GB1433945A - Electronbeam tubes for scanning electron microscopes - Google Patents

Electronbeam tubes for scanning electron microscopes

Info

Publication number
GB1433945A
GB1433945A GB3159874A GB3159874A GB1433945A GB 1433945 A GB1433945 A GB 1433945A GB 3159874 A GB3159874 A GB 3159874A GB 3159874 A GB3159874 A GB 3159874A GB 1433945 A GB1433945 A GB 1433945A
Authority
GB
United Kingdom
Prior art keywords
chamber
chambers
punch
diaphragm
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3159874A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Publication of GB1433945A publication Critical patent/GB1433945A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1433945 Electron microscopes TEKTRONIX Inc 13 Aug 1973 [17 Aug 1972] 31598/74 Divided out of 1433944 Heading H1D An electron beam tube includes separable first and second chambers, and puncturing means for penetrating a diaphragm at a mounting end of one of the chambers, to provideafter the chambers have been joined togetheran aperture for gas and electron flow therebetween; the arrangement facilitates cathode replacement. As described, a scanning electron microscope includes a gun chamber 12 communicating with a specimen chamber 24 via an aperture 28 which permits passage therethrough of an electron beam from the field emission cathode 10, and the maintenance of a pressure difference between the two chambers. To assemble the tube, a pre-evacuated gun chamber 12 with an integral ion pump mounted therein is secured by a flange 30, Fig. 2, and clamp 46 to a flange 44 of the specimen chamber, whereafter the metal sealing diaphragm 32 is punctured by movement of the cam 50 axially to a position beneath the hollow punch 36, with subsequent rotation to force the punch against the diaphragm (Fig. 3, not shown). In an alternative arrangement (Fig. 4, not shown) the punch is forced upwards by the tightening of an external screw collar which abuts against a split ring (38) on the outside of one chamber and engages with a screw thread on the outside of the other chamber. After puncture, the punch remains in place and the electron beam passes through its central passage. The gun chamber may be of glass, metal, or ceramic.
GB3159874A 1972-08-17 1973-08-13 Electronbeam tubes for scanning electron microscopes Expired GB1433945A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Publications (1)

Publication Number Publication Date
GB1433945A true GB1433945A (en) 1976-04-28

Family

ID=23077025

Family Applications (2)

Application Number Title Priority Date Filing Date
GB3818173A Expired GB1433944A (en) 1972-08-17 1973-08-13 Method and apparatus for producing electron emission from a field emission cathode
GB3159874A Expired GB1433945A (en) 1972-08-17 1973-08-13 Electronbeam tubes for scanning electron microscopes

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB3818173A Expired GB1433944A (en) 1972-08-17 1973-08-13 Method and apparatus for producing electron emission from a field emission cathode

Country Status (7)

Country Link
US (1) US3809899A (en)
JP (3) JPS557661B2 (en)
CA (1) CA1031080A (en)
DE (2) DE2366144C2 (en)
FR (2) FR2199613B1 (en)
GB (2) GB1433944A (en)
NL (2) NL7311344A (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514266C2 (en) * 1975-03-27 1977-04-28 Siemens Ag CORPUSCULAR BEAM-OPTICAL DEVICE WITH TWO SUCCESSIVE SUBSPACES OF DIFFERENT PRESSURES IN THE BEAM DIRECTION
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
DE3039283A1 (en) * 1979-10-19 1981-05-14 Hitachi, Ltd., Tokyo FIELD EMISSION CATHODE AND METHOD FOR THEIR PRODUCTION
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution
EP0189498B1 (en) * 1985-01-29 1989-05-03 International Business Machines Corporation Field-emission scanning auger electron microscope
DE69132441T2 (en) * 1990-06-20 2001-06-07 Hitachi Ltd Charge beam device
EP0689225B1 (en) * 1990-08-10 1999-12-22 Koninklijke Philips Electronics N.V. Charged particle beam device
JP3148353B2 (en) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション Electron beam inspection method and system
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
JP2969091B2 (en) * 1997-01-20 1999-11-02 株式会社日立製作所 Electron beam inspection equipment
JP2951609B2 (en) * 1997-01-20 1999-09-20 株式会社日立製作所 Electron beam inspection equipment
JP2951610B2 (en) * 1997-01-20 1999-09-20 株式会社日立製作所 Defect inspection method
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE438468A (en) * 1939-05-08
NL112758C (en) * 1942-10-28
NL102095C (en) * 1955-07-01
NL289910A (en) * 1962-03-08
US3174026A (en) * 1962-06-20 1965-03-16 Budd Co Method and means of circumventing cathode maintenance in electron beam devices
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS5852244B2 (en) * 1977-05-04 1983-11-21 松下電器産業株式会社 Motor rotation speed adjustment device

Also Published As

Publication number Publication date
JPS49132975A (en) 1974-12-20
DE2366144C2 (en) 1982-12-30
US3809899A (en) 1974-05-07
CA1031080A (en) 1978-05-09
GB1433944A (en) 1976-04-28
NL7311344A (en) 1974-02-19
JPS5661960U (en) 1981-05-26
FR2199613A1 (en) 1974-04-12
JPS54161263A (en) 1979-12-20
NL7908479A (en) 1980-03-31
FR2199613B1 (en) 1977-02-25
DE2341377A1 (en) 1974-03-07
FR2214962B1 (en) 1978-07-07
JPS557661B2 (en) 1980-02-27
FR2214962A1 (en) 1974-08-19

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee