DE2943231A1 - SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME - Google Patents

SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME

Info

Publication number
DE2943231A1
DE2943231A1 DE19792943231 DE2943231T DE2943231A1 DE 2943231 A1 DE2943231 A1 DE 2943231A1 DE 19792943231 DE19792943231 DE 19792943231 DE 2943231 T DE2943231 T DE 2943231T DE 2943231 A1 DE2943231 A1 DE 2943231A1
Authority
DE
Germany
Prior art keywords
manufacturing
pressure
same
pressure sensors
sensitive diaphragms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19792943231
Other languages
German (de)
Inventor
S Suzuki
S Kobori
K Kawakami
M Takahashi
M Nishihara
H Hachino
H Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2993678A external-priority patent/JPS54123077A/en
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE2943231A1 publication Critical patent/DE2943231A1/en
Ceased legal-status Critical Current

Links

DE19792943231 1978-03-17 1979-03-12 SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME Ceased DE2943231A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2993678A JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor
PCT/JP1979/000062 WO1979000783A1 (en) 1978-03-17 1979-03-12 Semiconductor pressure sensors having a plurality of pressure-sensitive diaphragms and method of manufacturing the same

Publications (1)

Publication Number Publication Date
DE2943231A1 true DE2943231A1 (en) 1980-12-11

Family

ID=26368192

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792943231 Ceased DE2943231A1 (en) 1978-03-17 1979-03-12 SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME

Country Status (1)

Country Link
DE (1) DE2943231A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3207833A1 (en) * 1982-03-04 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Semiconductor pressure sensor
DE3814952A1 (en) * 1988-05-03 1989-11-23 Bosch Gmbh Robert SENSOR
DE4111539A1 (en) * 1990-07-05 1992-01-16 Mitsubishi Electric Corp SEMICONDUCTOR PRESSURE RECEIVER AND METHOD FOR THE PRODUCTION THEREOF
US5992240A (en) * 1995-11-21 1999-11-30 Fuji Electric Co., Ltd. Pressure detecting apparatus for measuring pressure based on detected capacitance

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397278A (en) * 1965-05-06 1968-08-13 Mallory & Co Inc P R Anodic bonding
US3697918A (en) * 1971-08-03 1972-10-10 Gen Electric Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements
GB1404016A (en) * 1971-08-02 1975-08-28 Bailey Meter Co Pressure transducer
US4040297A (en) * 1974-12-02 1977-08-09 U.S. Philips Corporation Pressure transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397278A (en) * 1965-05-06 1968-08-13 Mallory & Co Inc P R Anodic bonding
GB1404016A (en) * 1971-08-02 1975-08-28 Bailey Meter Co Pressure transducer
US3697918A (en) * 1971-08-03 1972-10-10 Gen Electric Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements
US4040297A (en) * 1974-12-02 1977-08-09 U.S. Philips Corporation Pressure transducer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP-AS 52-17437(1977) *
messen + prüfen/automatik, Februar 1974, S. 89-92 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3207833A1 (en) * 1982-03-04 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Semiconductor pressure sensor
DE3814952A1 (en) * 1988-05-03 1989-11-23 Bosch Gmbh Robert SENSOR
DE4111539A1 (en) * 1990-07-05 1992-01-16 Mitsubishi Electric Corp SEMICONDUCTOR PRESSURE RECEIVER AND METHOD FOR THE PRODUCTION THEREOF
US5992240A (en) * 1995-11-21 1999-11-30 Fuji Electric Co., Ltd. Pressure detecting apparatus for measuring pressure based on detected capacitance
DE19648048C2 (en) * 1995-11-21 2001-11-29 Fuji Electric Co Ltd Detector device for pressure measurement based on measured capacitance values

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Legal Events

Date Code Title Description
8131 Rejection