GB2265636B - Platinum diffusion process - Google Patents

Platinum diffusion process

Info

Publication number
GB2265636B
GB2265636B GB9309619A GB9309619A GB2265636B GB 2265636 B GB2265636 B GB 2265636B GB 9309619 A GB9309619 A GB 9309619A GB 9309619 A GB9309619 A GB 9309619A GB 2265636 B GB2265636 B GB 2265636B
Authority
GB
United Kingdom
Prior art keywords
diffusion process
platinum diffusion
platinum
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9309619A
Other versions
GB9309619D0 (en
GB2265636A (en
Inventor
Herbert J Gould
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies Americas Corp
Original Assignee
International Rectifier Corp USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/410,323 external-priority patent/US4925812A/en
Application filed by International Rectifier Corp USA filed Critical International Rectifier Corp USA
Publication of GB9309619D0 publication Critical patent/GB9309619D0/en
Publication of GB2265636A publication Critical patent/GB2265636A/en
Application granted granted Critical
Publication of GB2265636B publication Critical patent/GB2265636B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/221—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities of killers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
GB9309619A 1989-09-21 1993-05-10 Platinum diffusion process Expired - Fee Related GB2265636B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/410,323 US4925812A (en) 1989-09-21 1989-09-21 Platinum diffusion process
GB9018319A GB2236119B (en) 1989-09-21 1990-08-21 Platinum diffusion process

Publications (3)

Publication Number Publication Date
GB9309619D0 GB9309619D0 (en) 1993-06-23
GB2265636A GB2265636A (en) 1993-10-06
GB2265636B true GB2265636B (en) 1994-05-18

Family

ID=26297539

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9309619A Expired - Fee Related GB2265636B (en) 1989-09-21 1993-05-10 Platinum diffusion process

Country Status (1)

Country Link
GB (1) GB2265636B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3963523A (en) * 1973-04-26 1976-06-15 Matsushita Electronics Corporation Method of manufacturing semiconductor devices
GB1444000A (en) * 1972-12-26 1976-07-28 Gen Electric Schottky barrier contacts and methods of making same
GB2022318A (en) * 1978-06-02 1979-12-12 Int Rectifier Corp Schottky device and method of manufacture
GB2127223A (en) * 1982-09-14 1984-04-04 Messerschmitt Boelkow Blohm Infra-red light detector

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1444000A (en) * 1972-12-26 1976-07-28 Gen Electric Schottky barrier contacts and methods of making same
US3963523A (en) * 1973-04-26 1976-06-15 Matsushita Electronics Corporation Method of manufacturing semiconductor devices
GB2022318A (en) * 1978-06-02 1979-12-12 Int Rectifier Corp Schottky device and method of manufacture
GB2127223A (en) * 1982-09-14 1984-04-04 Messerschmitt Boelkow Blohm Infra-red light detector

Also Published As

Publication number Publication date
GB9309619D0 (en) 1993-06-23
GB2265636A (en) 1993-10-06

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950821