GB1488860A - Method of manufacturing a semiconductor device having pressed contacts - Google Patents
Method of manufacturing a semiconductor device having pressed contactsInfo
- Publication number
- GB1488860A GB1488860A GB5293774A GB5293774A GB1488860A GB 1488860 A GB1488860 A GB 1488860A GB 5293774 A GB5293774 A GB 5293774A GB 5293774 A GB5293774 A GB 5293774A GB 1488860 A GB1488860 A GB 1488860A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electrode
- deposit
- layer
- semi
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000151 deposition Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
- H10D64/233—Cathode or anode electrodes for thyristors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/71—Means for bonding not being attached to, or not being formed on, the surface to be connected
- H01L24/72—Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
- H10D64/231—Emitter or collector electrodes for bipolar transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01042—Molybdenum [Mo]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1301—Thyristor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7344329A FR2254879B1 (enrdf_load_stackoverflow) | 1973-12-12 | 1973-12-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1488860A true GB1488860A (en) | 1977-10-12 |
Family
ID=9129097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5293774A Expired GB1488860A (en) | 1973-12-12 | 1974-12-06 | Method of manufacturing a semiconductor device having pressed contacts |
Country Status (6)
Country | Link |
---|---|
BE (1) | BE822433A (enrdf_load_stackoverflow) |
DE (1) | DE2458410C2 (enrdf_load_stackoverflow) |
FR (1) | FR2254879B1 (enrdf_load_stackoverflow) |
GB (1) | GB1488860A (enrdf_load_stackoverflow) |
IT (1) | IT1030873B (enrdf_load_stackoverflow) |
NL (1) | NL7416194A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4155155A (en) | 1977-01-19 | 1979-05-22 | Alsthom-Atlantique | Method of manufacturing power semiconductors with pressed contacts |
US4156963A (en) | 1976-12-28 | 1979-06-05 | Tokyo Shibaura Electric Co., Ltd. | Method for manufacturing a semiconductor device |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2431506C3 (de) * | 1974-07-01 | 1979-06-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen eines Thyristors |
GB2095904B (en) * | 1981-03-23 | 1985-11-27 | Gen Electric | Semiconductor device with built-up low resistance contact and laterally conducting second contact |
JPS5871633A (ja) * | 1981-10-23 | 1983-04-28 | Toshiba Corp | 圧接型半導体装置 |
DE3232837A1 (de) * | 1982-09-03 | 1984-03-08 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen einer 2-ebenen-metallisierung fuer halbleiterbauelemente, insbesondere fuer leistungshalbleiterbauelemente wie thyristoren |
JPS60132366A (ja) * | 1983-12-21 | 1985-07-15 | Toshiba Corp | 半導体装置 |
DE3667362D1 (de) * | 1985-10-15 | 1990-01-11 | Siemens Ag | Leistungsthyristor. |
DE3840226A1 (de) * | 1988-11-29 | 1990-05-31 | Siemens Ag | Verfahren zur herstellung von selbstjustierten metallisierungen fuer fet |
DE19640242C2 (de) * | 1996-09-30 | 2002-01-10 | Infineon Technologies Ag | Kathodenanordnung für GTO-Thyristor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3525910A (en) * | 1968-05-31 | 1970-08-25 | Westinghouse Electric Corp | Contact system for intricate geometry devices |
-
1973
- 1973-12-12 FR FR7344329A patent/FR2254879B1/fr not_active Expired
-
1974
- 1974-11-20 BE BE150718A patent/BE822433A/xx unknown
- 1974-12-06 IT IT3024274A patent/IT1030873B/it active
- 1974-12-06 GB GB5293774A patent/GB1488860A/en not_active Expired
- 1974-12-10 DE DE2458410A patent/DE2458410C2/de not_active Expired
- 1974-12-12 NL NL7416194A patent/NL7416194A/xx not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4156963A (en) | 1976-12-28 | 1979-06-05 | Tokyo Shibaura Electric Co., Ltd. | Method for manufacturing a semiconductor device |
US4155155A (en) | 1977-01-19 | 1979-05-22 | Alsthom-Atlantique | Method of manufacturing power semiconductors with pressed contacts |
Also Published As
Publication number | Publication date |
---|---|
BE822433A (fr) | 1975-05-20 |
NL7416194A (nl) | 1975-06-16 |
IT1030873B (it) | 1979-04-10 |
DE2458410A1 (de) | 1975-06-19 |
FR2254879A1 (enrdf_load_stackoverflow) | 1975-07-11 |
FR2254879B1 (enrdf_load_stackoverflow) | 1977-09-23 |
DE2458410C2 (de) | 1983-07-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB1144328A (en) | Solid-state circuit consisting of a semiconductor body with active components, passive components, and conducting paths | |
EP0272453A3 (en) | Merged bipolar/cmos technology using electrically active trench | |
GB1488860A (en) | Method of manufacturing a semiconductor device having pressed contacts | |
JPH01123476A (ja) | 半導体装置およびその製法 | |
US3595714A (en) | Method of manufacturing a semiconductor device comprising a field-effect transistor | |
GB1483099A (en) | Production of semiconductor devices with an integral heatsink | |
JPS5762562A (en) | Semiconductor device | |
GB1336301A (en) | Capacitor structure | |
US3370204A (en) | Composite insulator-semiconductor wafer | |
GB1282616A (en) | Semiconductor devices | |
US3482152A (en) | Semiconductor devices having a field effect transistor structure | |
GB1412904A (en) | Juncttion gated field effect transistors | |
JP3665453B2 (ja) | Gtoサイリスタのための陰極装置 | |
GB1416650A (en) | Method of depositing electrode leads | |
GB1260544A (en) | Method for manufacturing semiconductor device | |
JPS5764927A (en) | Manufacture of semiconductor device | |
GB1249812A (en) | Improvements relating to semiconductor devices | |
FR2080639B1 (enrdf_load_stackoverflow) | ||
JPS6421965A (en) | Mos transistor | |
JPS61203567U (enrdf_load_stackoverflow) | ||
JPS6415964A (en) | Manufacture of semiconductor integrated circuit device | |
JPH027472A (ja) | 半導体装置 | |
GB1267044A (enrdf_load_stackoverflow) | ||
JPS627161A (ja) | 半導体装置 | |
JPH04242975A (ja) | 半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 19941205 |