GB1433944A - Method and apparatus for producing electron emission from a field emission cathode - Google Patents

Method and apparatus for producing electron emission from a field emission cathode

Info

Publication number
GB1433944A
GB1433944A GB3818173A GB3818173A GB1433944A GB 1433944 A GB1433944 A GB 1433944A GB 3818173 A GB3818173 A GB 3818173A GB 3818173 A GB3818173 A GB 3818173A GB 1433944 A GB1433944 A GB 1433944A
Authority
GB
United Kingdom
Prior art keywords
emission
cathode
tip
chosen
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3818173A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Publication of GB1433944A publication Critical patent/GB1433944A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1433944 Cathode constructions; electron microscopes TEKTRONIX Inc 13 Aug 1973 [17 Aug 1972] 38181/73 Heading H1D Stable and continuous electron emission from a chosen crystallographic plane of a field emission cathode-as shown, the (100) plane-is produced by the steps of heating the cathode to a temperature slightly less than the temperature at which substantial thermionic emission occurs, and producing an electrostatic field gradient at the emitter tip sufficient to alter the shape of the tip, as shown, such that emission is switched from a plurality of faces with different axes, Fig. 3 a and b to the chosen plane, Fig. 3 c. The tip radius is of order 1000 to 3000 Šngstr÷ms, and the vacuum need be no better than 10<SP>-6</SP> torr. The tip is first cleared by flashing with A.C. heater current at a temperature of 2300‹ K. and is then held at about 1900‹ K. while the D.C. field is applied. For pulsed operation, the A.C. heating current and the D.C. voltage are gated such that the heating current is turned off before, but turned on after, the D.C. voltage. The use of the (100) and (310) planes of tungsten and molybdenum as the chosen planes, and use in a scanning electron microscope, are referred to.
GB3818173A 1972-08-17 1973-08-13 Method and apparatus for producing electron emission from a field emission cathode Expired GB1433944A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Publications (1)

Publication Number Publication Date
GB1433944A true GB1433944A (en) 1976-04-28

Family

ID=23077025

Family Applications (2)

Application Number Title Priority Date Filing Date
GB3159874A Expired GB1433945A (en) 1972-08-17 1973-08-13 Electronbeam tubes for scanning electron microscopes
GB3818173A Expired GB1433944A (en) 1972-08-17 1973-08-13 Method and apparatus for producing electron emission from a field emission cathode

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB3159874A Expired GB1433945A (en) 1972-08-17 1973-08-13 Electronbeam tubes for scanning electron microscopes

Country Status (7)

Country Link
US (1) US3809899A (en)
JP (3) JPS557661B2 (en)
CA (1) CA1031080A (en)
DE (2) DE2341377A1 (en)
FR (2) FR2199613B1 (en)
GB (2) GB1433945A (en)
NL (2) NL7311344A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066705A1 (en) * 1981-05-26 1982-12-15 International Business Machines Corporation Single crystal lanthanum hexaboride cathode suitable for thermionic emission of a shaped electron beam with uniform intensity distribution

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514266C2 (en) * 1975-03-27 1977-04-28 Siemens Ag CORPUSCULAR BEAM-OPTICAL DEVICE WITH TWO SUCCESSIVE SUBSPACES OF DIFFERENT PRESSURES IN THE BEAM DIRECTION
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
DE3039283A1 (en) * 1979-10-19 1981-05-14 Hitachi, Ltd., Tokyo FIELD EMISSION CATHODE AND METHOD FOR THEIR PRODUCTION
DE3570012D1 (en) * 1985-01-29 1989-06-08 Ibm Field-emission scanning auger electron microscope
DE69132441T2 (en) * 1990-06-20 2001-06-07 Hitachi, Ltd. Charge beam device
DE69125229T2 (en) * 1990-08-10 1997-08-28 Koninkl Philips Electronics Nv Charge particle beam arrangement
JP3148353B2 (en) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション Electron beam inspection method and system
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
JP2969091B2 (en) * 1997-01-20 1999-11-02 株式会社日立製作所 Electron beam inspection equipment
JP2951609B2 (en) * 1997-01-20 1999-09-20 株式会社日立製作所 Electron beam inspection equipment
JP2951610B2 (en) * 1997-01-20 1999-09-20 株式会社日立製作所 Defect inspection method
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE438468A (en) * 1939-05-08
NL112758C (en) * 1942-10-28
NL102095C (en) * 1955-07-01
NL289910A (en) * 1962-03-08
US3174026A (en) * 1962-06-20 1965-03-16 Budd Co Method and means of circumventing cathode maintenance in electron beam devices
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS5852244B2 (en) * 1977-05-04 1983-11-21 松下電器産業株式会社 Motor rotation speed adjustment device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066705A1 (en) * 1981-05-26 1982-12-15 International Business Machines Corporation Single crystal lanthanum hexaboride cathode suitable for thermionic emission of a shaped electron beam with uniform intensity distribution
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution

Also Published As

Publication number Publication date
DE2341377A1 (en) 1974-03-07
JPS49132975A (en) 1974-12-20
FR2214962B1 (en) 1978-07-07
JPS557661B2 (en) 1980-02-27
DE2366144C2 (en) 1982-12-30
FR2199613B1 (en) 1977-02-25
CA1031080A (en) 1978-05-09
FR2214962A1 (en) 1974-08-19
JPS54161263A (en) 1979-12-20
GB1433945A (en) 1976-04-28
JPS5661960U (en) 1981-05-26
NL7908479A (en) 1980-03-31
NL7311344A (en) 1974-02-19
US3809899A (en) 1974-05-07
FR2199613A1 (en) 1974-04-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee