GB1334599A - Vacuum deposition of vapourized metals or metal compounds - Google Patents

Vacuum deposition of vapourized metals or metal compounds

Info

Publication number
GB1334599A
GB1334599A GB2022771A GB2022771A GB1334599A GB 1334599 A GB1334599 A GB 1334599A GB 2022771 A GB2022771 A GB 2022771A GB 2022771 A GB2022771 A GB 2022771A GB 1334599 A GB1334599 A GB 1334599A
Authority
GB
United Kingdom
Prior art keywords
vapour
deposit
varied
input
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2022771A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19702004184 external-priority patent/DE2004184C3/de
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB1334599A publication Critical patent/GB1334599A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB2022771A 1970-01-30 1971-04-19 Vacuum deposition of vapourized metals or metal compounds Expired GB1334599A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702004184 DE2004184C3 (de) 1970-01-30 Verfahren und Vorrichtung zum Aufdampfen von Metallen oder Metallverbindungen auf einem Träger im Vakuum mit Hilfe einer Elektronenstrahlkanone

Publications (1)

Publication Number Publication Date
GB1334599A true GB1334599A (en) 1973-10-24

Family

ID=5760947

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2022771A Expired GB1334599A (en) 1970-01-30 1971-04-19 Vacuum deposition of vapourized metals or metal compounds

Country Status (5)

Country Link
JP (1) JPS5123950B1 (cg-RX-API-DMAC7.html)
CH (1) CH544157A (cg-RX-API-DMAC7.html)
FR (1) FR2075059A5 (cg-RX-API-DMAC7.html)
GB (1) GB1334599A (cg-RX-API-DMAC7.html)
NL (1) NL7101237A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264718A (en) * 1992-03-04 1993-09-08 Univ Hull Vapour deposited coatings having at least three transitions in structure

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60225422A (ja) * 1984-04-24 1985-11-09 Hitachi Ltd 薄膜形成方法およびその装置
CN112119108B (zh) 2018-05-21 2022-10-28 旭化成株式会社 聚碳酸酯二醇

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264718A (en) * 1992-03-04 1993-09-08 Univ Hull Vapour deposited coatings having at least three transitions in structure
GB2264718B (en) * 1992-03-04 1995-04-26 Univ Hull Coatings produced by vapour deposition

Also Published As

Publication number Publication date
FR2075059A5 (cg-RX-API-DMAC7.html) 1971-10-08
NL7101237A (cg-RX-API-DMAC7.html) 1971-08-03
CH544157A (de) 1973-11-15
JPS5123950B1 (cg-RX-API-DMAC7.html) 1976-07-20
DE2004184A1 (de) 1971-08-05
DE2004184B2 (de) 1975-07-03

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee