GB2036425A - Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same - Google Patents
Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the sameInfo
- Publication number
- GB2036425A GB2036425A GB7937207A GB7937207A GB2036425A GB 2036425 A GB2036425 A GB 2036425A GB 7937207 A GB7937207 A GB 7937207A GB 7937207 A GB7937207 A GB 7937207A GB 2036425 A GB2036425 A GB 2036425A
- Authority
- GB
- United Kingdom
- Prior art keywords
- pressure
- semiconductor chip
- monocrystalline semiconductor
- sensitive
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 8
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 2
- 239000005388 borosilicate glass Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
Abstract
A semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms so as to deliver outputs of at least two kinds of pressures as electric signals. This semiconductor pressure sensor comprises a monocrystalline semiconductor chip (1) formed thereon with at least two pressure-sensitive diaphragms (12a, 12b), a pair of strain gauges (13a and 14a, or 13b and 14b) formed on each pressure-sensitive diaphragms of the monocrystalline semiconductor chip, electrodes (15a and 16a, or 15b and 16b) provided on the monocrystalline semiconductor chip to electrically connect the strain gauges with each other, and a substrate (2) of borosilicate glass having the coefficient of thermal expansion, which is substantially equal to that of the monocrystalline semiconductor chip, said monocrystalline semiconductor chip (1) and said glass substrate (2) being bonded together by means of an anodic bonding process. According to this invention, there may be provided the pressure-sensitive sensor has a reduced output error.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2993678A JPS54123077A (en) | 1978-03-17 | 1978-03-17 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2036425A true GB2036425A (en) | 1980-06-25 |
GB2036425B GB2036425B (en) | 1983-02-09 |
Family
ID=12289864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7937207A Expired GB2036425B (en) | 1978-03-17 | 1979-03-12 | Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS54123077A (en) |
AU (1) | AU4500279A (en) |
FR (1) | FR2420210A1 (en) |
GB (1) | GB2036425B (en) |
IT (1) | IT1111588B (en) |
WO (1) | WO1979000783A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0049955A1 (en) * | 1980-10-09 | 1982-04-21 | General Motors Corporation | Dual cavity pressure sensor |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4407296A (en) * | 1980-09-12 | 1983-10-04 | Medtronic, Inc. | Integral hermetic impantable pressure transducer |
JPS57104835A (en) * | 1980-12-23 | 1982-06-30 | Toyota Motor Corp | Detecting method for pressure in internal combustion engine |
US4432372A (en) * | 1981-08-28 | 1984-02-21 | Medtronic, Inc. | Two-lead power/signal multiplexed transducer |
JPS5915944U (en) * | 1982-07-21 | 1984-01-31 | 株式会社日立製作所 | differential pressure detector |
US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
US4773269A (en) * | 1986-07-28 | 1988-09-27 | Rosemount Inc. | Media isolated differential pressure sensors |
DE3772514D1 (en) * | 1986-10-28 | 1991-10-02 | Sumitomo Electric Industries | MEASURING METHOD FOR A SEMICONDUCTOR PRESSURE SENSOR. |
US4850228A (en) * | 1987-05-27 | 1989-07-25 | Smc Corporation | Pressure meter |
JPS6461634A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPS6461637A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPH0814518B2 (en) * | 1987-12-28 | 1996-02-14 | 松下電器産業株式会社 | Method for manufacturing semiconductor pressure sensor |
JPH03200035A (en) * | 1989-12-28 | 1991-09-02 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPH03200034A (en) * | 1989-12-28 | 1991-09-02 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JP2771070B2 (en) * | 1992-03-25 | 1998-07-02 | 日立建機株式会社 | Differential pressure sensor |
AU658524B1 (en) * | 1993-08-17 | 1995-04-13 | Yokogawa Electric Corporation | Semiconductor type differential pressure measurement apparatus and method for manufacturing the same |
DE19648048C2 (en) * | 1995-11-21 | 2001-11-29 | Fuji Electric Co Ltd | Detector device for pressure measurement based on measured capacitance values |
US7077008B2 (en) * | 2004-07-02 | 2006-07-18 | Honeywell International Inc. | Differential pressure measurement using backside sensing and a single ASIC |
DE602005021793D1 (en) * | 2004-08-23 | 2010-07-22 | Honeywell Int Inc | EXHAUST GAS RECYCLING SYSTEM USING UNEIN |
US7401522B2 (en) * | 2005-05-26 | 2008-07-22 | Rosemount Inc. | Pressure sensor using compressible sensor body |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE336042B (en) * | 1967-05-03 | 1971-06-21 | Mallory & Co Inc P R | |
JPS5135294A (en) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd | HANDOTAIATSURYOKUHENKANKI |
JPS5190587A (en) * | 1975-02-07 | 1976-08-09 | ||
JPS5255392A (en) * | 1975-10-31 | 1977-05-06 | Hitachi Ltd | Semiconductor pressure sensor |
-
1978
- 1978-03-17 JP JP2993678A patent/JPS54123077A/en active Pending
-
1979
- 1979-03-09 AU AU45002/79A patent/AU4500279A/en not_active Abandoned
- 1979-03-12 GB GB7937207A patent/GB2036425B/en not_active Expired
- 1979-03-12 WO PCT/JP1979/000062 patent/WO1979000783A1/en unknown
- 1979-03-15 FR FR7906606A patent/FR2420210A1/en active Granted
- 1979-03-16 IT IT21081/79A patent/IT1111588B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0049955A1 (en) * | 1980-10-09 | 1982-04-21 | General Motors Corporation | Dual cavity pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
AU4500279A (en) | 1979-09-20 |
GB2036425B (en) | 1983-02-09 |
IT1111588B (en) | 1986-01-13 |
WO1979000783A1 (en) | 1979-10-18 |
JPS54123077A (en) | 1979-09-25 |
IT7921081A0 (en) | 1979-03-16 |
FR2420210B1 (en) | 1984-07-06 |
FR2420210A1 (en) | 1979-10-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19950312 |