JPS4885092A - - Google Patents

Info

Publication number
JPS4885092A
JPS4885092A JP1164073A JP1164073A JPS4885092A JP S4885092 A JPS4885092 A JP S4885092A JP 1164073 A JP1164073 A JP 1164073A JP 1164073 A JP1164073 A JP 1164073A JP S4885092 A JPS4885092 A JP S4885092A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1164073A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4885092A publication Critical patent/JPS4885092A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP1164073A 1972-01-31 1973-01-30 Pending JPS4885092A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22221372A 1972-01-31 1972-01-31

Publications (1)

Publication Number Publication Date
JPS4885092A true JPS4885092A (en) 1973-11-12

Family

ID=22831336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1164073A Pending JPS4885092A (en) 1972-01-31 1973-01-30

Country Status (6)

Country Link
JP (1) JPS4885092A (en)
CA (1) CA977464A (en)
DE (1) DE2303706C3 (en)
FR (1) FR2169942B1 (en)
GB (1) GB1417801A (en)
IT (1) IT976525B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57126169A (en) * 1981-01-13 1982-08-05 Gnii Teploene Semiconductor strain gauge transducer

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2934073C2 (en) * 1979-08-23 1986-01-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analog multiple sensor
DE2934093C2 (en) * 1979-08-23 1984-12-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analog sensor
DE2940955A1 (en) * 1979-10-09 1981-04-23 Gosudarstvennyj naučno-issledovatel'skij institut teploenergetičeskogo priborostroenija, Moskva Semiconductor strain gauge with epitaxial p-silicon resistor - on sapphire monocrystal gives signal independent of ambient temp.
IT1203547B (en) * 1986-03-10 1989-02-15 Marelli Autronica DEVICE AND PROCEDURE FOR MEASURING THE STATIC PRESSURE OF A FLUID

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4026990Y1 (en) * 1965-04-16 1965-09-20

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270554A (en) * 1961-01-04 1966-09-06 Bell Telephone Labor Inc Diffused layer transducers
DE1286222B (en) * 1965-07-17 1969-01-02 Telefunken Patent Integrated semiconductor circuit on a piezoelectric carrier
US3417322A (en) * 1966-06-29 1968-12-17 Gen Electric Simplified piezoresistive force sensing device
NL6808247A (en) * 1967-09-21 1969-03-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4026990Y1 (en) * 1965-04-16 1965-09-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57126169A (en) * 1981-01-13 1982-08-05 Gnii Teploene Semiconductor strain gauge transducer

Also Published As

Publication number Publication date
FR2169942A1 (en) 1973-09-14
CA977464A (en) 1975-11-04
DE2303706B2 (en) 1975-01-09
GB1417801A (en) 1975-12-17
DE2303706C3 (en) 1975-09-04
FR2169942B1 (en) 1976-04-09
IT976525B (en) 1974-09-10
DE2303706A1 (en) 1973-08-30

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