GB1444000A - Schottky barrier contacts and methods of making same - Google Patents

Schottky barrier contacts and methods of making same

Info

Publication number
GB1444000A
GB1444000A GB5980973A GB5980973A GB1444000A GB 1444000 A GB1444000 A GB 1444000A GB 5980973 A GB5980973 A GB 5980973A GB 5980973 A GB5980973 A GB 5980973A GB 1444000 A GB1444000 A GB 1444000A
Authority
GB
United Kingdom
Prior art keywords
platinum
substrate
methods
schottky barrier
making same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5980973A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1444000A publication Critical patent/GB1444000A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/60—Schottky-barrier diodes 
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
GB5980973A 1972-12-26 1973-12-27 Schottky barrier contacts and methods of making same Expired GB1444000A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31839472A 1972-12-26 1972-12-26

Publications (1)

Publication Number Publication Date
GB1444000A true GB1444000A (en) 1976-07-28

Family

ID=23238005

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5980973A Expired GB1444000A (en) 1972-12-26 1973-12-27 Schottky barrier contacts and methods of making same

Country Status (6)

Country Link
JP (1) JPS5714029B2 (enrdf_load_stackoverflow)
DE (1) DE2363061A1 (enrdf_load_stackoverflow)
FR (1) FR2211756A1 (enrdf_load_stackoverflow)
GB (1) GB1444000A (enrdf_load_stackoverflow)
IT (1) IT1002232B (enrdf_load_stackoverflow)
NL (1) NL7317158A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2137412A (en) * 1983-03-15 1984-10-03 Standard Telephones Cables Ltd Semiconductor device
GB2265636A (en) * 1989-09-21 1993-10-06 Int Rectifier Corp Platinum diffusion process

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4206540A (en) * 1978-06-02 1980-06-10 International Rectifier Corporation Schottky device and method of manufacture using palladium and platinum intermetallic alloys and titanium barrier
JPS5638869A (en) * 1979-09-07 1981-04-14 Seiko Epson Corp Manufacture of mos-type semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2137412A (en) * 1983-03-15 1984-10-03 Standard Telephones Cables Ltd Semiconductor device
GB2265636A (en) * 1989-09-21 1993-10-06 Int Rectifier Corp Platinum diffusion process
GB2265636B (en) * 1989-09-21 1994-05-18 Int Rectifier Corp Platinum diffusion process

Also Published As

Publication number Publication date
FR2211756A1 (enrdf_load_stackoverflow) 1974-07-19
NL7317158A (enrdf_load_stackoverflow) 1974-06-28
IT1002232B (it) 1976-05-20
JPS4998179A (enrdf_load_stackoverflow) 1974-09-17
DE2363061A1 (de) 1974-07-04
JPS5714029B2 (enrdf_load_stackoverflow) 1982-03-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee