GB1336060A - Device for exchange of objects in vacuum space - Google Patents

Device for exchange of objects in vacuum space

Info

Publication number
GB1336060A
GB1336060A GB4704371A GB4704371A GB1336060A GB 1336060 A GB1336060 A GB 1336060A GB 4704371 A GB4704371 A GB 4704371A GB 4704371 A GB4704371 A GB 4704371A GB 1336060 A GB1336060 A GB 1336060A
Authority
GB
United Kingdom
Prior art keywords
rod
disc
tube
holder
exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4704371A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesla AS
Original Assignee
Tesla AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesla AS filed Critical Tesla AS
Publication of GB1336060A publication Critical patent/GB1336060A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Beam Exposure (AREA)
GB4704371A 1971-02-25 1971-10-08 Device for exchange of objects in vacuum space Expired GB1336060A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS140971 1971-02-25

Publications (1)

Publication Number Publication Date
GB1336060A true GB1336060A (en) 1973-11-07

Family

ID=5348383

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4704371A Expired GB1336060A (en) 1971-02-25 1971-10-08 Device for exchange of objects in vacuum space

Country Status (3)

Country Link
DE (1) DE2151812B2 (enExample)
FR (1) FR2127515A5 (enExample)
GB (1) GB1336060A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112289668A (zh) * 2020-09-28 2021-01-29 北京中科科仪股份有限公司 一种电镜探测器的驱动机构及电镜探测器装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112289668A (zh) * 2020-09-28 2021-01-29 北京中科科仪股份有限公司 一种电镜探测器的驱动机构及电镜探测器装置

Also Published As

Publication number Publication date
FR2127515A5 (enExample) 1972-10-13
DE2151812C3 (enExample) 1974-07-04
DE2151812B2 (de) 1973-12-06
DE2151812A1 (de) 1972-08-31

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees