CA953905A - Multi-layer coating apparatus, system and method - Google Patents

Multi-layer coating apparatus, system and method

Info

Publication number
CA953905A
CA953905A CA103,826A CA103826A CA953905A CA 953905 A CA953905 A CA 953905A CA 103826 A CA103826 A CA 103826A CA 953905 A CA953905 A CA 953905A
Authority
CA
Canada
Prior art keywords
layer coating
coating apparatus
layer
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA103,826A
Inventor
Richard H. Edwards
Eugene A. Eufusia
Edward A. Small (Jr.)
Robert M. Clary
Nils H. Bergfelt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optical Coating Laboratory Inc
Original Assignee
Optical Coating Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Coating Laboratory Inc filed Critical Optical Coating Laboratory Inc
Priority to CA176,188A priority Critical patent/CA965036A/en
Application granted granted Critical
Publication of CA953905A publication Critical patent/CA953905A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
CA103,826A 1970-02-05 1971-01-27 Multi-layer coating apparatus, system and method Expired CA953905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA176,188A CA965036A (en) 1970-02-05 1973-07-11 Conveyor system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US881370A 1970-02-05 1970-02-05

Publications (1)

Publication Number Publication Date
CA953905A true CA953905A (en) 1974-09-03

Family

ID=21733819

Family Applications (1)

Application Number Title Priority Date Filing Date
CA103,826A Expired CA953905A (en) 1970-02-05 1971-01-27 Multi-layer coating apparatus, system and method

Country Status (3)

Country Link
CA (1) CA953905A (en)
DE (1) DE2105167C2 (en)
GB (1) GB1339164A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8413776D0 (en) * 1984-05-30 1984-07-04 Dowty Electronics Ltd Sputtering process

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3086882A (en) * 1958-07-02 1963-04-23 Libbey Owens Ford Glass Co Method and apparatus for filming articles by vacuum deposition
DE1236900B (en) * 1959-03-13 1967-03-16 Erwin Lothar Holland Merten Device for producing metallic coatings on plate-shaped bodies or workpiece carriers by vacuum evaporation
LU43713A1 (en) * 1963-05-09 1964-11-09
US3404661A (en) * 1965-08-26 1968-10-08 Sperry Rand Corp Evaporation system
US3469560A (en) * 1966-05-04 1969-09-30 Sperry Rand Corp Continuous vacuum deposition apparatus
GB1251981A (en) * 1967-08-30 1971-11-03 Libbey Owens Ford Glass Co

Also Published As

Publication number Publication date
GB1339164A (en) 1973-11-28
DE2105167A1 (en) 1971-10-28
DE2105167C2 (en) 1984-03-01

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