FR2127515A5 - - Google Patents
Info
- Publication number
- FR2127515A5 FR2127515A5 FR7142729A FR7142729A FR2127515A5 FR 2127515 A5 FR2127515 A5 FR 2127515A5 FR 7142729 A FR7142729 A FR 7142729A FR 7142729 A FR7142729 A FR 7142729A FR 2127515 A5 FR2127515 A5 FR 2127515A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS140971 | 1971-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2127515A5 true FR2127515A5 (enExample) | 1972-10-13 |
Family
ID=5348383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7142729A Expired FR2127515A5 (enExample) | 1971-02-25 | 1971-11-29 |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2151812B2 (enExample) |
| FR (1) | FR2127515A5 (enExample) |
| GB (1) | GB1336060A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112289668B (zh) * | 2020-09-28 | 2025-01-24 | 北京中科科仪股份有限公司 | 一种电镜探测器的驱动机构及电镜探测器装置 |
-
1971
- 1971-10-08 GB GB4704371A patent/GB1336060A/en not_active Expired
- 1971-10-18 DE DE19712151812 patent/DE2151812B2/de active Granted
- 1971-11-29 FR FR7142729A patent/FR2127515A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2151812C3 (enExample) | 1974-07-04 |
| DE2151812B2 (de) | 1973-12-06 |
| GB1336060A (en) | 1973-11-07 |
| DE2151812A1 (de) | 1972-08-31 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |