JPS4998179A - - Google Patents
Info
- Publication number
- JPS4998179A JPS4998179A JP48143687A JP14368773A JPS4998179A JP S4998179 A JPS4998179 A JP S4998179A JP 48143687 A JP48143687 A JP 48143687A JP 14368773 A JP14368773 A JP 14368773A JP S4998179 A JPS4998179 A JP S4998179A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
- H10D8/60—Schottky-barrier diodes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31839472A | 1972-12-26 | 1972-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4998179A true JPS4998179A (enrdf_load_stackoverflow) | 1974-09-17 |
| JPS5714029B2 JPS5714029B2 (enrdf_load_stackoverflow) | 1982-03-20 |
Family
ID=23238005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14368773A Expired JPS5714029B2 (enrdf_load_stackoverflow) | 1972-12-26 | 1973-12-24 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5714029B2 (enrdf_load_stackoverflow) |
| DE (1) | DE2363061A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2211756A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1444000A (enrdf_load_stackoverflow) |
| IT (1) | IT1002232B (enrdf_load_stackoverflow) |
| NL (1) | NL7317158A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5638869A (en) * | 1979-09-07 | 1981-04-14 | Seiko Epson Corp | Manufacture of mos-type semiconductor device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4206540A (en) * | 1978-06-02 | 1980-06-10 | International Rectifier Corporation | Schottky device and method of manufacture using palladium and platinum intermetallic alloys and titanium barrier |
| GB2137412B (en) * | 1983-03-15 | 1987-03-04 | Standard Telephones Cables Ltd | Semiconductor device |
| GB2265636B (en) * | 1989-09-21 | 1994-05-18 | Int Rectifier Corp | Platinum diffusion process |
-
1973
- 1973-12-10 IT IT32079/73A patent/IT1002232B/it active
- 1973-12-14 NL NL7317158A patent/NL7317158A/xx unknown
- 1973-12-19 DE DE2363061A patent/DE2363061A1/de active Pending
- 1973-12-24 JP JP14368773A patent/JPS5714029B2/ja not_active Expired
- 1973-12-26 FR FR7346209A patent/FR2211756A1/fr not_active Withdrawn
- 1973-12-27 GB GB5980973A patent/GB1444000A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5638869A (en) * | 1979-09-07 | 1981-04-14 | Seiko Epson Corp | Manufacture of mos-type semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2211756A1 (enrdf_load_stackoverflow) | 1974-07-19 |
| NL7317158A (enrdf_load_stackoverflow) | 1974-06-28 |
| IT1002232B (it) | 1976-05-20 |
| GB1444000A (en) | 1976-07-28 |
| DE2363061A1 (de) | 1974-07-04 |
| JPS5714029B2 (enrdf_load_stackoverflow) | 1982-03-20 |