DE2943231A1 - SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME - Google Patents
SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAMEInfo
- Publication number
- DE2943231A1 DE2943231A1 DE19792943231 DE2943231T DE2943231A1 DE 2943231 A1 DE2943231 A1 DE 2943231A1 DE 19792943231 DE19792943231 DE 19792943231 DE 2943231 T DE2943231 T DE 2943231T DE 2943231 A1 DE2943231 A1 DE 2943231A1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- pressure
- same
- pressure sensors
- sensitive diaphragms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2993678A JPS54123077A (en) | 1978-03-17 | 1978-03-17 | Pressure sensor |
PCT/JP1979/000062 WO1979000783A1 (en) | 1978-03-17 | 1979-03-12 | Semiconductor pressure sensors having a plurality of pressure-sensitive diaphragms and method of manufacturing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2943231A1 true DE2943231A1 (en) | 1980-12-11 |
Family
ID=26368192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19792943231 Ceased DE2943231A1 (en) | 1978-03-17 | 1979-03-12 | SEMICONDUCTOR PRESSURE SENSORS HAVING A PLURALITY OF PRESSURE-SENSITIVE DIAPHRAGMS AND METHOD OF MANUFACTURING THE SAME |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE2943231A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3207833A1 (en) * | 1982-03-04 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | Semiconductor pressure sensor |
DE3814952A1 (en) * | 1988-05-03 | 1989-11-23 | Bosch Gmbh Robert | SENSOR |
DE4111539A1 (en) * | 1990-07-05 | 1992-01-16 | Mitsubishi Electric Corp | SEMICONDUCTOR PRESSURE RECEIVER AND METHOD FOR THE PRODUCTION THEREOF |
US5992240A (en) * | 1995-11-21 | 1999-11-30 | Fuji Electric Co., Ltd. | Pressure detecting apparatus for measuring pressure based on detected capacitance |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3397278A (en) * | 1965-05-06 | 1968-08-13 | Mallory & Co Inc P R | Anodic bonding |
US3697918A (en) * | 1971-08-03 | 1972-10-10 | Gen Electric | Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements |
GB1404016A (en) * | 1971-08-02 | 1975-08-28 | Bailey Meter Co | Pressure transducer |
US4040297A (en) * | 1974-12-02 | 1977-08-09 | U.S. Philips Corporation | Pressure transducer |
-
1979
- 1979-03-12 DE DE19792943231 patent/DE2943231A1/en not_active Ceased
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3397278A (en) * | 1965-05-06 | 1968-08-13 | Mallory & Co Inc P R | Anodic bonding |
GB1404016A (en) * | 1971-08-02 | 1975-08-28 | Bailey Meter Co | Pressure transducer |
US3697918A (en) * | 1971-08-03 | 1972-10-10 | Gen Electric | Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements |
US4040297A (en) * | 1974-12-02 | 1977-08-09 | U.S. Philips Corporation | Pressure transducer |
Non-Patent Citations (2)
Title |
---|
JP-AS 52-17437(1977) * |
messen + prüfen/automatik, Februar 1974, S. 89-92 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3207833A1 (en) * | 1982-03-04 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | Semiconductor pressure sensor |
DE3814952A1 (en) * | 1988-05-03 | 1989-11-23 | Bosch Gmbh Robert | SENSOR |
DE4111539A1 (en) * | 1990-07-05 | 1992-01-16 | Mitsubishi Electric Corp | SEMICONDUCTOR PRESSURE RECEIVER AND METHOD FOR THE PRODUCTION THEREOF |
US5992240A (en) * | 1995-11-21 | 1999-11-30 | Fuji Electric Co., Ltd. | Pressure detecting apparatus for measuring pressure based on detected capacitance |
DE19648048C2 (en) * | 1995-11-21 | 2001-11-29 | Fuji Electric Co Ltd | Detector device for pressure measurement based on measured capacitance values |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8131 | Rejection |