IT1111588B - SEMICONDUCTOR PRESSURE SENSOR, EQUIPPED WITH A PLURALITY OF PRESSURE SENSITIVE DIAPHRAGMS AND RELATED PROCEDURE - Google Patents

SEMICONDUCTOR PRESSURE SENSOR, EQUIPPED WITH A PLURALITY OF PRESSURE SENSITIVE DIAPHRAGMS AND RELATED PROCEDURE

Info

Publication number
IT1111588B
IT1111588B IT21081/79A IT2108179A IT1111588B IT 1111588 B IT1111588 B IT 1111588B IT 21081/79 A IT21081/79 A IT 21081/79A IT 2108179 A IT2108179 A IT 2108179A IT 1111588 B IT1111588 B IT 1111588B
Authority
IT
Italy
Prior art keywords
related procedure
pressure sensor
pressure sensitive
sensitive diaphragms
semiconductor
Prior art date
Application number
IT21081/79A
Other languages
Italian (it)
Other versions
IT7921081A0 (en
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of IT7921081A0 publication Critical patent/IT7921081A0/en
Application granted granted Critical
Publication of IT1111588B publication Critical patent/IT1111588B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
IT21081/79A 1978-03-17 1979-03-16 SEMICONDUCTOR PRESSURE SENSOR, EQUIPPED WITH A PLURALITY OF PRESSURE SENSITIVE DIAPHRAGMS AND RELATED PROCEDURE IT1111588B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2993678A JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor

Publications (2)

Publication Number Publication Date
IT7921081A0 IT7921081A0 (en) 1979-03-16
IT1111588B true IT1111588B (en) 1986-01-13

Family

ID=12289864

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21081/79A IT1111588B (en) 1978-03-17 1979-03-16 SEMICONDUCTOR PRESSURE SENSOR, EQUIPPED WITH A PLURALITY OF PRESSURE SENSITIVE DIAPHRAGMS AND RELATED PROCEDURE

Country Status (6)

Country Link
JP (1) JPS54123077A (en)
AU (1) AU4500279A (en)
FR (1) FR2420210A1 (en)
GB (1) GB2036425B (en)
IT (1) IT1111588B (en)
WO (1) WO1979000783A1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407296A (en) * 1980-09-12 1983-10-04 Medtronic, Inc. Integral hermetic impantable pressure transducer
EP0049955A1 (en) * 1980-10-09 1982-04-21 General Motors Corporation Dual cavity pressure sensor
JPS57104835A (en) * 1980-12-23 1982-06-30 Toyota Motor Corp Detecting method for pressure in internal combustion engine
US4432372A (en) * 1981-08-28 1984-02-21 Medtronic, Inc. Two-lead power/signal multiplexed transducer
JPS5915944U (en) * 1982-07-21 1984-01-31 株式会社日立製作所 differential pressure detector
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
EP0265816B1 (en) * 1986-10-28 1991-08-28 Sumitomo Electric Industries Limited Method of measuring semiconductor pressure sensor
DE3784063T2 (en) * 1987-05-27 1993-07-15 Smc Corp PRESSURE MEASURING DEVICE.
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JPS6461634A (en) * 1987-09-02 1989-03-08 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JPH0814518B2 (en) * 1987-12-28 1996-02-14 松下電器産業株式会社 Method for manufacturing semiconductor pressure sensor
JPH03200035A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JPH03200034A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JP2771070B2 (en) * 1992-03-25 1998-07-02 日立建機株式会社 Differential pressure sensor
AU658524B1 (en) * 1993-08-17 1995-04-13 Yokogawa Electric Corporation Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
US5992240A (en) * 1995-11-21 1999-11-30 Fuji Electric Co., Ltd. Pressure detecting apparatus for measuring pressure based on detected capacitance
US7077008B2 (en) 2004-07-02 2006-07-18 Honeywell International Inc. Differential pressure measurement using backside sensing and a single ASIC
CN101088000B (en) * 2004-08-23 2010-11-10 霍尼韦尔国际公司 Absolute pressure detection system and method
US7401522B2 (en) * 2005-05-26 2008-07-22 Rosemount Inc. Pressure sensor using compressible sensor body

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE336042B (en) * 1967-05-03 1971-06-21 Mallory & Co Inc P R
JPS5135294A (en) * 1974-09-20 1976-03-25 Hitachi Ltd HANDOTAIATSURYOKUHENKANKI
JPS5190587A (en) * 1975-02-07 1976-08-09
JPS5255392A (en) * 1975-10-31 1977-05-06 Hitachi Ltd Semiconductor pressure sensor

Also Published As

Publication number Publication date
IT7921081A0 (en) 1979-03-16
FR2420210B1 (en) 1984-07-06
AU4500279A (en) 1979-09-20
GB2036425B (en) 1983-02-09
FR2420210A1 (en) 1979-10-12
WO1979000783A1 (en) 1979-10-18
GB2036425A (en) 1980-06-25
JPS54123077A (en) 1979-09-25

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