CA977464A - Integrated single crystal pressure transducer - Google Patents

Integrated single crystal pressure transducer

Info

Publication number
CA977464A
CA977464A CA161,236A CA161236A CA977464A CA 977464 A CA977464 A CA 977464A CA 161236 A CA161236 A CA 161236A CA 977464 A CA977464 A CA 977464A
Authority
CA
Canada
Prior art keywords
single crystal
pressure transducer
integrated single
crystal pressure
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA161,236A
Other versions
CA161236S (en
Inventor
Joseph M. Giachino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elsag Bailey Inc
Original Assignee
Bailey Meter Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bailey Meter Co filed Critical Bailey Meter Co
Application granted granted Critical
Publication of CA977464A publication Critical patent/CA977464A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
CA161,236A 1972-01-31 1973-01-15 Integrated single crystal pressure transducer Expired CA977464A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22221372A 1972-01-31 1972-01-31

Publications (1)

Publication Number Publication Date
CA977464A true CA977464A (en) 1975-11-04

Family

ID=22831336

Family Applications (1)

Application Number Title Priority Date Filing Date
CA161,236A Expired CA977464A (en) 1972-01-31 1973-01-15 Integrated single crystal pressure transducer

Country Status (6)

Country Link
JP (1) JPS4885092A (en)
CA (1) CA977464A (en)
DE (1) DE2303706C3 (en)
FR (1) FR2169942B1 (en)
GB (1) GB1417801A (en)
IT (1) IT976525B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2934073C2 (en) * 1979-08-23 1986-01-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analog multiple sensor
DE2934093C2 (en) * 1979-08-23 1984-12-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analog sensor
DE2940955A1 (en) * 1979-10-09 1981-04-23 Gosudarstvennyj naučno-issledovatel'skij institut teploenergetičeskogo priborostroenija, Moskva Semiconductor strain gauge with epitaxial p-silicon resistor - on sapphire monocrystal gives signal independent of ambient temp.
JPS57126169A (en) * 1981-01-13 1982-08-05 Gnii Teploene Semiconductor strain gauge transducer
IT1203547B (en) * 1986-03-10 1989-02-15 Marelli Autronica DEVICE AND PROCEDURE FOR MEASURING THE STATIC PRESSURE OF A FLUID

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270554A (en) * 1961-01-04 1966-09-06 Bell Telephone Labor Inc Diffused layer transducers
JPS4026990Y1 (en) * 1965-04-16 1965-09-20
DE1286222B (en) * 1965-07-17 1969-01-02 Telefunken Patent Integrated semiconductor circuit on a piezoelectric carrier
US3417322A (en) * 1966-06-29 1968-12-17 Gen Electric Simplified piezoresistive force sensing device
NL6808247A (en) * 1967-09-21 1969-03-25

Also Published As

Publication number Publication date
FR2169942A1 (en) 1973-09-14
FR2169942B1 (en) 1976-04-09
DE2303706C3 (en) 1975-09-04
DE2303706A1 (en) 1973-08-30
DE2303706B2 (en) 1975-01-09
IT976525B (en) 1974-09-10
GB1417801A (en) 1975-12-17
JPS4885092A (en) 1973-11-12

Similar Documents

Publication Publication Date Title
CA985062A (en) Pressure transducer
AU5415873A (en) Acoustic transducer
HK18377A (en) Pressure transducer
CA982685A (en) Piezoelectric transducer
CA963571A (en) Transducer
CA997055A (en) Piezoelectric transducer
CA977464A (en) Integrated single crystal pressure transducer
CA968464A (en) Compensated pressure transducer
CA969637A (en) Pressure-to-electric transducer
CA904381A (en) Temperature-compensated pressure transducer
CA891123A (en) Pressure transducer
CA981364A (en) Pressure transducer
AU467181B2 (en) Piezoelectric transducer
CA897987A (en) Differential pressure transducer
CA897989A (en) Fluted pressure transducer
CA904976A (en) Piezoelectric transducer configuration
CA908800A (en) Transducer
CA910672A (en) Transducer
CA913665A (en) Transducer
AU467829B2 (en) Transducer
CA897990A (en) Dual pressure ratio transducer
CA897832A (en) Capacitance type pressure transducer
CA964077A (en) Magnetoelastic transducer
CA887884A (en) Pressure transducer
CA912695A (en) Combination transducer