GB2036425B - Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same - Google Patents

Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same

Info

Publication number
GB2036425B
GB2036425B GB7937207A GB7937207A GB2036425B GB 2036425 B GB2036425 B GB 2036425B GB 7937207 A GB7937207 A GB 7937207A GB 7937207 A GB7937207 A GB 7937207A GB 2036425 B GB2036425 B GB 2036425B
Authority
GB
United Kingdom
Prior art keywords
manufacturing
same
pressure
pressure sensor
sensitive diaphragms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7937207A
Other versions
GB2036425A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB2036425A publication Critical patent/GB2036425A/en
Application granted granted Critical
Publication of GB2036425B publication Critical patent/GB2036425B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
GB7937207A 1978-03-17 1979-03-12 Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same Expired GB2036425B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2993678A JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor

Publications (2)

Publication Number Publication Date
GB2036425A GB2036425A (en) 1980-06-25
GB2036425B true GB2036425B (en) 1983-02-09

Family

ID=12289864

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7937207A Expired GB2036425B (en) 1978-03-17 1979-03-12 Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same

Country Status (6)

Country Link
JP (1) JPS54123077A (en)
AU (1) AU4500279A (en)
FR (1) FR2420210A1 (en)
GB (1) GB2036425B (en)
IT (1) IT1111588B (en)
WO (1) WO1979000783A1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407296A (en) * 1980-09-12 1983-10-04 Medtronic, Inc. Integral hermetic impantable pressure transducer
EP0049955A1 (en) * 1980-10-09 1982-04-21 General Motors Corporation Dual cavity pressure sensor
JPS57104835A (en) * 1980-12-23 1982-06-30 Toyota Motor Corp Detecting method for pressure in internal combustion engine
US4432372A (en) * 1981-08-28 1984-02-21 Medtronic, Inc. Two-lead power/signal multiplexed transducer
JPS5915944U (en) * 1982-07-21 1984-01-31 株式会社日立製作所 differential pressure detector
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
EP0265816B1 (en) * 1986-10-28 1991-08-28 Sumitomo Electric Industries Limited Method of measuring semiconductor pressure sensor
US4850228A (en) * 1987-05-27 1989-07-25 Smc Corporation Pressure meter
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JPS6461634A (en) * 1987-09-02 1989-03-08 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JPH0814518B2 (en) * 1987-12-28 1996-02-14 松下電器産業株式会社 Method for manufacturing semiconductor pressure sensor
JPH03200035A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JPH03200034A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JP2771070B2 (en) * 1992-03-25 1998-07-02 日立建機株式会社 Differential pressure sensor
AU658524B1 (en) * 1993-08-17 1995-04-13 Yokogawa Electric Corporation Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
DE19648048C2 (en) * 1995-11-21 2001-11-29 Fuji Electric Co Ltd Detector device for pressure measurement based on measured capacitance values
US7077008B2 (en) 2004-07-02 2006-07-18 Honeywell International Inc. Differential pressure measurement using backside sensing and a single ASIC
WO2006023936A1 (en) * 2004-08-23 2006-03-02 Honeywell International Inc. Exhaust gas recirculation system using absolute micromachined pressure sense die
US7401522B2 (en) * 2005-05-26 2008-07-22 Rosemount Inc. Pressure sensor using compressible sensor body

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE336042B (en) * 1967-05-03 1971-06-21 Mallory & Co Inc P R
JPS5135294A (en) * 1974-09-20 1976-03-25 Hitachi Ltd HANDOTAIATSURYOKUHENKANKI
JPS5190587A (en) * 1975-02-07 1976-08-09
JPS5255392A (en) * 1975-10-31 1977-05-06 Hitachi Ltd Semiconductor pressure sensor

Also Published As

Publication number Publication date
AU4500279A (en) 1979-09-20
IT7921081A0 (en) 1979-03-16
WO1979000783A1 (en) 1979-10-18
IT1111588B (en) 1986-01-13
FR2420210A1 (en) 1979-10-12
GB2036425A (en) 1980-06-25
JPS54123077A (en) 1979-09-25
FR2420210B1 (en) 1984-07-06

Similar Documents

Publication Publication Date Title
GB2036425B (en) Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same
GB2027988B (en) Pressure sensor having semiconductor diaphragm
DE2965860D1 (en) Semiconductor absolute pressure transducer assembly
GB2019648B (en) Semiconductor pressure transducer and method of assembly thereof
GB2039785B (en) Pressure sensitive adhesive products and the method for preparation of the same
GB2135509B (en) A semiconductor device having a pressure sensor and a method of manufacturing such a device
JPS54120643A (en) Pressure sensitive adhesive
EP0030457A3 (en) Method of manufacturing a semiconductor device and a semiconductor device manufactured by the method
EP0169438A3 (en) Semiconductor pressure transducer
DE3363269D1 (en) Pressure-sensitive element and pressure transducer using such an element
GB2031592B (en) Pressure transducer
SG77888G (en) A method of fabricating a semiconductor pressure sensor
JPS51139376A (en) Pressure transducer and method of manufacturing the same
GB2033589B (en) Mechanical-electrical pressure transducer
DE3376875D1 (en) Pressure sensor with semi-conductor diaphragm
GB2040456B (en) Differential pressure transducer
EP0127776A3 (en) Semiconductor differential pressure transducer semiconductor differential pressure transducer
DE3276595D1 (en) Semiconductor pressure transducer
AU5117679A (en) Semiconductor pressure transducer assembly
JPS5520994A (en) Diaphragm and its manufacturing method
ZA794149B (en) Pressure transducer and assembly
JPS54114278A (en) Pressure sensor
DE2943231A1 (en) SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME
IT8149143A0 (en) PROCEDURE FOR THE PRODUCTION OF PRESSURE SENSITIVE RECORDERS
JPS52150087A (en) Pressure sensor device and method of manufacturing the same

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950312