IT976525B - INTEGRATED SINGLE CRYSTAL PRESSURE TRANSDUCER - Google Patents

INTEGRATED SINGLE CRYSTAL PRESSURE TRANSDUCER

Info

Publication number
IT976525B
IT976525B IT931973A IT931973A IT976525B IT 976525 B IT976525 B IT 976525B IT 931973 A IT931973 A IT 931973A IT 931973 A IT931973 A IT 931973A IT 976525 B IT976525 B IT 976525B
Authority
IT
Italy
Prior art keywords
single crystal
pressure transducer
integrated single
crystal pressure
integrated
Prior art date
Application number
IT931973A
Other languages
Italian (it)
Original Assignee
Bailey Meter Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bailey Meter Co filed Critical Bailey Meter Co
Application granted granted Critical
Publication of IT976525B publication Critical patent/IT976525B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
IT931973A 1972-01-31 1973-01-30 INTEGRATED SINGLE CRYSTAL PRESSURE TRANSDUCER IT976525B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22221372A 1972-01-31 1972-01-31

Publications (1)

Publication Number Publication Date
IT976525B true IT976525B (en) 1974-09-10

Family

ID=22831336

Family Applications (1)

Application Number Title Priority Date Filing Date
IT931973A IT976525B (en) 1972-01-31 1973-01-30 INTEGRATED SINGLE CRYSTAL PRESSURE TRANSDUCER

Country Status (6)

Country Link
JP (1) JPS4885092A (en)
CA (1) CA977464A (en)
DE (1) DE2303706C3 (en)
FR (1) FR2169942B1 (en)
GB (1) GB1417801A (en)
IT (1) IT976525B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2934073C2 (en) * 1979-08-23 1986-01-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analog multiple sensor
DE2934093C2 (en) * 1979-08-23 1984-12-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequency analog sensor
DE2940955A1 (en) * 1979-10-09 1981-04-23 Gosudarstvennyj naučno-issledovatel'skij institut teploenergetičeskogo priborostroenija, Moskva Semiconductor strain gauge with epitaxial p-silicon resistor - on sapphire monocrystal gives signal independent of ambient temp.
JPS57126169A (en) * 1981-01-13 1982-08-05 Gnii Teploene Semiconductor strain gauge transducer
IT1203547B (en) * 1986-03-10 1989-02-15 Marelli Autronica DEVICE AND PROCEDURE FOR MEASURING THE STATIC PRESSURE OF A FLUID

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270554A (en) * 1961-01-04 1966-09-06 Bell Telephone Labor Inc Diffused layer transducers
JPS4026990Y1 (en) * 1965-04-16 1965-09-20
DE1286222B (en) * 1965-07-17 1969-01-02 Telefunken Patent Integrated semiconductor circuit on a piezoelectric carrier
US3417322A (en) * 1966-06-29 1968-12-17 Gen Electric Simplified piezoresistive force sensing device
NL6808247A (en) * 1967-09-21 1969-03-25

Also Published As

Publication number Publication date
FR2169942A1 (en) 1973-09-14
CA977464A (en) 1975-11-04
DE2303706B2 (en) 1975-01-09
GB1417801A (en) 1975-12-17
JPS4885092A (en) 1973-11-12
DE2303706C3 (en) 1975-09-04
FR2169942B1 (en) 1976-04-09
DE2303706A1 (en) 1973-08-30

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