JPS5190587A - - Google Patents
Info
- Publication number
- JPS5190587A JPS5190587A JP50015386A JP1538675A JPS5190587A JP S5190587 A JPS5190587 A JP S5190587A JP 50015386 A JP50015386 A JP 50015386A JP 1538675 A JP1538675 A JP 1538675A JP S5190587 A JPS5190587 A JP S5190587A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50015386A JPS5190587A (en) | 1975-02-07 | 1975-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50015386A JPS5190587A (en) | 1975-02-07 | 1975-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5190587A true JPS5190587A (en) | 1976-08-09 |
Family
ID=11887295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50015386A Pending JPS5190587A (en) | 1975-02-07 | 1975-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5190587A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1979000783A1 (en) * | 1978-03-17 | 1979-10-18 | Hitachi Ltd | Semiconductor pressure sensors having a plurality of pressure-sensitive diaphragms and method of manufacturing the same |
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1975
- 1975-02-07 JP JP50015386A patent/JPS5190587A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1979000783A1 (en) * | 1978-03-17 | 1979-10-18 | Hitachi Ltd | Semiconductor pressure sensors having a plurality of pressure-sensitive diaphragms and method of manufacturing the same |