CA965036A - Conveyor system - Google Patents

Conveyor system

Info

Publication number
CA965036A
CA965036A CA176,188A CA176188A CA965036A CA 965036 A CA965036 A CA 965036A CA 176188 A CA176188 A CA 176188A CA 965036 A CA965036 A CA 965036A
Authority
CA
Canada
Prior art keywords
conveyor system
conveyor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA176,188A
Other versions
CA176188S (en
Inventor
Richard H. Edwards
Robert M. Clary
Eugene A. Eufusia
Nils H. Bergfelt
Edward A. Small (Jr.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optical Coating Laboratory Inc
Original Assignee
Optical Coating Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CA103,826A external-priority patent/CA953905A/en
Application filed by Optical Coating Laboratory Inc filed Critical Optical Coating Laboratory Inc
Priority to CA176,188A priority Critical patent/CA965036A/en
Application granted granted Critical
Publication of CA965036A publication Critical patent/CA965036A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
CA176,188A 1970-02-05 1973-07-11 Conveyor system Expired CA965036A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA176,188A CA965036A (en) 1970-02-05 1973-07-11 Conveyor system

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US881370A 1970-02-05 1970-02-05
CA103,826A CA953905A (en) 1970-02-05 1971-01-27 Multi-layer coating apparatus, system and method
CA176,188A CA965036A (en) 1970-02-05 1973-07-11 Conveyor system

Publications (1)

Publication Number Publication Date
CA965036A true CA965036A (en) 1975-03-25

Family

ID=27160976

Family Applications (1)

Application Number Title Priority Date Filing Date
CA176,188A Expired CA965036A (en) 1970-02-05 1973-07-11 Conveyor system

Country Status (1)

Country Link
CA (1) CA965036A (en)

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