CA884480A - Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering - Google Patents

Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering

Info

Publication number
CA884480A
CA884480A CA884480A CA884480DA CA884480A CA 884480 A CA884480 A CA 884480A CA 884480 A CA884480 A CA 884480A CA 884480D A CA884480D A CA 884480DA CA 884480 A CA884480 A CA 884480A
Authority
CA
Canada
Prior art keywords
sputtering
utilizing
coating
substrate
hollow cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA884480A
Inventor
L. Whitaker Howard
D. Davidse Pieter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA884480A publication Critical patent/CA884480A/en
Expired legal-status Critical Current

Links

CA884480A Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering Expired CA884480A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA884480T

Publications (1)

Publication Number Publication Date
CA884480A true CA884480A (en) 1971-10-26

Family

ID=36390804

Family Applications (1)

Application Number Title Priority Date Filing Date
CA884480A Expired CA884480A (en) Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering

Country Status (1)

Country Link
CA (1) CA884480A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415602A (en) * 1981-07-24 1983-11-15 Canadian Industrial Innovation Centre/Waterloo Reactive plating method and product

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415602A (en) * 1981-07-24 1983-11-15 Canadian Industrial Innovation Centre/Waterloo Reactive plating method and product

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