CA1014602A - Method for reproducibly fabricating and using stable thermal-field emission cathodes - Google Patents

Method for reproducibly fabricating and using stable thermal-field emission cathodes

Info

Publication number
CA1014602A
CA1014602A CA179,326A CA179326A CA1014602A CA 1014602 A CA1014602 A CA 1014602A CA 179326 A CA179326 A CA 179326A CA 1014602 A CA1014602 A CA 1014602A
Authority
CA
Canada
Prior art keywords
field emission
stable thermal
emission cathodes
reproducibly
fabricating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA179,326A
Other versions
CA179326S (en
Inventor
Lynwood W. Swanson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linfield Research Institute
Original Assignee
Linfield Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Linfield Research Institute filed Critical Linfield Research Institute
Application granted granted Critical
Publication of CA1014602A publication Critical patent/CA1014602A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
CA179,326A 1972-09-29 1973-08-21 Method for reproducibly fabricating and using stable thermal-field emission cathodes Expired CA1014602A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00293322A US3817592A (en) 1972-09-29 1972-09-29 Method for reproducibly fabricating and using stable thermal-field emission cathodes

Publications (1)

Publication Number Publication Date
CA1014602A true CA1014602A (en) 1977-07-26

Family

ID=23128615

Family Applications (1)

Application Number Title Priority Date Filing Date
CA179,326A Expired CA1014602A (en) 1972-09-29 1973-08-21 Method for reproducibly fabricating and using stable thermal-field emission cathodes

Country Status (7)

Country Link
US (1) US3817592A (en)
JP (1) JPS585496B2 (en)
CA (1) CA1014602A (en)
DE (1) DE2345096A1 (en)
FR (1) FR2201533B1 (en)
GB (1) GB1445695A (en)
NL (1) NL7313420A (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947716A (en) * 1973-08-27 1976-03-30 The United States Of America As Represented By The Secretary Of The Army Field emission tip and process for making same
JPS5062766A (en) * 1973-10-05 1975-05-28
US3919580A (en) * 1974-09-11 1975-11-11 Us Energy Relativistic electron beam generator
US4324999A (en) * 1980-04-30 1982-04-13 Burroughs Corporation Electron-beam cathode having a uniform emission pattern
US4486684A (en) * 1981-05-26 1984-12-04 International Business Machines Corporation Single crystal lanthanum hexaboride electron beam emitter having high brightness
US4588928A (en) * 1983-06-15 1986-05-13 At&T Bell Laboratories Electron emission system
JPS60225345A (en) * 1984-04-20 1985-11-09 Hitachi Ltd Power supply for electric field emitting cathode
EP0287774A3 (en) * 1987-04-24 1990-03-07 Balzers Aktiengesellschaft Thermionic hair-needle cathode
US5012194A (en) * 1989-09-05 1991-04-30 Raytheon Company Method testing electron discharge tubes
DE4040201C2 (en) * 1990-12-15 1994-11-24 Hell Ag Linotype Method for low-maintenance operation of a device for producing a surface structure and device for carrying out the method
FR2707795B1 (en) * 1993-07-12 1995-08-11 Commissariat Energie Atomique Improvement to a manufacturing process of a microtip electron source.
FR2750785B1 (en) * 1996-07-02 1998-11-06 Pixtech Sa METHOD FOR REGENERATING MICROPOINTS OF A FLAT VISUALIZATION SCREEN
JP2807668B2 (en) * 1997-03-27 1998-10-08 株式会社日立製作所 Electron beam defect inspection method and apparatus
US9159527B2 (en) * 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
JP2006059513A (en) * 2004-07-22 2006-03-02 Kuresutetsuku:Kk Electron beam irradiation device and drawing device
US7888654B2 (en) * 2007-01-24 2011-02-15 Fei Company Cold field emitter
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source
CN102629538B (en) 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 Electrode material with low work function and high chemical stability
US9697983B1 (en) * 2016-02-29 2017-07-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
US11887805B2 (en) 2021-09-30 2024-01-30 Fei Company Filament-less electron source
WO2024018570A1 (en) * 2022-07-20 2024-01-25 株式会社日立ハイテク Charged particle source, charged particle gun, and charged particle beam device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3356887A (en) * 1965-07-30 1967-12-05 Frederick C W Heil Fe cathode redesign

Also Published As

Publication number Publication date
US3817592A (en) 1974-06-18
JPS585496B2 (en) 1983-01-31
FR2201533A1 (en) 1974-04-26
JPS4973967A (en) 1974-07-17
GB1445695A (en) 1976-08-11
DE2345096A1 (en) 1974-04-04
NL7313420A (en) 1974-04-02
FR2201533B1 (en) 1977-05-13

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