GB1561313A - X-ray fluorescence measurement of thin film thicknesses - Google Patents

X-ray fluorescence measurement of thin film thicknesses Download PDF

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Publication number
GB1561313A
GB1561313A GB2084877A GB2084877A GB1561313A GB 1561313 A GB1561313 A GB 1561313A GB 2084877 A GB2084877 A GB 2084877A GB 2084877 A GB2084877 A GB 2084877A GB 1561313 A GB1561313 A GB 1561313A
Authority
GB
United Kingdom
Prior art keywords
thickness
line
measured
response
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2084877A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1561313A publication Critical patent/GB1561313A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB2084877A 1976-05-18 1977-05-18 X-ray fluorescence measurement of thin film thicknesses Expired GB1561313A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68746276A 1976-05-18 1976-05-18

Publications (1)

Publication Number Publication Date
GB1561313A true GB1561313A (en) 1980-02-20

Family

ID=24760542

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2084877A Expired GB1561313A (en) 1976-05-18 1977-05-18 X-ray fluorescence measurement of thin film thicknesses

Country Status (6)

Country Link
JP (1) JPS52140355A (es)
CA (1) CA1086870A (es)
DE (1) DE2721589A1 (es)
FR (1) FR2393266A1 (es)
GB (1) GB1561313A (es)
NL (1) NL185306C (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI59489C (fi) * 1978-11-21 1981-08-10 Enso Gutzeit Oy Foerfarande foer maetning av belaeggningsmaengder
JPS5758300U (es) * 1980-09-22 1982-04-06
DE3129049A1 (de) * 1981-07-23 1983-02-24 Hoesch Werke Ag, 4600 Dortmund Verfahren und vorrichtung zur zerstoerungsfreien bestimmung der dicke der eisen-zinn-zwischenschicht an elektrolytisch verzinntem blech
JPS60140105A (ja) * 1983-12-27 1985-07-25 Shimadzu Corp 多層膜分析装置
JPS60142205A (ja) * 1983-12-29 1985-07-27 Shimadzu Corp 多層膜分析装置
DD278866A1 (de) * 1987-11-20 1990-05-16 Akad Wissenschaften Ddr Verfahren zur phosphorgehaltsbestimmung in stromlos abgeschiedenen metallueberzuegen
JP3706989B2 (ja) * 1999-04-07 2005-10-19 富士通株式会社 蛍光ｘ線を用いた膜厚測定方法
JP4966160B2 (ja) * 2007-10-26 2012-07-04 シャープ株式会社 膜厚測定方法
JP5494322B2 (ja) * 2009-12-28 2014-05-14 株式会社デンソー Ｃｎｔワイヤの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146631B2 (es) * 1971-12-29 1976-12-10
JPS4919222A (es) * 1972-06-15 1974-02-20

Also Published As

Publication number Publication date
CA1086870A (en) 1980-09-30
JPS5735768B2 (es) 1982-07-30
DE2721589A1 (de) 1977-12-01
JPS52140355A (en) 1977-11-22
FR2393266A1 (fr) 1978-12-29
NL7705443A (nl) 1977-11-22
FR2393266B1 (es) 1982-03-19
NL185306C (nl) 1990-03-01
NL185306B (nl) 1989-10-02

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years

Effective date: 19970517