GB1362535A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
GB1362535A
GB1362535A GB4521671A GB4521671A GB1362535A GB 1362535 A GB1362535 A GB 1362535A GB 4521671 A GB4521671 A GB 4521671A GB 4521671 A GB4521671 A GB 4521671A GB 1362535 A GB1362535 A GB 1362535A
Authority
GB
United Kingdom
Prior art keywords
tube
electron microscope
scanning electron
sept
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4521671A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETEC CORP
Original Assignee
ETEC CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETEC CORP filed Critical ETEC CORP
Publication of GB1362535A publication Critical patent/GB1362535A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1362535 Electron microscopes ETEC CORP 28 Sept 1971 [28 Sept 1970] 45216/71 Heading H1D The scanning and focusing coils 16, 24, 26 of a scanning electron microscope are disposed externally of a tube 20 which extends between an electron gun housing 10 and a specimen chamber 31, the housing, chamber and tube being evacuated. The tube 20 may consist of an outer tube 20a of insulating material and an inner tube 20b of metal such as non-magnetic stainless steel.
GB4521671A 1970-09-28 1971-09-28 Scanning electron microscope Expired GB1362535A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7589970A 1970-09-28 1970-09-28

Publications (1)

Publication Number Publication Date
GB1362535A true GB1362535A (en) 1974-08-07

Family

ID=22128647

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4521671A Expired GB1362535A (en) 1970-09-28 1971-09-28 Scanning electron microscope

Country Status (4)

Country Link
JP (1) JPS5550340B1 (en)
DE (1) DE2136250C2 (en)
FR (1) FR2105788A5 (en)
GB (1) GB1362535A (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2206415A (en) * 1938-12-03 1940-07-02 Rca Corp Method of making electronic photomicrographs
US3509335A (en) * 1967-06-26 1970-04-28 William Charles Nixon Electron microscope having two separate specimen stages
JPS4932627A (en) * 1972-07-20 1974-03-25

Also Published As

Publication number Publication date
JPS5550340B1 (en) 1980-12-17
DE2136250C2 (en) 1982-11-25
DE2136250A1 (en) 1972-03-30
FR2105788A5 (en) 1972-04-28

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee