GB1477871A - Method and apparatus for making a pattern by electron beam alignment on a semiconductor member - Google Patents

Method and apparatus for making a pattern by electron beam alignment on a semiconductor member

Info

Publication number
GB1477871A
GB1477871A GB2665774A GB2665774A GB1477871A GB 1477871 A GB1477871 A GB 1477871A GB 2665774 A GB2665774 A GB 2665774A GB 2665774 A GB2665774 A GB 2665774A GB 1477871 A GB1477871 A GB 1477871A
Authority
GB
United Kingdom
Prior art keywords
alignment
electron beam
detection areas
cathodo
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2665774A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of GB1477871A publication Critical patent/GB1477871A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
GB2665774A 1973-06-19 1974-06-17 Method and apparatus for making a pattern by electron beam alignment on a semiconductor member Expired GB1477871A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US37144773A 1973-06-19 1973-06-19
US00402250A US3840749A (en) 1973-06-19 1973-10-01 Method and apparatus for electron beam alignment with a semiconductor member

Publications (1)

Publication Number Publication Date
GB1477871A true GB1477871A (en) 1977-06-29

Family

ID=27005390

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2665774A Expired GB1477871A (en) 1973-06-19 1974-06-17 Method and apparatus for making a pattern by electron beam alignment on a semiconductor member

Country Status (6)

Country Link
US (1) US3840749A (enrdf_load_stackoverflow)
JP (1) JPS583372B2 (enrdf_load_stackoverflow)
CA (1) CA1005176A (enrdf_load_stackoverflow)
DE (1) DE2428303A1 (enrdf_load_stackoverflow)
FR (1) FR2234659B1 (enrdf_load_stackoverflow)
GB (1) GB1477871A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3895234A (en) * 1973-06-15 1975-07-15 Westinghouse Electric Corp Method and apparatus for electron beam alignment with a member
US4008402A (en) * 1974-07-18 1977-02-15 Westinghouse Electric Corporation Method and apparatus for electron beam alignment with a member by detecting X-rays
JPS6041360B2 (ja) * 1977-05-18 1985-09-17 株式会社東芝 カ−ソル表示方式
US4310743A (en) * 1979-09-24 1982-01-12 Hughes Aircraft Company Ion beam lithography process and apparatus using step-and-repeat exposure
JPS57119380U (enrdf_load_stackoverflow) * 1981-01-19 1982-07-24
GB2109538A (en) * 1981-11-02 1983-06-02 Philips Electronic Associated Electron beam alignment
US4968894A (en) * 1989-06-29 1990-11-06 Texas Instruments Incorporated Electrical field enhanced electron image projector
US6061606A (en) 1998-08-25 2000-05-09 International Business Machines Corporation Geometric phase analysis for mask alignment
US6476401B1 (en) * 1999-09-16 2002-11-05 Applied Materials, Inc. Moving photocathode with continuous regeneration for image conversion in electron beam lithography
FR2943456A1 (fr) * 2009-03-19 2010-09-24 Centre Nat Rech Scient Procede de lithographie electronique a imagerie de cathodoluminescence.
JP7007152B2 (ja) * 2017-10-19 2022-01-24 株式会社アドバンテスト 三次元積層造形装置および積層造形方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1614635A1 (de) * 1967-10-23 1970-03-26 Siemens Ag Verfahren zum Herstellen von Fotolackmasken fuer Halbleiterzwecke
US3710101A (en) * 1970-10-06 1973-01-09 Westinghouse Electric Corp Apparatus and method for alignment of members to electron beams

Also Published As

Publication number Publication date
DE2428303A1 (de) 1975-03-27
CA1005176A (en) 1977-02-08
US3840749A (en) 1974-10-08
FR2234659A1 (enrdf_load_stackoverflow) 1975-01-17
JPS583372B2 (ja) 1983-01-21
FR2234659B1 (enrdf_load_stackoverflow) 1978-10-20
JPS5037096A (enrdf_load_stackoverflow) 1975-04-07

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee