transmitted from each work-piece is also the same for all solid angles of all the work-pieces. The work-pieces 14 are suspended from leading- in insulators 7, 9, 11 either individually or if the work-pieces are in groups they are suspended by an annular support 15. The lower ends of the work-pieces 14 are supported in rings 21 attached to leading-in insulators 16-18 in the lower closing part of the removable part 3. The auxiliary wire electrodes 13 are suspended centrally in the tubes 14 from an annular support 12 connected to leading-in insulators 7, 9, 11 and are attached at their lower ends to a ring 20 attached to a leading-in insulator 19. The upper and lower groups of leading insulators are in parallel planes symmetrically with respect to the central axis of the vessel. The electrical and thermal effects caused by the lead-in insulators and supports on the work-pieces are identical. The vessel has water-cooled heat-insulated walls and the inner wall is a reflector. The insulators are screened by protective gaps and may be cooled. A multi-phase current may be used and each work-piece may be connected to one phase, the auxiliary electrodes being connected to the star point of the supply. The lower group of leading-in insulators may be supported by tubes of small diameter to the upper cover of the vessel, thereby allowing vertical adjustment for work-pieces of different length.
GB37656/57A 1953-05-28 1954-05-27 Apparatus for carrying out technical processes by glow discharges Expired GB794175A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH794175X 1953-05-28

Publications (1)

Publication Number Publication Date
GB794175A true GB794175A (en) 1958-04-30

Family

ID=4537184

Family Applications (2)

Application Number Title Priority Date Filing Date
GB15673/54A Expired GB794174A (en) 1953-05-28 1954-05-27 A process for carrying out technical processes by glow discharges
GB37656/57A Expired GB794175A (en) 1953-05-28 1954-05-27 Apparatus for carrying out technical processes by glow discharges

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB15673/54A Expired GB794174A (en) 1953-05-28 1954-05-27 A process for carrying out technical processes by glow discharges

Country Status (6)

Country Link
US (1) US2824210A (en)
CH (1) CH319658A (en)
DE (1) DE1000657B (en)
FR (1) FR1105035A (en)
GB (2) GB794174A (en)
NL (1) NL108190C (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL232698A (en) * 1953-12-09
NL253260A (en) * 1959-06-30
CH384009A (en) * 1960-02-10 1964-11-15 Berghaus Elektrophysik Anst Process for the remuneration of workpieces in an electric glow discharge
DE1271267B (en) * 1961-04-14 1968-06-27 Litton Systems Inc Low pressure mercury vapor discharge tubes
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus
DE2657078C2 (en) * 1975-12-29 1984-08-16 Kawasaki Jukogyo K.K., Kobe, Hyogo Device for direct current ion nitriding of workpieces
US4508053A (en) * 1983-01-05 1985-04-02 Xis, Incorporated Vacuum deposition apparatus for manufacturing selenium photoreceptors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US752358A (en) * 1904-02-16 Process of heating articles by electricity
US1324001A (en) * 1919-12-02 Hugh a
US1047502A (en) * 1907-08-24 1912-12-17 Gen Electric Art of manufacturing lamp-filaments.
DE368938C (en) * 1920-10-16 1923-02-10 Aeg Electric annealing furnace for hardening and other metallurgical purposes
US1966496A (en) * 1930-12-10 1934-07-17 Western Electric Co Method of treating metals

Also Published As

Publication number Publication date
US2824210A (en) 1958-02-18
CH319658A (en) 1957-02-28
FR1105035A (en) 1955-11-25
NL108190C (en)
GB794174A (en) 1958-04-30
DE1000657B (en) 1957-01-10

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