GB738121A - Improvements in or relating to variable magnetic electron lenses - Google Patents

Improvements in or relating to variable magnetic electron lenses

Info

Publication number
GB738121A
GB738121A GB25187/53A GB2518753A GB738121A GB 738121 A GB738121 A GB 738121A GB 25187/53 A GB25187/53 A GB 25187/53A GB 2518753 A GB2518753 A GB 2518753A GB 738121 A GB738121 A GB 738121A
Authority
GB
United Kingdom
Prior art keywords
insert
sept
relating
electron lenses
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB25187/53A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electrical Industries Ltd
Original Assignee
Philips Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electrical Industries Ltd filed Critical Philips Electrical Industries Ltd
Publication of GB738121A publication Critical patent/GB738121A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Tubes For Measurement (AREA)
  • Lenses (AREA)
  • Electron Beam Exposure (AREA)
GB25187/53A 1952-09-16 1953-09-11 Improvements in or relating to variable magnetic electron lenses Expired GB738121A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL314474X 1952-09-16

Publications (1)

Publication Number Publication Date
GB738121A true GB738121A (en) 1955-10-05

Family

ID=19783758

Family Applications (1)

Application Number Title Priority Date Filing Date
GB25187/53A Expired GB738121A (en) 1952-09-16 1953-09-11 Improvements in or relating to variable magnetic electron lenses

Country Status (7)

Country Link
US (1) US2880324A (nl)
BE (1) BE522811A (nl)
CH (1) CH314474A (nl)
DE (1) DE1006984B (nl)
FR (1) FR1083345A (nl)
GB (1) GB738121A (nl)
NL (2) NL172506B (nl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3300681A (en) * 1965-10-22 1967-01-24 Gen Electric Adjustable magnet for a magnetron
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
FR2597259A1 (fr) * 1986-04-15 1987-10-16 Thomson Csf Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE904095C (de) * 1940-06-01 1954-02-15 Siemens Ag Als Objektiv fuer ein Elektronenmikroskop dienende Elektronenlinse
US2356535A (en) * 1940-08-31 1944-08-22 Ruska Ernst Electronic lens
US2295403A (en) * 1940-11-15 1942-09-08 Rca Corp Apertured electron lens and method of alignment
DE898217C (de) * 1943-01-27 1953-11-30 Siemens Ag Anordnung zur Veraenderung der mit einer magnetischen Elektronenlinse erzielbaren Vergroesserungen
US2369782A (en) * 1943-04-01 1945-02-20 Rca Corp Electron lens system
NL89013C (nl) * 1944-05-31
GB609480A (en) * 1944-09-30 1948-10-01 Otto Ernst Heinrich Klemperer Improvements in or relating to a electron discharge apparatus in which a flattened or ribbon-shaped electron beam is employed
US2567674A (en) * 1949-11-08 1951-09-11 Rca Corp Velocity modulated electron discharge device
US2587942A (en) * 1949-12-27 1952-03-04 Leitz Ernst Gmbh Electronic optical correction mechanism for magnetic lenses
US2679018A (en) * 1950-06-30 1954-05-18 Rca Corp Magnetic electron lens pole piece

Also Published As

Publication number Publication date
NL172506B (nl)
FR1083345A (fr) 1955-01-07
NL85499C (nl)
US2880324A (en) 1959-03-31
DE1006984B (de) 1957-04-25
BE522811A (nl)
CH314474A (de) 1956-06-15

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