GB1408215A - Production of monocrystalline gallium arsenide rods - Google Patents
Production of monocrystalline gallium arsenide rodsInfo
- Publication number
- GB1408215A GB1408215A GB983673A GB983673A GB1408215A GB 1408215 A GB1408215 A GB 1408215A GB 983673 A GB983673 A GB 983673A GB 983673 A GB983673 A GB 983673A GB 1408215 A GB1408215 A GB 1408215A
- Authority
- GB
- United Kingdom
- Prior art keywords
- gallium arsenide
- rod
- seed crystal
- production
- monocrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/42—Gallium arsenide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/906—Special atmosphere other than vacuum or inert
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1064—Seed pulling including a fully-sealed or vacuum-maintained crystallization chamber [e.g., ampoule]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
1408215 Production of monocrystalline gallium arsenide SIEMENS AG 28 Feb 1973 [1 March 1972] 9836/73 Heading B1S A monocrystalline rod of gallium arsenide of high crystal perfection is produced by a method in which the rod is pulled, by means of a seed crystal, from a melt in an inductively heated crucible, the pulling being carried out in a closed quartz tube with the vertical and rotational positioning being controlled by means of magnetic coupling to a seed holder so that the pulled rod tapers below the seed crystal and increases progressively to the required diameter, the seed crystal diameter being in the range 2-10 mm, the quartz tube is sealed with an atmoshere therein of an inert gas at 0.2-0.8 atm, having a thermal conductivity of less than or equal to 0.18 mW cm<SP>-1</SP> K<SP>-1</SP> at 300K and 0.3 mW cm<SP>-1</SP> K<SP>-1</SP> at 1500K, and free arsenic such that the arsenic partial pressure during pulling is 0.8- 1.5 atm. The inert gases used are Krypton, xenon, argon and nitrogen.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722209869 DE2209869B1 (en) | 1972-03-01 | 1972-03-01 | PROCESS FOR MANUFACTURING A DISPLACEMENT-FREE SINGLE CRYSTALLINE GALLIUM ARSENIDE ROD |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1408215A true GB1408215A (en) | 1975-10-01 |
Family
ID=5837589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB983673A Expired GB1408215A (en) | 1972-03-01 | 1973-02-28 | Production of monocrystalline gallium arsenide rods |
Country Status (7)
Country | Link |
---|---|
US (1) | US3819421A (en) |
JP (1) | JPS48102569A (en) |
BE (1) | BE795938A (en) |
CH (1) | CH591893A5 (en) |
DE (1) | DE2209869B1 (en) |
GB (1) | GB1408215A (en) |
NL (1) | NL7301465A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2420899A1 (en) * | 1974-04-30 | 1975-12-11 | Wacker Chemitronic | METHOD FOR PRODUCING SINGLE CRYSTALLINE GALLIUM ARSENIDE |
IT1207497B (en) * | 1985-05-29 | 1989-05-25 | Montedison Spa | MONO CRYSTALS OF GALLIO ARSENIURO WITH LOW DENSITY OF DISLOCATIONS AND HIGH PURITY. |
US5578284A (en) * | 1995-06-07 | 1996-11-26 | Memc Electronic Materials, Inc. | Silicon single crystal having eliminated dislocation in its neck |
JPH09255485A (en) * | 1996-03-15 | 1997-09-30 | Shin Etsu Handotai Co Ltd | Production of single crystal and seed crystal |
JP3850500B2 (en) * | 1996-12-06 | 2006-11-29 | コマツ電子金属株式会社 | Seed crystal holder for single crystal puller with magnetic field application |
CN110528061A (en) * | 2018-05-23 | 2019-12-03 | 中国科学院金属研究所 | A kind of method and special equipment of laser auxiliary heating growing large-size crystal |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2962363A (en) * | 1957-07-09 | 1960-11-29 | Pacific Semiconductors Inc | Crystal pulling apparatus and method |
US3344071A (en) * | 1963-09-25 | 1967-09-26 | Texas Instruments Inc | High resistivity chromium doped gallium arsenide and process of making same |
DE1233828B (en) * | 1964-07-03 | 1967-02-09 | Wacker Chemie Gmbh | Process for the production, cleaning and / or doping of monocrystalline or polycrystalline semiconductor compounds |
FR1473984A (en) * | 1966-01-10 | 1967-03-24 | Radiotechnique Coprim Rtc | Method and device for the production of monocrystalline binary compounds |
FR1568042A (en) * | 1968-01-18 | 1969-05-23 |
-
0
- BE BE795938D patent/BE795938A/en unknown
-
1972
- 1972-03-01 DE DE19722209869 patent/DE2209869B1/en active Granted
-
1973
- 1973-01-30 CH CH131973A patent/CH591893A5/xx not_active IP Right Cessation
- 1973-02-01 NL NL7301465A patent/NL7301465A/xx unknown
- 1973-02-22 US US00334935A patent/US3819421A/en not_active Expired - Lifetime
- 1973-02-28 GB GB983673A patent/GB1408215A/en not_active Expired
- 1973-03-01 JP JP48024724A patent/JPS48102569A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
NL7301465A (en) | 1973-09-04 |
US3819421A (en) | 1974-06-25 |
DE2209869B1 (en) | 1973-06-20 |
BE795938A (en) | 1973-08-27 |
DE2209869C2 (en) | 1974-01-24 |
JPS48102569A (en) | 1973-12-22 |
CH591893A5 (en) | 1977-10-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |