FR2400949A1 - Procede pour creer un vide pousse - Google Patents

Procede pour creer un vide pousse

Info

Publication number
FR2400949A1
FR2400949A1 FR7813302A FR7813302A FR2400949A1 FR 2400949 A1 FR2400949 A1 FR 2400949A1 FR 7813302 A FR7813302 A FR 7813302A FR 7813302 A FR7813302 A FR 7813302A FR 2400949 A1 FR2400949 A1 FR 2400949A1
Authority
FR
France
Prior art keywords
wall
container
creating
high vacuum
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7813302A
Other languages
English (en)
Other versions
FR2400949B1 (fr
Inventor
Thaddaus Kraus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2400949A1 publication Critical patent/FR2400949A1/fr
Application granted granted Critical
Publication of FR2400949B1 publication Critical patent/FR2400949B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne les techniques de traitement sous vide. Elle a pour objet un procédé pour créer un vide poussé dans un récipient, suivant lequel un gaz de protection est introduit dans le récipient pour protéger la paroi intérieure contre un dépôt de vapeur, au moins lors du remplissage. Ce procédé consiste à protéger la paroi intérieure 2 au moyen d'une double paroi 4 à introduire le gaz de protection dans l'espace intermédiaire entre la paroi du récipient 1 et la double paroi, et à chauffer cette dernière lors de la mise sous vide ultérieure. Application notamment à la métallisation sous vide de substrats.
FR7813302A 1977-05-09 1978-05-05 Procede pour creer un vide pousse Granted FR2400949A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH574177A CH621366A5 (fr) 1977-05-09 1977-05-09

Publications (2)

Publication Number Publication Date
FR2400949A1 true FR2400949A1 (fr) 1979-03-23
FR2400949B1 FR2400949B1 (fr) 1982-11-19

Family

ID=4298581

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7813302A Granted FR2400949A1 (fr) 1977-05-09 1978-05-05 Procede pour creer un vide pousse

Country Status (6)

Country Link
US (1) US4183982A (fr)
CH (1) CH621366A5 (fr)
DE (1) DE2816612A1 (fr)
FR (1) FR2400949A1 (fr)
GB (1) GB1568797A (fr)
NL (1) NL169903C (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0382984A1 (fr) * 1989-02-13 1990-08-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Piège pour décomposition thermique
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
DE10341425A1 (de) * 2003-09-09 2005-03-31 Bosch Rexroth Ag Hydraulikaggregat mit einem Vorratsbehälter für Hydraulik-Flüssigkeit und mit einer Motor-Pumpe-Einheit
JP4430506B2 (ja) * 2004-10-14 2010-03-10 三菱電機株式会社 蒸着装置
CN106949372B (zh) * 2017-03-20 2019-04-30 成都科瑞尔低温设备有限公司 一种抽高真空的方法
CN111622924A (zh) * 2020-05-14 2020-09-04 李宁军 一种正压排气系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3002735A (en) * 1957-07-01 1961-10-03 Sunbeam Equip Vacuum furnace
NL6401333A (fr) * 1963-03-26 1964-09-28
NL7512177A (nl) * 1975-09-23 1977-03-25 Balzers Patent Beteilig Ag Vacuuminstallatie voor het behandelen van een produkt in het bijzonder een vacuumopdampin- stallatie.

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL266000A (fr) * 1960-06-17
US3183888A (en) * 1961-11-29 1965-05-18 Wilson Eng Co Inc Lee Apparatus for surface coating of strip metal or the like
DE1285091B (de) * 1964-01-02 1968-12-12 Norton Co Vakuumapparat zum Erzeugen eines Ultrahochvakuums
US3446659A (en) * 1966-09-16 1969-05-27 Texas Instruments Inc Apparatus and process for growing noncontaminated thermal oxide on silicon
CH445008A (de) * 1966-10-18 1967-10-15 Balzers Patent Beteilig Ag Verfahren zur Desorption von Fremdmolekülen von der Innenwand eines Rezipienten
US3466191A (en) * 1966-11-07 1969-09-09 Us Army Method of vacuum deposition of piezoelectric films of cadmium sulfide
US3573888A (en) * 1968-02-06 1971-04-06 Anchor Hocking Glass Corp Vapor overheating method and apparatus for strengthening glass
FR1587077A (fr) * 1968-08-01 1970-03-13
US3649339A (en) * 1969-09-05 1972-03-14 Eugene C Smith Apparatus and method for securing a high vacuum for particle coating process
US3876410A (en) * 1969-12-24 1975-04-08 Ball Brothers Co Inc Method of applying durable lubricous coatings on glass containers
DE2122997A1 (de) * 1970-05-06 1971-11-25 Metal Lux Spa Gerät zum Färben von Gegenständen wie beispielsweise Brillengläsern
US3974003A (en) * 1975-08-25 1976-08-10 Ibm Chemical vapor deposition of dielectric films containing Al, N, and Si

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3002735A (en) * 1957-07-01 1961-10-03 Sunbeam Equip Vacuum furnace
NL6401333A (fr) * 1963-03-26 1964-09-28
NL7512177A (nl) * 1975-09-23 1977-03-25 Balzers Patent Beteilig Ag Vacuuminstallatie voor het behandelen van een produkt in het bijzonder een vacuumopdampin- stallatie.

Also Published As

Publication number Publication date
DE2816612A1 (de) 1978-11-16
GB1568797A (en) 1980-06-04
NL169903C (nl) 1982-09-01
FR2400949B1 (fr) 1982-11-19
CH621366A5 (fr) 1981-01-30
NL7708290A (nl) 1978-11-13
US4183982A (en) 1980-01-15
NL169903B (nl) 1982-04-01

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Legal Events

Date Code Title Description
ST Notification of lapse