GB1339164A - Multi-layer coating apparatus - Google Patents

Multi-layer coating apparatus

Info

Publication number
GB1339164A
GB1339164A GB2013371A GB2013371A GB1339164A GB 1339164 A GB1339164 A GB 1339164A GB 2013371 A GB2013371 A GB 2013371A GB 2013371 A GB2013371 A GB 2013371A GB 1339164 A GB1339164 A GB 1339164A
Authority
GB
United Kingdom
Prior art keywords
chamber
coating
chambers
frames
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2013371A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optical Coating Laboratory Inc
Original Assignee
Optical Coating Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Coating Laboratory Inc filed Critical Optical Coating Laboratory Inc
Publication of GB1339164A publication Critical patent/GB1339164A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB2013371A 1970-02-05 1971-04-19 Multi-layer coating apparatus Expired GB1339164A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US881370A 1970-02-05 1970-02-05

Publications (1)

Publication Number Publication Date
GB1339164A true GB1339164A (en) 1973-11-28

Family

ID=21733819

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2013371A Expired GB1339164A (en) 1970-02-05 1971-04-19 Multi-layer coating apparatus

Country Status (3)

Country Link
CA (1) CA953905A (de)
DE (1) DE2105167C2 (de)
GB (1) GB1339164A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160898A (en) * 1984-05-30 1986-01-02 Dowty Electronics Ltd Vacuum sputtering apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3086882A (en) * 1958-07-02 1963-04-23 Libbey Owens Ford Glass Co Method and apparatus for filming articles by vacuum deposition
DE1236900B (de) * 1959-03-13 1967-03-16 Erwin Lothar Holland Merten Vorrichtung zum Herstellen von metallischen UEberzuegen auf plattenfoermigen Koerpern oder Werkstuecktraegern durch Vakuum-Aufdampfen
LU43713A1 (de) * 1963-05-09 1964-11-09
US3404661A (en) * 1965-08-26 1968-10-08 Sperry Rand Corp Evaporation system
US3469560A (en) * 1966-05-04 1969-09-30 Sperry Rand Corp Continuous vacuum deposition apparatus
GB1251981A (de) * 1967-08-30 1971-11-03 Libbey Owens Ford Glass Co

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160898A (en) * 1984-05-30 1986-01-02 Dowty Electronics Ltd Vacuum sputtering apparatus

Also Published As

Publication number Publication date
DE2105167C2 (de) 1984-03-01
DE2105167A1 (de) 1971-10-28
CA953905A (en) 1974-09-03

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years