GB1568797A - Production of a high vacuum - Google Patents
Production of a high vacuum Download PDFInfo
- Publication number
- GB1568797A GB1568797A GB15801/78A GB1580178A GB1568797A GB 1568797 A GB1568797 A GB 1568797A GB 15801/78 A GB15801/78 A GB 15801/78A GB 1580178 A GB1580178 A GB 1580178A GB 1568797 A GB1568797 A GB 1568797A
- Authority
- GB
- United Kingdom
- Prior art keywords
- receiver
- shell
- protective gas
- high vacuum
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title description 2
- 238000000034 method Methods 0.000 claims description 26
- 230000001681 protective effect Effects 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000011010 flushing procedure Methods 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 14
- 230000009467 reduction Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH574177A CH621366A5 (enrdf_load_stackoverflow) | 1977-05-09 | 1977-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1568797A true GB1568797A (en) | 1980-06-04 |
Family
ID=4298581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB15801/78A Expired GB1568797A (en) | 1977-05-09 | 1978-04-21 | Production of a high vacuum |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4183982A (enrdf_load_stackoverflow) |
| CH (1) | CH621366A5 (enrdf_load_stackoverflow) |
| DE (1) | DE2816612A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2400949A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1568797A (enrdf_load_stackoverflow) |
| NL (1) | NL169903C (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0382984A1 (en) * | 1989-02-13 | 1990-08-22 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Thermal decomposition trap |
| DE4336035A1 (de) * | 1993-10-22 | 1995-04-27 | Leybold Ag | Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe |
| DE10341425A1 (de) * | 2003-09-09 | 2005-03-31 | Bosch Rexroth Ag | Hydraulikaggregat mit einem Vorratsbehälter für Hydraulik-Flüssigkeit und mit einer Motor-Pumpe-Einheit |
| JP4430506B2 (ja) * | 2004-10-14 | 2010-03-10 | 三菱電機株式会社 | 蒸着装置 |
| CN106949372B (zh) * | 2017-03-20 | 2019-04-30 | 成都科瑞尔低温设备有限公司 | 一种抽高真空的方法 |
| CN111622924A (zh) * | 2020-05-14 | 2020-09-04 | 李宁军 | 一种正压排气系统 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3002735A (en) * | 1957-07-01 | 1961-10-03 | Sunbeam Equip | Vacuum furnace |
| DE1100864B (de) * | 1959-04-07 | 1961-03-02 | Balzers Vakuum G M B H | Verfahren zum Betrieb von Hochvakuum-anlagen, deren Rezipient zwecks Beschickung und Entnahme der im Vakuum zu behandelnden Gegen-staende geoeffnet werden kann, und Vakuumanlage zur Durchfuehrung dieses Verfahrens |
| IT649978A (enrdf_load_stackoverflow) * | 1960-06-17 | |||
| US3183888A (en) * | 1961-11-29 | 1965-05-18 | Wilson Eng Co Inc Lee | Apparatus for surface coating of strip metal or the like |
| DE1171877B (de) * | 1963-03-26 | 1964-06-11 | Degussa | Vakuumofen |
| DE1285091B (de) * | 1964-01-02 | 1968-12-12 | Norton Co | Vakuumapparat zum Erzeugen eines Ultrahochvakuums |
| US3446659A (en) * | 1966-09-16 | 1969-05-27 | Texas Instruments Inc | Apparatus and process for growing noncontaminated thermal oxide on silicon |
| CH445008A (de) * | 1966-10-18 | 1967-10-15 | Balzers Patent Beteilig Ag | Verfahren zur Desorption von Fremdmolekülen von der Innenwand eines Rezipienten |
| US3466191A (en) * | 1966-11-07 | 1969-09-09 | Us Army | Method of vacuum deposition of piezoelectric films of cadmium sulfide |
| US3573888A (en) * | 1968-02-06 | 1971-04-06 | Anchor Hocking Glass Corp | Vapor overheating method and apparatus for strengthening glass |
| FR1587077A (enrdf_load_stackoverflow) * | 1968-08-01 | 1970-03-13 | ||
| US3649339A (en) * | 1969-09-05 | 1972-03-14 | Eugene C Smith | Apparatus and method for securing a high vacuum for particle coating process |
| US3876410A (en) * | 1969-12-24 | 1975-04-08 | Ball Brothers Co Inc | Method of applying durable lubricous coatings on glass containers |
| FR2088376B3 (enrdf_load_stackoverflow) * | 1970-05-06 | 1974-03-08 | Metal Lux Spa | |
| US3974003A (en) * | 1975-08-25 | 1976-08-10 | Ibm | Chemical vapor deposition of dielectric films containing Al, N, and Si |
| NL7512177A (nl) * | 1975-09-23 | 1977-03-25 | Balzers Patent Beteilig Ag | Vacuuminstallatie voor het behandelen van een produkt in het bijzonder een vacuumopdampin- stallatie. |
-
1977
- 1977-05-09 CH CH574177A patent/CH621366A5/de not_active IP Right Cessation
- 1977-07-26 NL NLAANVRAGE7708290,A patent/NL169903C/xx not_active IP Right Cessation
-
1978
- 1978-04-17 DE DE19782816612 patent/DE2816612A1/de not_active Withdrawn
- 1978-04-21 GB GB15801/78A patent/GB1568797A/en not_active Expired
- 1978-05-05 FR FR7813302A patent/FR2400949A1/fr active Granted
- 1978-05-05 US US05/903,173 patent/US4183982A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| NL7708290A (nl) | 1978-11-13 |
| US4183982A (en) | 1980-01-15 |
| FR2400949A1 (fr) | 1979-03-23 |
| DE2816612A1 (de) | 1978-11-16 |
| CH621366A5 (enrdf_load_stackoverflow) | 1981-01-30 |
| NL169903B (nl) | 1982-04-01 |
| FR2400949B1 (enrdf_load_stackoverflow) | 1982-11-19 |
| NL169903C (nl) | 1982-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69004591T2 (de) | Falle für thermische Zersetzung. | |
| US5065698A (en) | Film forming apparatus capable of preventing adhesion of film deposits | |
| JP2012212854A5 (enrdf_load_stackoverflow) | ||
| GB1568797A (en) | Production of a high vacuum | |
| JP2003347198A5 (enrdf_load_stackoverflow) | ||
| JPS5766625A (en) | Manufacture of film | |
| CN205856602U (zh) | 一种高效节能式硒化锌气相沉积炉 | |
| JPS57134555A (en) | Method and device for forming thin film | |
| WO2009038326A2 (en) | Scrubber using mesh filter and apparatus for exhaust gas treatment in semiconductor fabrication equipments using the same | |
| CA1277442C (en) | Gas scavenger | |
| CN205774792U (zh) | 一种用于太阳能电池片生产的原子层沉积真空镀膜装置 | |
| JPS6323827B2 (enrdf_load_stackoverflow) | ||
| JPS54100668A (en) | Electron-beam exposure unit | |
| US3970516A (en) | Multiple filter press diaphragm former | |
| GB2106938A (en) | Tantalum coated alumina articles | |
| CN222849760U (zh) | 一种石墨电极预烧装置 | |
| DE2635007A1 (de) | Vakuumanlage zum behandeln eines gutes, insbesondere vakuumaufdampfanlage | |
| JPS5920404A (ja) | 内熱式熱処理炉 | |
| CN216999041U (zh) | Pecvd镀膜设备 | |
| JPH03118815A (ja) | 真空装置 | |
| JPS60257129A (ja) | 膜形成装置 | |
| JPS57200216A (en) | Method for depositing amorphous silicon layer | |
| US3519473A (en) | Processes for the deposition of nickel coatings | |
| JPS5943988B2 (ja) | 超微粒子膜の製造方法および製造装置 | |
| US3335027A (en) | Nickel plating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |