GB1049327A - Improvements in or relating to electron microscopes - Google Patents
Improvements in or relating to electron microscopesInfo
- Publication number
- GB1049327A GB1049327A GB26756/63A GB2675663A GB1049327A GB 1049327 A GB1049327 A GB 1049327A GB 26756/63 A GB26756/63 A GB 26756/63A GB 2675663 A GB2675663 A GB 2675663A GB 1049327 A GB1049327 A GB 1049327A
- Authority
- GB
- United Kingdom
- Prior art keywords
- members
- july
- cone
- column
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 abstract 3
- 239000000428 dust Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000005294 ferromagnetic effect Effects 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
1,049,327. Electron microscopes. PHILIPS ELECTRONICS & PHARMACEUTICAL INDUSTRIES CORPORATION. July 5, 1963 [July 5, 1962], No.26756/63. Heading H1D. In an electron microscope in which the electron beam from the gun strikes the target and is then focused on to a luminous window, the conical walls of the focusing electromagnets are so shaped that they cannot be struck by fringing electrons over most of their length; each of the cylinders forming the column has a frustoconical axial bore pointed towards the gun, the apex of the cone being nearer to the cone than the pole faces of the adjacent magnetic lens. This reduces the build-up of stray charges from oil vapours, dust particles &c. on the column walls. The tubular members, forming the conical walls of the focusing magnet, may be slid into the central channel of the apparatus, spaced by non-magnetic members and secured by a locking nut. Vacuum seals may be made between the ferromagnetic members 62, 53, 81, 83 (the Figure, not shown) &c. by ring gaskets 81, and the tube evacuated from both ends through the pipe 86. Stigmator coils 41 and 42 are held in the non-magnetic member 46 adjacent the specimen. A camera may be mounted in the tube.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US207680A US3150256A (en) | 1962-07-05 | 1962-07-05 | Column for electron microscopes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1049327A true GB1049327A (en) | 1966-11-23 |
Family
ID=22771559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB26756/63A Expired GB1049327A (en) | 1962-07-05 | 1963-07-05 | Improvements in or relating to electron microscopes |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3150256A (en) |
| BE (1) | BE634472A (en) |
| CH (1) | CH413146A (en) |
| DE (1) | DE1464352B2 (en) |
| GB (1) | GB1049327A (en) |
| NL (1) | NL294725A (en) |
| SE (1) | SE320444B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3299308A (en) * | 1963-07-19 | 1967-01-17 | Temescal Metallurgical Corp | Electron beam traverse of narrow aperture in barrier separating regions of differentpressure |
| US3345529A (en) * | 1966-08-29 | 1967-10-03 | Ibm | Electron beam column with demountable flux-generating assembly and beam-forming elements |
| DE3328172A1 (en) * | 1983-08-04 | 1985-02-14 | Leybold-Heraeus GmbH, 5000 Köln | ELECTRON BEAM CANNON |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE904096C (en) * | 1940-10-09 | 1954-02-15 | Siemens Ag | Corpuscular beam microscope |
| DE926266C (en) * | 1948-10-02 | 1955-04-14 | Manfred Von Ardenne | Electron microscope with exchangeable pole shoe insert body transversely to the beam direction |
| DE903017C (en) * | 1951-01-31 | 1954-02-01 | Sueddeutsche Lab G M B H | Manufacture of small balls from high-fusible materials |
| CH332306A (en) * | 1955-05-10 | 1958-08-31 | Ardenne Manfred Von | Polarization charge-free screen for electron and ion devices |
-
0
- NL NL294725D patent/NL294725A/xx unknown
- BE BE634472D patent/BE634472A/xx unknown
-
1962
- 1962-07-05 US US207680A patent/US3150256A/en not_active Expired - Lifetime
-
1963
- 1963-07-02 DE DE19631464352 patent/DE1464352B2/en active Pending
- 1963-07-02 SE SE7350/63A patent/SE320444B/xx unknown
- 1963-07-03 CH CH822963A patent/CH413146A/en unknown
- 1963-07-05 GB GB26756/63A patent/GB1049327A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1464352A1 (en) | 1969-03-13 |
| NL294725A (en) | |
| US3150256A (en) | 1964-09-22 |
| CH413146A (en) | 1966-05-15 |
| DE1464352B2 (en) | 1972-04-06 |
| SE320444B (en) | 1970-02-09 |
| BE634472A (en) | 1964-01-03 |
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