GB1323274A - Devices for coating by sputtering plates of glass ceramic and plastics panels - Google Patents
Devices for coating by sputtering plates of glass ceramic and plastics panelsInfo
- Publication number
- GB1323274A GB1323274A GB1493672A GB1493672A GB1323274A GB 1323274 A GB1323274 A GB 1323274A GB 1493672 A GB1493672 A GB 1493672A GB 1493672 A GB1493672 A GB 1493672A GB 1323274 A GB1323274 A GB 1323274A
- Authority
- GB
- United Kingdom
- Prior art keywords
- plates
- cathodes
- sputtering
- coating
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Abstract
1323274 Sputtering apparatus FLACHGLAS AG DELOG-DETAG 30 March 1972 [2 April 1971] 14936/72 Heading C7F Plates 3 of e.g. glass, ceramics or plastics are coated by sputtering from cathodes 5 suspended in a trolley 4 running on rails 18. The plates are supported in a frame 2 having upper and lower guide rails 8, 9 with adjustable distance pieces 11. To facilitate handling, the rails 9 have rollers 17. The trolley 4 may be moved by a cable. The sputtering gas may be introduced through drilled horizontal pipes at one end of the chamber Fig. 1 (not shown). The cathodes may be made of different materials and the voltage switched to apply layers of different materials. The plates and the cathodes may be curved.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2116190A DE2116190C3 (en) | 1971-04-02 | 1971-04-02 | Device for coating large-area plates such as glass panes, ceramic or plastic plates and the like by means of cathode sputtering |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1323274A true GB1323274A (en) | 1973-07-11 |
Family
ID=5803722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1493672A Expired GB1323274A (en) | 1971-04-02 | 1972-03-30 | Devices for coating by sputtering plates of glass ceramic and plastics panels |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3738928A (en) |
| BE (1) | BE781443A (en) |
| FR (1) | FR2132033B1 (en) |
| GB (1) | GB1323274A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1381835A (en) * | 1972-10-07 | 1975-01-29 | Delog Detag Flachglas Ag | Coating of large plates of glass ceramics plstics and the like by cathodic sputtering |
| US3976555A (en) * | 1975-03-20 | 1976-08-24 | Coulter Information Systems, Inc. | Method and apparatus for supplying background gas in a sputtering chamber |
| US4194962A (en) * | 1978-12-20 | 1980-03-25 | Advanced Coating Technology, Inc. | Cathode for sputtering |
| US4274936A (en) * | 1979-04-30 | 1981-06-23 | Advanced Coating Technology, Inc. | Vacuum deposition system and method |
| US20140246311A1 (en) * | 2013-03-01 | 2014-09-04 | Poole Ventura, Inc. | In-situ sputtering apparatus |
-
1972
- 1972-03-21 FR FR7209791A patent/FR2132033B1/fr not_active Expired
- 1972-03-30 GB GB1493672A patent/GB1323274A/en not_active Expired
- 1972-03-30 BE BE781443A patent/BE781443A/en not_active IP Right Cessation
- 1972-03-31 US US00240002A patent/US3738928A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2132033B1 (en) | 1975-10-24 |
| FR2132033A1 (en) | 1972-11-17 |
| BE781443A (en) | 1972-07-17 |
| US3738928A (en) | 1973-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |