GB1445695A - Method for reproducibly fabricating and using stable thermal-field emission cathodes - Google Patents
Method for reproducibly fabricating and using stable thermal-field emission cathodesInfo
- Publication number
- GB1445695A GB1445695A GB4508173A GB4508173A GB1445695A GB 1445695 A GB1445695 A GB 1445695A GB 4508173 A GB4508173 A GB 4508173A GB 4508173 A GB4508173 A GB 4508173A GB 1445695 A GB1445695 A GB 1445695A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- wire
- build
- tip
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 239000010406 cathode material Substances 0.000 abstract 1
- 239000000356 contaminant Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electron Sources, Ion Sources (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
1445695 Cathode materials and processing LINFIELD RESEARCH INSTITUTE 26 Sept 1973 [29 Sept 1972] 45081/73 Heading HID A method of forming a heated field emission cathode from a metal wire having a body centred cubic crystalline structure with the (100) plane parallel with the wire axis, comprises a conical tip on the end of the wire; heating the tip in a partial vacuum containing O 2 to desorb surface contaminants including carbon but not surface oxides of the wire; heating to another temperature to ensure surface mobility at the tip but not to remove surface oxides; and applying a potential to initiate build up of the (100) plane and faceting of the (110) and (112) planes thereby forming an axially disposed tetrahedral endform. The pointed wire is attached to a W hairpin heater and mounted in a scanning electron microscope which is then evacuated to 10<SP>-8</SP> torr. The cathode is heated to 1700-1900K using pulsed D.C. or A.C. to outgas impurities particularly C which diffuses to the surface and is oxidized. O 2 is introduced into the tube if necessary. With the cathode at 1400-1800K to ensure surface mobility a field is applied. Build up of the (100) plane occurs and the current sharply increases. The current is limited to prevent arcing. The process is continued until a stable state is reached. If the cathode deteriorates, indicated by a lower quality image, it can be restored by removing the field and reapplying it with the cathode at 1600-1700K causing build up and increased current. The method above is used until the stable state is achieved. The wire may be of W, Mo or Ta. The cathode may be used in electron microprobes, integrated circuit mask fabrication and electron beam access memory devices.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00293322A US3817592A (en) | 1972-09-29 | 1972-09-29 | Method for reproducibly fabricating and using stable thermal-field emission cathodes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1445695A true GB1445695A (en) | 1976-08-11 |
Family
ID=23128615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4508173A Expired GB1445695A (en) | 1972-09-29 | 1973-09-26 | Method for reproducibly fabricating and using stable thermal-field emission cathodes |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3817592A (en) |
| JP (1) | JPS585496B2 (en) |
| CA (1) | CA1014602A (en) |
| DE (1) | DE2345096A1 (en) |
| FR (1) | FR2201533B1 (en) |
| GB (1) | GB1445695A (en) |
| NL (1) | NL7313420A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4899078A (en) * | 1987-04-24 | 1990-02-06 | Balzers Aktiengesellschaft | Thermionic hairpin cathode |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3947716A (en) * | 1973-08-27 | 1976-03-30 | The United States Of America As Represented By The Secretary Of The Army | Field emission tip and process for making same |
| JPS5062766A (en) * | 1973-10-05 | 1975-05-28 | ||
| US3919580A (en) * | 1974-09-11 | 1975-11-11 | Us Energy | Relativistic electron beam generator |
| US4324999A (en) * | 1980-04-30 | 1982-04-13 | Burroughs Corporation | Electron-beam cathode having a uniform emission pattern |
| US4486684A (en) * | 1981-05-26 | 1984-12-04 | International Business Machines Corporation | Single crystal lanthanum hexaboride electron beam emitter having high brightness |
| US4588928A (en) * | 1983-06-15 | 1986-05-13 | At&T Bell Laboratories | Electron emission system |
| JPS60225345A (en) * | 1984-04-20 | 1985-11-09 | Hitachi Ltd | Power supply for electric field emitting cathode |
| US5012194A (en) * | 1989-09-05 | 1991-04-30 | Raytheon Company | Method testing electron discharge tubes |
| US5459296A (en) * | 1990-12-15 | 1995-10-17 | Sidmar N.V. | Method for the low-maintenance operation of an apparatus for producing a surface structure, and apparatus |
| FR2707795B1 (en) * | 1993-07-12 | 1995-08-11 | Commissariat Energie Atomique | Improvement to a manufacturing process of a microtip electron source. |
| FR2750785B1 (en) * | 1996-07-02 | 1998-11-06 | Pixtech Sa | METHOD FOR REGENERATING MICROPOINTS OF A FLAT VISUALIZATION SCREEN |
| JP2807668B2 (en) * | 1997-03-27 | 1998-10-08 | 株式会社日立製作所 | Electron beam defect inspection method and apparatus |
| US9159527B2 (en) * | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
| JP2006059513A (en) * | 2004-07-22 | 2006-03-02 | Kuresutetsuku:Kk | Electron beam irradiation device and drawing device |
| US7888654B2 (en) * | 2007-01-24 | 2011-02-15 | Fei Company | Cold field emitter |
| US8736170B1 (en) | 2011-02-22 | 2014-05-27 | Fei Company | Stable cold field emission electron source |
| CN102629538B (en) | 2012-04-13 | 2014-03-19 | 吴江炀晟阴极材料有限公司 | Electrode material with low work function and high chemical stability |
| US9697983B1 (en) * | 2016-02-29 | 2017-07-04 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device |
| US11887805B2 (en) | 2021-09-30 | 2024-01-30 | Fei Company | Filament-less electron source |
| WO2024018570A1 (en) * | 2022-07-20 | 2024-01-25 | 株式会社日立ハイテク | Charged particle source, charged particle gun, and charged particle beam device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3374386A (en) * | 1964-11-02 | 1968-03-19 | Field Emission Corp | Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder |
| US3356887A (en) * | 1965-07-30 | 1967-12-05 | Frederick C W Heil | Fe cathode redesign |
-
1972
- 1972-09-29 US US00293322A patent/US3817592A/en not_active Expired - Lifetime
-
1973
- 1973-08-21 CA CA179,326A patent/CA1014602A/en not_active Expired
- 1973-08-21 FR FR7330310A patent/FR2201533B1/fr not_active Expired
- 1973-08-25 JP JP48095639A patent/JPS585496B2/en not_active Expired
- 1973-09-06 DE DE19732345096 patent/DE2345096A1/en active Pending
- 1973-09-26 GB GB4508173A patent/GB1445695A/en not_active Expired
- 1973-09-28 NL NL7313420A patent/NL7313420A/xx not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4899078A (en) * | 1987-04-24 | 1990-02-06 | Balzers Aktiengesellschaft | Thermionic hairpin cathode |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4973967A (en) | 1974-07-17 |
| NL7313420A (en) | 1974-04-02 |
| US3817592A (en) | 1974-06-18 |
| JPS585496B2 (en) | 1983-01-31 |
| FR2201533B1 (en) | 1977-05-13 |
| DE2345096A1 (en) | 1974-04-04 |
| CA1014602A (en) | 1977-07-26 |
| FR2201533A1 (en) | 1974-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB1445695A (en) | Method for reproducibly fabricating and using stable thermal-field emission cathodes | |
| US5666025A (en) | Flat-panel display containing structure for enhancing electron emission from carbon-containing cathode | |
| JP2873930B2 (en) | Carbonaceous solid structure having carbon nanotubes, electron emitter for electron beam source element composed of carbonaceous solid structure, and method of manufacturing carbonaceous solid structure | |
| JP5301168B2 (en) | Cold field emitter | |
| US3678325A (en) | High-field emission cathodes and methods for preparing the cathodes | |
| US3711908A (en) | Method for forming small diameter tips on sintered material cathodes | |
| US3786268A (en) | Electron gun device of field emission type | |
| GB1433944A (en) | Method and apparatus for producing electron emission from a field emission cathode | |
| GB1357198A (en) | Method and devices for shaping resharpening or cleaning tips | |
| EP0813221B1 (en) | Method of making a needle electrode | |
| JP3454384B2 (en) | Ion beam generator and method | |
| US3887835A (en) | Field emission electron gun | |
| JP2535564B2 (en) | Plasma processing equipment | |
| JPS6318297B2 (en) | ||
| JP3188952B2 (en) | Recovery method of carbon nanotube | |
| Mackie et al. | Preparation and characterization of zirconium carbide field emitters | |
| JPH03274642A (en) | High luminance la b6 cathode | |
| US1861637A (en) | Production of alkali metal tubes | |
| GB1384243A (en) | Electron guns | |
| JP3164651B2 (en) | How to operate the thermal field emission cathode | |
| JPH06140196A (en) | Pulse drawing type electron cyclotron resonance ion source | |
| JPS59130056A (en) | Proton beam illuminating source | |
| JPS63205033A (en) | Manufacture of liquid metal ion source | |
| JPS63216251A (en) | Gas phase ion source | |
| SE8402168L (en) | SET FOR HEATING UP |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |