GB1339164A - Multi-layer coating apparatus - Google Patents
Multi-layer coating apparatusInfo
- Publication number
- GB1339164A GB1339164A GB2013371A GB2013371A GB1339164A GB 1339164 A GB1339164 A GB 1339164A GB 2013371 A GB2013371 A GB 2013371A GB 2013371 A GB2013371 A GB 2013371A GB 1339164 A GB1339164 A GB 1339164A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- coating
- chambers
- frames
- vapour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US881370A | 1970-02-05 | 1970-02-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1339164A true GB1339164A (en) | 1973-11-28 |
Family
ID=21733819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2013371A Expired GB1339164A (en) | 1970-02-05 | 1971-04-19 | Multi-layer coating apparatus |
Country Status (3)
Country | Link |
---|---|
CA (1) | CA953905A (de) |
DE (1) | DE2105167C2 (de) |
GB (1) | GB1339164A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2160898A (en) * | 1984-05-30 | 1986-01-02 | Dowty Electronics Ltd | Vacuum sputtering apparatus |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3086882A (en) * | 1958-07-02 | 1963-04-23 | Libbey Owens Ford Glass Co | Method and apparatus for filming articles by vacuum deposition |
DE1236900B (de) * | 1959-03-13 | 1967-03-16 | Erwin Lothar Holland Merten | Vorrichtung zum Herstellen von metallischen UEberzuegen auf plattenfoermigen Koerpern oder Werkstuecktraegern durch Vakuum-Aufdampfen |
LU43713A1 (de) * | 1963-05-09 | 1964-11-09 | ||
US3404661A (en) * | 1965-08-26 | 1968-10-08 | Sperry Rand Corp | Evaporation system |
US3469560A (en) * | 1966-05-04 | 1969-09-30 | Sperry Rand Corp | Continuous vacuum deposition apparatus |
GB1251981A (de) * | 1967-08-30 | 1971-11-03 | Libbey Owens Ford Glass Co |
-
1971
- 1971-01-27 CA CA103,826A patent/CA953905A/en not_active Expired
- 1971-02-04 DE DE19712105167 patent/DE2105167C2/de not_active Expired
- 1971-04-19 GB GB2013371A patent/GB1339164A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2160898A (en) * | 1984-05-30 | 1986-01-02 | Dowty Electronics Ltd | Vacuum sputtering apparatus |
Also Published As
Publication number | Publication date |
---|---|
DE2105167C2 (de) | 1984-03-01 |
DE2105167A1 (de) | 1971-10-28 |
CA953905A (en) | 1974-09-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PE20 | Patent expired after termination of 20 years |