CH319658A - Method and device for the simultaneous treatment of several identical metallic workpieces in a glow discharge - Google Patents

Method and device for the simultaneous treatment of several identical metallic workpieces in a glow discharge

Info

Publication number
CH319658A
CH319658A CH319658DA CH319658A CH 319658 A CH319658 A CH 319658A CH 319658D A CH319658D A CH 319658DA CH 319658 A CH319658 A CH 319658A
Authority
CH
Switzerland
Prior art keywords
glow discharge
several identical
simultaneous treatment
metallic workpieces
identical metallic
Prior art date
Application number
Other languages
German (de)
Inventor
Berhaus Bernhard
Bucek Hans
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Publication of CH319658A publication Critical patent/CH319658A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Furnace Details (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Discharge Heating (AREA)
CH319658D 1953-05-28 1953-05-28 Method and device for the simultaneous treatment of several identical metallic workpieces in a glow discharge CH319658A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH794175X 1953-05-28

Publications (1)

Publication Number Publication Date
CH319658A true CH319658A (en) 1957-02-28

Family

ID=4537184

Family Applications (1)

Application Number Title Priority Date Filing Date
CH319658D CH319658A (en) 1953-05-28 1953-05-28 Method and device for the simultaneous treatment of several identical metallic workpieces in a glow discharge

Country Status (6)

Country Link
US (1) US2824210A (en)
CH (1) CH319658A (en)
DE (1) DE1000657B (en)
FR (1) FR1105035A (en)
GB (2) GB794174A (en)
NL (1) NL108190C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1271267B (en) * 1961-04-14 1968-06-27 Litton Systems Inc Low pressure mercury vapor discharge tubes

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL232778A (en) * 1953-12-09
NL126129C (en) * 1959-06-30
CH384009A (en) * 1960-02-10 1964-11-15 Berghaus Elektrophysik Anst Process for the remuneration of workpieces in an electric glow discharge
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus
DE2657078C2 (en) * 1975-12-29 1984-08-16 Kawasaki Jukogyo K.K., Kobe, Hyogo Device for direct current ion nitriding of workpieces
US4508053A (en) * 1983-01-05 1985-04-02 Xis, Incorporated Vacuum deposition apparatus for manufacturing selenium photoreceptors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US752358A (en) * 1904-02-16 Process of heating articles by electricity
US1324001A (en) * 1919-12-02 Hugh a
US1047502A (en) * 1907-08-24 1912-12-17 Gen Electric Art of manufacturing lamp-filaments.
DE368938C (en) * 1920-10-16 1923-02-10 Aeg Electric annealing furnace for hardening and other metallurgical purposes
US1966496A (en) * 1930-12-10 1934-07-17 Western Electric Co Method of treating metals

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1271267B (en) * 1961-04-14 1968-06-27 Litton Systems Inc Low pressure mercury vapor discharge tubes

Also Published As

Publication number Publication date
DE1000657B (en) 1957-01-10
NL108190C (en)
GB794174A (en) 1958-04-30
GB794175A (en) 1958-04-30
US2824210A (en) 1958-02-18
FR1105035A (en) 1955-11-25

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