FR2132033A1 - - Google Patents

Info

Publication number
FR2132033A1
FR2132033A1 FR7209791A FR7209791A FR2132033A1 FR 2132033 A1 FR2132033 A1 FR 2132033A1 FR 7209791 A FR7209791 A FR 7209791A FR 7209791 A FR7209791 A FR 7209791A FR 2132033 A1 FR2132033 A1 FR 2132033A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7209791A
Other languages
French (fr)
Other versions
FR2132033B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Flachglas Wernberg GmbH
Original Assignee
Flachglas Wernberg GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2116190A external-priority patent/DE2116190C3/en
Application filed by Flachglas Wernberg GmbH filed Critical Flachglas Wernberg GmbH
Publication of FR2132033A1 publication Critical patent/FR2132033A1/fr
Application granted granted Critical
Publication of FR2132033B1 publication Critical patent/FR2132033B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7209791A 1971-04-02 1972-03-21 Expired FR2132033B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2116190A DE2116190C3 (en) 1971-04-02 1971-04-02 Device for coating large-area plates such as glass panes, ceramic or plastic plates and the like by means of cathode sputtering

Publications (2)

Publication Number Publication Date
FR2132033A1 true FR2132033A1 (en) 1972-11-17
FR2132033B1 FR2132033B1 (en) 1975-10-24

Family

ID=5803722

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7209791A Expired FR2132033B1 (en) 1971-04-02 1972-03-21

Country Status (4)

Country Link
US (1) US3738928A (en)
BE (1) BE781443A (en)
FR (1) FR2132033B1 (en)
GB (1) GB1323274A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1381835A (en) * 1972-10-07 1975-01-29 Delog Detag Flachglas Ag Coating of large plates of glass ceramics plstics and the like by cathodic sputtering
US3976555A (en) * 1975-03-20 1976-08-24 Coulter Information Systems, Inc. Method and apparatus for supplying background gas in a sputtering chamber
US4194962A (en) * 1978-12-20 1980-03-25 Advanced Coating Technology, Inc. Cathode for sputtering
US4274936A (en) * 1979-04-30 1981-06-23 Advanced Coating Technology, Inc. Vacuum deposition system and method
US20140246311A1 (en) * 2013-03-01 2014-09-04 Poole Ventura, Inc. In-situ sputtering apparatus

Also Published As

Publication number Publication date
US3738928A (en) 1973-06-12
FR2132033B1 (en) 1975-10-24
BE781443A (en) 1972-07-17
GB1323274A (en) 1973-07-11

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Legal Events

Date Code Title Description
ST Notification of lapse