GB1561313A - X-ray fluorescence measurement of thin film thicknesses - Google Patents
X-ray fluorescence measurement of thin film thicknesses Download PDFInfo
- Publication number
- GB1561313A GB1561313A GB2084877A GB2084877A GB1561313A GB 1561313 A GB1561313 A GB 1561313A GB 2084877 A GB2084877 A GB 2084877A GB 2084877 A GB2084877 A GB 2084877A GB 1561313 A GB1561313 A GB 1561313A
- Authority
- GB
- United Kingdom
- Prior art keywords
- thickness
- line
- measured
- response
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US68746276A | 1976-05-18 | 1976-05-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1561313A true GB1561313A (en) | 1980-02-20 |
Family
ID=24760542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2084877A Expired GB1561313A (en) | 1976-05-18 | 1977-05-18 | X-ray fluorescence measurement of thin film thicknesses |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS52140355A (es) |
CA (1) | CA1086870A (es) |
DE (1) | DE2721589A1 (es) |
FR (1) | FR2393266A1 (es) |
GB (1) | GB1561313A (es) |
NL (1) | NL185306C (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI59489C (fi) * | 1978-11-21 | 1981-08-10 | Enso Gutzeit Oy | Foerfarande foer maetning av belaeggningsmaengder |
JPS5758300U (es) * | 1980-09-22 | 1982-04-06 | ||
DE3129049A1 (de) * | 1981-07-23 | 1983-02-24 | Hoesch Werke Ag, 4600 Dortmund | Verfahren und vorrichtung zur zerstoerungsfreien bestimmung der dicke der eisen-zinn-zwischenschicht an elektrolytisch verzinntem blech |
JPS60140105A (ja) * | 1983-12-27 | 1985-07-25 | Shimadzu Corp | 多層膜分析装置 |
JPS60142205A (ja) * | 1983-12-29 | 1985-07-27 | Shimadzu Corp | 多層膜分析装置 |
DD278866A1 (de) * | 1987-11-20 | 1990-05-16 | Akad Wissenschaften Ddr | Verfahren zur phosphorgehaltsbestimmung in stromlos abgeschiedenen metallueberzuegen |
JP3706989B2 (ja) * | 1999-04-07 | 2005-10-19 | 富士通株式会社 | 蛍光x線を用いた膜厚測定方法 |
JP4966160B2 (ja) * | 2007-10-26 | 2012-07-04 | シャープ株式会社 | 膜厚測定方法 |
JP5494322B2 (ja) * | 2009-12-28 | 2014-05-14 | 株式会社デンソー | Cntワイヤの製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5146631B2 (es) * | 1971-12-29 | 1976-12-10 | ||
JPS4919222A (es) * | 1972-06-15 | 1974-02-20 |
-
1977
- 1977-04-27 CA CA277,086A patent/CA1086870A/en not_active Expired
- 1977-05-13 DE DE19772721589 patent/DE2721589A1/de not_active Ceased
- 1977-05-17 FR FR7715153A patent/FR2393266A1/fr active Granted
- 1977-05-17 NL NL7705443A patent/NL185306C/xx not_active IP Right Cessation
- 1977-05-18 GB GB2084877A patent/GB1561313A/en not_active Expired
- 1977-05-18 JP JP5651677A patent/JPS52140355A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
CA1086870A (en) | 1980-09-30 |
JPS5735768B2 (es) | 1982-07-30 |
DE2721589A1 (de) | 1977-12-01 |
JPS52140355A (en) | 1977-11-22 |
FR2393266A1 (fr) | 1978-12-29 |
NL7705443A (nl) | 1977-11-22 |
FR2393266B1 (es) | 1982-03-19 |
NL185306C (nl) | 1990-03-01 |
NL185306B (nl) | 1989-10-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 19970517 |