GB201317170D0 - Furnace with a convection and radiation heating - Google Patents

Furnace with a convection and radiation heating

Info

Publication number
GB201317170D0
GB201317170D0 GBGB1317170.7A GB201317170A GB201317170D0 GB 201317170 D0 GB201317170 D0 GB 201317170D0 GB 201317170 A GB201317170 A GB 201317170A GB 201317170 D0 GB201317170 D0 GB 201317170D0
Authority
GB
United Kingdom
Prior art keywords
convection
furnace
radiation heating
radiation
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1317170.7A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebner Industrieofenbau GmbH
Original Assignee
Ebner Industrieofenbau GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebner Industrieofenbau GmbH filed Critical Ebner Industrieofenbau GmbH
Priority to GBGB1317170.7A priority Critical patent/GB201317170D0/en
Publication of GB201317170D0 publication Critical patent/GB201317170D0/en
Priority to CN201480065142.4A priority patent/CN107110602B/zh
Priority to PCT/EP2014/070580 priority patent/WO2015044320A1/en
Priority to JP2016544761A priority patent/JP6491216B2/ja
Priority to KR1020167011235A priority patent/KR20160068820A/ko
Priority to EP14783783.5A priority patent/EP3049744B1/en
Priority to US15/072,821 priority patent/US9970709B2/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
    • F27B9/40—Arrangements of controlling or monitoring devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Chamber type furnaces specially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path being carried by a conveyor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/28—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity for treating continuous lengths of work
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3314—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F27D2019/0028—Regulation
    • F27D2019/0071—Regulation using position sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
GBGB1317170.7A 2013-09-27 2013-09-27 Furnace with a convection and radiation heating Ceased GB201317170D0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GBGB1317170.7A GB201317170D0 (en) 2013-09-27 2013-09-27 Furnace with a convection and radiation heating
CN201480065142.4A CN107110602B (zh) 2013-09-27 2014-09-25 具有对流和辐射加热的熔炉
PCT/EP2014/070580 WO2015044320A1 (en) 2013-09-27 2014-09-25 Furnace with a convection and radiation heating
JP2016544761A JP6491216B2 (ja) 2013-09-27 2014-09-25 対流加熱及び放射加熱を用いた炉
KR1020167011235A KR20160068820A (ko) 2013-09-27 2014-09-25 대류 및 복사 가열을 갖는 노
EP14783783.5A EP3049744B1 (en) 2013-09-27 2014-09-25 Furnace with a convection and radiation heating
US15/072,821 US9970709B2 (en) 2013-09-27 2016-03-17 Furnace with a convection and radiation heating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1317170.7A GB201317170D0 (en) 2013-09-27 2013-09-27 Furnace with a convection and radiation heating

Publications (1)

Publication Number Publication Date
GB201317170D0 true GB201317170D0 (en) 2013-11-06

Family

ID=49553514

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1317170.7A Ceased GB201317170D0 (en) 2013-09-27 2013-09-27 Furnace with a convection and radiation heating

Country Status (7)

Country Link
US (1) US9970709B2 (https=)
EP (1) EP3049744B1 (https=)
JP (1) JP6491216B2 (https=)
KR (1) KR20160068820A (https=)
CN (1) CN107110602B (https=)
GB (1) GB201317170D0 (https=)
WO (1) WO2015044320A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201317194D0 (https=) * 2013-09-27 2013-11-13 Ebner Ind Ofenbau
JP7477754B2 (ja) * 2020-03-30 2024-05-02 日本製鉄株式会社 加熱炉および加熱方法
CN117438332A (zh) * 2022-07-14 2024-01-23 长鑫存储技术有限公司 加热装置和方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61149781A (ja) * 1984-12-24 1986-07-08 日立金属株式会社 雰囲気焼結用連続炉
FR2579501B1 (fr) * 1985-03-30 1990-03-02 Neitz Heinrich Verwaltung Procede et dispositif pour le brasage de pieces en aluminium
US4767324A (en) * 1987-05-26 1988-08-30 General Electric Company Transition section for muffle furnace
JPH01167582A (ja) * 1987-12-23 1989-07-03 Shinagawa Refract Co Ltd 被熱物の浮上・輸送焼成炉およびその焼成法
JP2910061B2 (ja) * 1989-06-30 1999-06-23 松下電器産業株式会社 焼成炉
JP4090585B2 (ja) * 1997-08-04 2008-05-28 松下電器産業株式会社 対象物体の加熱処理方法およびそのための装置
US6091055A (en) * 1997-08-04 2000-07-18 Matsushita Electric Industrial Co., Ltd. Method of heat treating object and apparatus for the same
JPH11281259A (ja) * 1998-03-27 1999-10-15 Tokai Konetsu Kogyo Co Ltd 連続式雰囲気炉
US5915958A (en) * 1998-06-18 1999-06-29 Ross Air Systems, Inc. Convertible apparatus for heat treating materials
JP2000128346A (ja) * 1998-08-20 2000-05-09 Matsushita Electric Ind Co Ltd 浮揚装置、浮揚搬送装置および熱処理装置
US6336775B1 (en) * 1998-08-20 2002-01-08 Matsushita Electric Industrial Co., Ltd. Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus
JP2001066751A (ja) * 1999-02-16 2001-03-16 Fuji Photo Film Co Ltd 画像形成装置
JP3547724B2 (ja) * 2001-09-25 2004-07-28 沖電気工業株式会社 レジストパターンのベーク装置及びレジストパターンの形成方法
JP2003329372A (ja) * 2002-05-14 2003-11-19 Nittetsu Elex Co Ltd 連続処理設備
JP4741307B2 (ja) * 2005-05-20 2011-08-03 富士フイルム株式会社 加熱装置及び加熱方法
JP2008020112A (ja) * 2006-07-12 2008-01-31 Fujitsu Hitachi Plasma Display Ltd 加熱処理方法および装置
CN101257060B (zh) * 2008-03-05 2012-05-23 常州亿晶光电科技有限公司 太阳能电池烧结炉温区隔断装置
US20100127418A1 (en) * 2008-11-25 2010-05-27 Ronald Alan Davidson Methods For Continuous Firing Of Shaped Bodies And Roller Hearth Furnaces Therefor
CN201331256Y (zh) * 2008-12-15 2009-10-21 合肥恒力电子技术开发公司 一种高温炉管气隔断装置
DE102009037299A1 (de) * 2009-08-14 2011-08-04 Leybold Optics GmbH, 63755 Vorrichtung und Behandlungskammer zur thermischen Behandlung von Substraten
US9163877B2 (en) * 2011-06-07 2015-10-20 Berndorf Band Gmbh Conveyor oven

Also Published As

Publication number Publication date
JP2016536557A (ja) 2016-11-24
JP6491216B2 (ja) 2019-03-27
CN107110602B (zh) 2019-11-15
EP3049744B1 (en) 2018-10-24
CN107110602A (zh) 2017-08-29
KR20160068820A (ko) 2016-06-15
US20160290719A1 (en) 2016-10-06
WO2015044320A1 (en) 2015-04-02
US9970709B2 (en) 2018-05-15
EP3049744A1 (en) 2016-08-03

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)