GB1568797A - Production of a high vacuum - Google Patents
Production of a high vacuum Download PDFInfo
- Publication number
- GB1568797A GB1568797A GB15801/78A GB1580178A GB1568797A GB 1568797 A GB1568797 A GB 1568797A GB 15801/78 A GB15801/78 A GB 15801/78A GB 1580178 A GB1580178 A GB 1580178A GB 1568797 A GB1568797 A GB 1568797A
- Authority
- GB
- United Kingdom
- Prior art keywords
- receiver
- shell
- protective gas
- high vacuum
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH574177A CH621366A5 (US07534539-20090519-C00280.png) | 1977-05-09 | 1977-05-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1568797A true GB1568797A (en) | 1980-06-04 |
Family
ID=4298581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB15801/78A Expired GB1568797A (en) | 1977-05-09 | 1978-04-21 | Production of a high vacuum |
Country Status (6)
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0382984A1 (en) * | 1989-02-13 | 1990-08-22 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Thermal decomposition trap |
DE4336035A1 (de) * | 1993-10-22 | 1995-04-27 | Leybold Ag | Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe |
DE10341425A1 (de) * | 2003-09-09 | 2005-03-31 | Bosch Rexroth Ag | Hydraulikaggregat mit einem Vorratsbehälter für Hydraulik-Flüssigkeit und mit einer Motor-Pumpe-Einheit |
JP4430506B2 (ja) * | 2004-10-14 | 2010-03-10 | 三菱電機株式会社 | 蒸着装置 |
CN106949372B (zh) * | 2017-03-20 | 2019-04-30 | 成都科瑞尔低温设备有限公司 | 一种抽高真空的方法 |
CN111622924A (zh) * | 2020-05-14 | 2020-09-04 | 李宁军 | 一种正压排气系统 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3002735A (en) * | 1957-07-01 | 1961-10-03 | Sunbeam Equip | Vacuum furnace |
NL126085C (US07534539-20090519-C00280.png) * | 1960-06-17 | |||
US3183888A (en) * | 1961-11-29 | 1965-05-18 | Wilson Eng Co Inc Lee | Apparatus for surface coating of strip metal or the like |
DE1171877B (de) * | 1963-03-26 | 1964-06-11 | Degussa | Vakuumofen |
DE1285091B (de) * | 1964-01-02 | 1968-12-12 | Norton Co | Vakuumapparat zum Erzeugen eines Ultrahochvakuums |
US3446659A (en) * | 1966-09-16 | 1969-05-27 | Texas Instruments Inc | Apparatus and process for growing noncontaminated thermal oxide on silicon |
CH445008A (de) * | 1966-10-18 | 1967-10-15 | Balzers Patent Beteilig Ag | Verfahren zur Desorption von Fremdmolekülen von der Innenwand eines Rezipienten |
US3466191A (en) * | 1966-11-07 | 1969-09-09 | Us Army | Method of vacuum deposition of piezoelectric films of cadmium sulfide |
US3573888A (en) * | 1968-02-06 | 1971-04-06 | Anchor Hocking Glass Corp | Vapor overheating method and apparatus for strengthening glass |
FR1587077A (US07534539-20090519-C00280.png) * | 1968-08-01 | 1970-03-13 | ||
US3649339A (en) * | 1969-09-05 | 1972-03-14 | Eugene C Smith | Apparatus and method for securing a high vacuum for particle coating process |
US3876410A (en) * | 1969-12-24 | 1975-04-08 | Ball Brothers Co Inc | Method of applying durable lubricous coatings on glass containers |
DE2122997A1 (de) * | 1970-05-06 | 1971-11-25 | Metal Lux Spa | Gerät zum Färben von Gegenständen wie beispielsweise Brillengläsern |
US3974003A (en) * | 1975-08-25 | 1976-08-10 | Ibm | Chemical vapor deposition of dielectric films containing Al, N, and Si |
NL7512177A (nl) * | 1975-09-23 | 1977-03-25 | Balzers Patent Beteilig Ag | Vacuuminstallatie voor het behandelen van een produkt in het bijzonder een vacuumopdampin- stallatie. |
-
1977
- 1977-05-09 CH CH574177A patent/CH621366A5/de not_active IP Right Cessation
- 1977-07-26 NL NLAANVRAGE7708290,A patent/NL169903C/xx not_active IP Right Cessation
-
1978
- 1978-04-17 DE DE19782816612 patent/DE2816612A1/de not_active Withdrawn
- 1978-04-21 GB GB15801/78A patent/GB1568797A/en not_active Expired
- 1978-05-05 FR FR7813302A patent/FR2400949A1/fr active Granted
- 1978-05-05 US US05/903,173 patent/US4183982A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CH621366A5 (US07534539-20090519-C00280.png) | 1981-01-30 |
FR2400949A1 (fr) | 1979-03-23 |
DE2816612A1 (de) | 1978-11-16 |
NL169903C (nl) | 1982-09-01 |
NL169903B (nl) | 1982-04-01 |
NL7708290A (nl) | 1978-11-13 |
US4183982A (en) | 1980-01-15 |
FR2400949B1 (US07534539-20090519-C00280.png) | 1982-11-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69004591T2 (de) | Falle für thermische Zersetzung. | |
US4430547A (en) | Cleaning device for a plasma etching system | |
US5065698A (en) | Film forming apparatus capable of preventing adhesion of film deposits | |
JP2012212854A5 (US07534539-20090519-C00280.png) | ||
JPS5754269A (en) | Apparatus for forming film in vacuum | |
GB1568797A (en) | Production of a high vacuum | |
JP2007513754A (ja) | プロセスチャンバーのクリーニング方法およびクリーニング装置 | |
CN205856602U (zh) | 一种高效节能式硒化锌气相沉积炉 | |
JPS57134555A (en) | Method and device for forming thin film | |
US3368523A (en) | Laminar flow work station | |
CA1277442C (en) | Gas scavenger | |
CN105671514B (zh) | 一种两步法制备多孔铱的方法 | |
JPS5889944A (ja) | プラズマcvd装置 | |
JPS54100668A (en) | Electron-beam exposure unit | |
GB2106938A (en) | Tantalum coated alumina articles | |
DE2635007A1 (de) | Vakuumanlage zum behandeln eines gutes, insbesondere vakuumaufdampfanlage | |
JPS5920404A (ja) | 内熱式熱処理炉 | |
Tabares et al. | Boronization of the TJ-I tokamak by trimethylboron and decaborane | |
JPS6414727A (en) | Apparatus for producing magnetic recording medium | |
CN216999041U (zh) | Pecvd镀膜设备 | |
CN215233212U (zh) | 一种高效能等离子体工业废气处理设备 | |
JPH03118815A (ja) | 真空装置 | |
JPS57200216A (en) | Method for depositing amorphous silicon layer | |
JPS6063370A (ja) | アモルファス水素化シリコン膜製造装置 | |
JPS6132393B2 (US07534539-20090519-C00280.png) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |