GB1417801A - Integrated single crystal pressure transducer - Google Patents

Integrated single crystal pressure transducer

Info

Publication number
GB1417801A
GB1417801A GB192773A GB192773A GB1417801A GB 1417801 A GB1417801 A GB 1417801A GB 192773 A GB192773 A GB 192773A GB 192773 A GB192773 A GB 192773A GB 1417801 A GB1417801 A GB 1417801A
Authority
GB
United Kingdom
Prior art keywords
substrate
pressure transducer
monocrystalline
jan
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB192773A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elsag Bailey Inc
Original Assignee
Bailey Meter Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bailey Meter Co filed Critical Bailey Meter Co
Publication of GB1417801A publication Critical patent/GB1417801A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Abstract

1417801 Monocrystalline pressure transducer BAILEY METER CO 15 Jan 1973 [31 Jan 1972] 1927/73 Heading H1K A pressure transducer comprises a monocrystalline insulating substrate, and monocrystalline piezoresistive material epitaxially grown on the substrate in regions where its resistivity will be varied by pressure applied to the substrate. As described P type silicon is epitaxially grown to a thickness of 2 Á on a 111 face of a spinel or sapphire substrate of cube or cylindrical form and fashioned to form a pattern of piezoresistors by acid or sputter etching through a photolithographically patterned aluminium mask. After removing the mask aluminium tracks are deposited to form interconnections. A semi-conductor amplifier may be grown on or bonded to the substrate and thermistors provided for temperature compensation. Typically the resistors are formed in pairs for connection into Wheatstone or "L" bridges with one of each pair aligned to respond and the other to be insensitive to pressure, as in Fig. 1 (not shown).
GB192773A 1972-01-31 1973-01-15 Integrated single crystal pressure transducer Expired GB1417801A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22221372A 1972-01-31 1972-01-31

Publications (1)

Publication Number Publication Date
GB1417801A true GB1417801A (en) 1975-12-17

Family

ID=22831336

Family Applications (1)

Application Number Title Priority Date Filing Date
GB192773A Expired GB1417801A (en) 1972-01-31 1973-01-15 Integrated single crystal pressure transducer

Country Status (6)

Country Link
JP (1) JPS4885092A (en)
CA (1) CA977464A (en)
DE (1) DE2303706C3 (en)
FR (1) FR2169942B1 (en)
GB (1) GB1417801A (en)
IT (1) IT976525B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2934073A1 (en) * 1979-08-23 1981-07-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analogue multiple sensor on monolithic integrated chip - contains individual sensor ring oscillators with sensing resistors
GB2187888A (en) * 1986-03-10 1987-09-16 Marelli Autronica Device and method for measuring the static pressure of a fluid

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2934093C2 (en) * 1979-08-23 1984-12-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analog sensor
DE2940955A1 (en) * 1979-10-09 1981-04-23 Gosudarstvennyj naučno-issledovatel'skij institut teploenergetičeskogo priborostroenija, Moskva Semiconductor strain gauge with epitaxial p-silicon resistor - on sapphire monocrystal gives signal independent of ambient temp.
JPS57126169A (en) * 1981-01-13 1982-08-05 Gnii Teploene Semiconductor strain gauge transducer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270554A (en) * 1961-01-04 1966-09-06 Bell Telephone Labor Inc Diffused layer transducers
JPS4026990Y1 (en) * 1965-04-16 1965-09-20
DE1286222B (en) * 1965-07-17 1969-01-02 Telefunken Patent Integrated semiconductor circuit on a piezoelectric carrier
US3417322A (en) * 1966-06-29 1968-12-17 Gen Electric Simplified piezoresistive force sensing device
NL6808247A (en) * 1967-09-21 1969-03-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2934073A1 (en) * 1979-08-23 1981-07-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analogue multiple sensor on monolithic integrated chip - contains individual sensor ring oscillators with sensing resistors
GB2187888A (en) * 1986-03-10 1987-09-16 Marelli Autronica Device and method for measuring the static pressure of a fluid

Also Published As

Publication number Publication date
JPS4885092A (en) 1973-11-12
IT976525B (en) 1974-09-10
DE2303706B2 (en) 1975-01-09
FR2169942B1 (en) 1976-04-09
DE2303706C3 (en) 1975-09-04
CA977464A (en) 1975-11-04
FR2169942A1 (en) 1973-09-14
DE2303706A1 (en) 1973-08-30

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee