JPS6461634A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPS6461634A JPS6461634A JP62219519A JP21951987A JPS6461634A JP S6461634 A JPS6461634 A JP S6461634A JP 62219519 A JP62219519 A JP 62219519A JP 21951987 A JP21951987 A JP 21951987A JP S6461634 A JPS6461634 A JP S6461634A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- chip
- measured
- pressure application
- application part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To measure two absolute value of different pressure at the same time by providing a vacuum chamber on the opposite side from two pressure application part across two pressure sensing diaphragms provided to a semiconductor chip. CONSTITUTION:The two diaphragms 6a and 6b are formed on the semiconductor single crystal chip 4 and through holes 16a and 16b are formed in a pedestal 3 at the lower part. A stem 1 is formed of a glass material which has a coefficient of heat expansion close to that of the chip 4 and through holes 17a and 17b are bored. Then when the chip 4 is joined with the stem 1 by sealing, the vacuum chamber 13 is formed on the opposite side from the two pressure application parts. The atmospheric pressure is measured by one pressure application part and the pressure of, for example, an air suction manifold is measured by the other pressure application part. Thus, two absolute values of different pressure can be measured at the same time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62219519A JPS6461634A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62219519A JPS6461634A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6461634A true JPS6461634A (en) | 1989-03-08 |
Family
ID=16736741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62219519A Pending JPS6461634A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6461634A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123077A (en) * | 1978-03-17 | 1979-09-25 | Hitachi Ltd | Pressure sensor |
| JPS5850443A (en) * | 1981-09-21 | 1983-03-24 | Mitsubishi Electric Corp | Pressure-electricity transducer |
-
1987
- 1987-09-02 JP JP62219519A patent/JPS6461634A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123077A (en) * | 1978-03-17 | 1979-09-25 | Hitachi Ltd | Pressure sensor |
| JPS5850443A (en) * | 1981-09-21 | 1983-03-24 | Mitsubishi Electric Corp | Pressure-electricity transducer |
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